Abstract: Disclosed is a source gas jetting nozzle which includes a connection pipe having a portion connected to a source gas supplier, a first gas pipe including a communication hole communicating with the connection pipe by connecting to one end of the connection pipe and a first jetting hole, the communication hole and the first jetting hole being formed on the outer surface of the first gas pipe, and a second gas pipe including the first gas pipe inside the second gas pipe, and including a first insertion hole for inserting a predetermined part of the connection pipe to connect the one end of the connection pipe to the communication hole of the first gas pipe, and a second jetting hole for jetting the source gas introduced from the first gas pipe.

Abstract: Disclosed is a source gas jetting nozzle which includes a first gas pipe having one portion connected to a source gas supplier for supplying a source gas, including a first heater inside the first gas pipe, and including a first jetting hole formed on an outer surface of the first gas pipe, for jetting the source gas introduced from the source gas supplier, and a second gas pipe including the first gas pipe inside the second gas pipe, and including a plurality of second jetting holes formed on an outer surface of the second gas pipe, for jetting the source gas introduced from the first gas pipe.

Abstract: Disclosed is a scintillator panel, including a substrate, a scintillator layer formed on the substrate and including a plurality of columnar crystals so that radiation is converted into light at a predetermined wavelength, a dam structure formed on the substrate to be spaced apart by a predetermined interval from a peripheral edge of the scintillator layer, a protective layer formed on a surface of the scintillator layer, a surface of the substrate defined between the scintillator layer and the dam structure and a portion of a surface of the dam structure, a first coating layer formed on the protective layer to be disposed in a space between a peripheral surface of the scintillator layer and the dam structure, and a second coating layer formed on the first coating layer and the protective layer.