Abstract: Proposed are a substrate processing apparatus and a substrate processing method capable of efficiently preventing contamination of a substrate and a processing space caused by a reverse flow of purge gas.

Abstract: According to embodiments, a light emitting display device and a vehicle including the light emitting display device include a light emitting diode disposed on a substrate and including a light emitting layer; a pixel defining layer having an opening corresponding to the light emitting layer; light blocking linear patterns disposed on the pixel defining layer and the light emitting layer and extending in a first direction; a color converting layer disposed between the light blocking linear patterns; and an upper transparent organic layer disposed between the light blocking linear patterns and disposed on the color converting layer.

Abstract: A display device includes a display panel configured to display an image, a sensing panel configured to at least partially overlap the display panel and that includes a sensing area and a non-sensing area, a sensing panel controller configured to drive the sensing panel, a plurality of sensing electrodes disposed in the sensing area, and a plurality of sensing lines electrically connected to the plurality of sensing electrodes, respectively. The sensing panel controller is configured to apply the same sensing voltage to each of the plurality of sensing lines or to apply a reference voltage different from the sensing voltage to at least some sensing lines among the plurality of sensing lines.

Abstract: A photomask inspection apparatus includes a stage which supports an inspection substrate, a first optical system having a first numerical aperture and disposed at one side of the inspection substrate, a second optical system having a second numerical aperture, spaced apart from the first optical system, and disposed at the one side of the inspection substrate, an imaging optical system including a first objective lens aligned with the first optical system with the inspection substrate disposed therebetween, a second objective lens aligned with the second optical system with the inspection substrate disposed therebetween, and disposed at another side of the inspection substrate, which is opposite to the one side of the inspection substrate, and a camera which captures an image passed through the imaging optical system. The first numerical aperture is greater than the second numerical aperture.

Abstract: A photomask includes a first light-transmitting portion including first and second main patterns spaced apart from each other in a first direction, a second light-transmitting portion having a light transmittance lower than a light transmittance of the first light-transmitting portion and including a first auxiliary pattern disposed between the first and second main patterns and extending in a second direction crossing the first direction, a second auxiliary pattern spaced apart from the first auxiliary pattern in the first direction with the first main pattern interposed therebetween and surrounding the first main pattern, and a third auxiliary pattern spaced apart from the first auxiliary pattern in the first direction with the second main pattern interposed therebetween and surrounding the second main pattern, and a light shielding portion surrounding the first and second light-transmitting portions.

Abstract: A touch sensor includes first touch cells disposed in a first touch sensing area, the first touch cells each including a first touch pattern and a first dummy pattern, and second touch cells disposed in a second touch sensing area, the second touch cells each including a second touch pattern and a second dummy pattern. An area of a first dummy pattern area in which the first dummy pattern is disposed is greater than an area of a second dummy pattern area in which the second dummy pattern is disposed.

Abstract: An apparatus for evaluating the quality of digital human content included in a source input are disclosed. The apparatus comprises a test method generation unit configured to receive test methods including identification information of questions and evaluation methods for the questions, and referring to a pre-stored question list and an evaluation method set, generate at least one of subjective test methods or objective test methods from the test methods. The apparatus comprises an evaluation result acquisition unit configured to obtain subjective evaluation results for the digital human content using the subjective test methods and obtain objective evaluation results for the digital human content using the objective test methods.

Abstract: A touch member for a display device includes first and second touch signal lines and an insulating layer between first and second conductive layers. The first touch signal line includes a first sub-touch signal line corresponding to the first conductive layer, and a second sub-touch signal line corresponding to the second conductive layer and connected to the first sub-touch signal line through first and second contact holes penetrating the insulating layer. The second touch signal line includes a third sub-touch signal line corresponding to the first conductive layer, and a fourth sub-touch signal line corresponding to the second conductive layer and connected to the third sub-touch signal line through third and fourth contact holes penetrating the insulating layer. The first and second contact holes are spaced by a first distance, and the third and fourth contact holes are spaced by a second distance less than the first distance.

Abstract: A display device includes a display panel which includes a display area including a plurality of pixels; a touch sensing unit disposed on a front surface of the display panel; a display driving circuit, configured to drive the pixels of the display area based on display control firmware; and a touch driving circuit configured to drive touch electrodes of the touch sensing unit based on touch driving firmware, and further configured to generate touch coordinate data, wherein the display control firmware and the touch driving firmware are initialized or changed according to a comparison result between a flicker noise detection value of the display area and a reference flicker noise detection value, wherein the flicker noise detection value is determined by measuring a change in luminance over time of a flicker detection pattern displayed in the display area.

Abstract: An apparatus for inspecting a display device including a touch sensor may include: a power source generator configured to generate a pixel voltage of the display device; and a variable impedance circuit electrically connected to an output terminal of the power source generator, wherein the variable impedance circuit may include: a variable resistance circuit electrically connected to the power source generator and an output terminal of the variable impedance circuit, and including resistors connected in parallel with each other; and a variable capacitor circuit electrically connected to the power source generator and a ground voltage source.

