Patents by Inventor Tae-Jung Kan

Tae-Jung Kan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coating apparatus having coater chuck
    Patent number: 8726828
    Abstract: Disclosed is a coating apparatus having a coater chuck capable of improving a photoresist coating uniformity by preventing the coater chuck for performing a photoresist coating process from being sunk, in a manner of employing a different type of a material for making the coater chuck, wherein the coater chuck is made of stone and connected to a a servo motor via a drive shaft, the driving shaft being movable up and down, and a glass substrate coated with photoresist through a slit nozzle is placed on the coater chuck.
    Type: Grant
    Filed: July 23, 2010
    Date of Patent: May 20, 2014
    Assignee: LG Display Co., Ltd.
    Inventors: Dong-Young Joo, Tae-Jung Kan
  • COATING APPARATUS HAVING COATER CHUCK
    Publication number: 20110017129
    Abstract: Disclosed is a coating apparatus having a coater chuck capable of improving a photoresist coating uniformity by preventing the coater chuck for performing a photoresist coating process from being sunk, in a manner of employing a different type of a material for making the coater chuck, wherein the coater chuck is made of stone and connected to a servo motor via a drive shaft, the driving shaft being movable up and down, and a glass substrate coated with photoresist through a slit nozzle is placed on the coater chuck.
    Type: Application
    Filed: July 23, 2010
    Publication date: January 27, 2011
    Applicant: LG Display Co., Ltd.
    Inventors: Dong-Young Joo, Tae-Jung Kan