Abstract: A test device includes a memory and a controller. The memory stores reference data including a reference image obtained by photographing a reference pattern on a first semiconductor sample, a first height of the reference pattern, a first shadow length of the reference pattern, and a reference value that represents a correlation between the first height and the first shadow length. The controller receives an image obtained by photographing a pattern on a second semiconductor sample, measures a second shadow length of the pattern from the image, and calculates a second height of the pattern from the second shadow length based on the reference data.

Abstract: A defect detection device includes: a memory configured to store a layout image indicating a circuit pattern and indicating a dummy pattern; and a controller comprising an artificial neural network configured to learn the layout image, the controller being configured to: determine, based on an inspection image obtained by photographing an area including a defect on a wafer, whether the defect is in a first area in which the circuit pattern is positioned or in a second area in which the dummy pattern is positioned, by using the artificial neural network, and determine a type of the defect based on whether the defect is positioned is in the first area or in the second area.

Abstract: The step of setting policy set tables includes the steps of generating one or more first-order policy set tables corresponding to one or more sections of packet information, respectively, each of said first-order policy set tables containing at least one policy sets having a predetermined number of policy members to be related with the corresponding section of the packet information; and pairing off said plurality of policy set tables to generate next-order policy set tables with all possible intersections of the paired first-order policy set tables. The step of discriminating the policy includes the steps of extracting one or more sections of packet information related to the policy information from the incoming packet; and querying to each of all the generated policy set tables with respective index values corresponding to each of the extracted packet information sections to discriminate the final policy for the incoming packet.

Abstract: The step of setting policy set tables includes the steps of generating one or more first-order policy set tables corresponding to one or more sections of packet information, respectively, each of said first-order policy set tables containing at least one policy sets having a predetermined number of policy members to be related with the corresponding section of the packet information; and pairing off said plurality of policy set tables to generate next-order policy set tables with all possible intersections of the paired first-order policy set tables. The step of discriminating the policy includes the steps of extracting one or more sections of packet information related to the policy information from the incoming packet; and querying to each of all the generated policy set tables with respective index values corresponding to each of the extracted packet information sections to discriminate the final policy for the incoming packet.