Abstract: An input sensing unit may include the following elements: a first sensing electrode including first sensors and a first connector coupling the first sensors; a second sensing electrode including second sensors and a second connector coupling the second sensors; a first sensing line including first sensing line parts and a third connector coupling the first sensing line parts; a second sensing line; and an insulating layer including a first insulating side and a second insulating side opposite the first insulating side. The first sensing line parts may overlap the first sensors and may be disposed on the first insulating side. The second sensing line may overlap the second sensors and may be disposed on the first insulating side. The first sensors may be disposed on the second insulating side. The second sensors may be disposed on the second insulating side.

Abstract: A touch detection module, includes: a plurality of driving electrodes arranged side by side; a plurality of sensing electrodes staggered with respect to the driving electrodes; and a touch driving circuit configured to supply touch driving signals to the plurality of driving electrodes and to detect touch detection signals through the plurality of sensing electrodes to identify touch position coordinates, wherein the touch driving circuit is configured: to vary frequency modulation parameter set values in response to a change in a frequency of reference clocks, and to generate and supply a frequency of the touch driving signals by using the reference clocks and a varied frequency modulation parameter set value.

Abstract: A display is provided. A display panel including a first substrate, a second substrate an active element layer disposed on the first substrate, and a sealing member coupling the first substrate and the second substrate, and a touch member disposed on the display panel and including a touch signal line and a touch antistatic line, wherein the touch antistatic line is disposed outside the touch signal line and at least partially overlaps the sealing member, and the touch antistatic line has light transmittance higher than light transmittance of the touch signal line.

Abstract: Provided is a fingerprint authentication device comprising a biometric sensor that senses biometric information to generate a sensing signal; an image processor that extracts a calibration function based on calibration data and generates a fingerprint image based on the calibration function and the sensing signal; and an authenticator that performs fingerprint authentication by comparing the fingerprint image and registered fingerprint information. The calibration data includes information on a calibration coefficient of the calibration function.

Abstract: An input sensing unit may include the following elements: a first sensing electrode including first sensors and a first connector coupling the first sensors; a second sensing electrode including second sensors and a second connector coupling the second sensors; a first sensing line including first sensing line parts and a third connector coupling the first sensing line parts; a second sensing line; and an insulating layer including a first insulating side and a second insulating side opposite the first insulating side. The first sensing line parts may overlap the first sensors and may be disposed on the first insulating side. The second sensing line may overlap the second sensors and may be disposed on the first insulating side. The first sensors may be disposed on the second insulating side. The second sensors may be disposed on the second insulating side.

Abstract: A touch detection module includes driving electrodes extending parallel to each other, sensing electrodes crossing the driving electrodes, and a touch driver circuit for supplying touch driving signals to the driving electrodes and for detecting touch sensing signals through the sensing electrodes to determine touch position coordinates. The touch driver circuit selects between a group driving scheme and a sequential driving scheme for at least one frame. According to the group driving scheme, the touch driver circuit sorts the driving electrodes into groups, simultaneously drives driving electrodes in a same group among the groups, and drives the groups at different times. According to the sequential driving scheme, the touch driving circuit sequentially drives the driving electrodes.

Abstract: A method for inspecting a display device (which includes a pixel electrode and a touch sensor overlapping the pixel electrode) includes: adjusting an impedance value of a variable impedance circuit of an inspection apparatus according to a model of the display device; driving a power source generator of the inspection apparatus; supplying a pixel voltage to the pixel electrode through an output terminal connected to the variable impedance circuit; driving the touch sensor; and detecting a defect related to the pixel electrode based on sensing signals output from the touch sensor.

Abstract: A touch sensing unit includes a first electrode including a plurality of first main patterns arranged in a first direction and a first outer pattern arranged on one sides of the plurality of first main patterns, a second electrode including a plurality of second main patterns arranged in a second direction intersecting the first direction and a second outer pattern arranged on one sides of the plurality of second main patterns, a first compensation pattern extending along an edge of the first outer pattern, and a first signal wire connected to at least one of the first outer pattern and the first compensation pattern. The first compensation pattern includes a first compensation connection part protruding toward the first outer pattern and connected to the first outer pattern.

Abstract: The present disclosure relates to a touch detection device that can increase the emission efficiency while maintaining touch detecting performance by improving the structure of touch electrodes. According to an embodiment of the disclosure, a touch detection device comprising a first touch insulating layer, a connection electrode disposed on the first touch insulating layer, a second touch insulating layer disposed on the connection electrode, a driving electrode disposed on a second touch insulating layer and connected to the connection electrode through at least one touch contact hole, and a sensing electrode disposed on the second touch and spaced apart from the driving electrode, wherein at least one of the driving electrode and the sensing electrode a conductive metal electrode and a metal oxide electrode which is oxidized.

Abstract: A display device includes a substrate. A plurality of sensing electrodes is on the substrate. A first touch insulating layer is disposed above the plurality of sensing electrodes. A plurality of driving electrodes is disposed on an upper surface of the first touch insulating layer. The plurality of driving electrodes receives a touch driving signal. A touch driving circuit sensing a change amount of mutual capacitance is formed between the plurality of driving electrodes and the plurality of sensing electrodes by the plurality of sensing electrodes. The first touch insulating layer includes an organic material.