Patents by Inventor Tae Sub LEE

Tae Sub LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230072272
    Abstract: Provided is a heating unit including: a heating plate for heating a substrate; a heater installed in the heating plate; and a control unit for controlling the heater, in which wherein the heater includes: a first heater; and a second heater installed at a position different from a position of the first heater, and the control unit includes: a power source for transferring power to at least one of the first heater and the second heater; and a switching module for connecting the first heater and the second heater in series or connecting the first heater and the second heater in parallel.
    Type: Application
    Filed: September 2, 2022
    Publication date: March 9, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Tae Sub LEE, Gyu Hyun KIM, Sung Yong LEE, Dong Hyuk SEO
  • Patent number: 11295952
    Abstract: An apparatus for treating a substrate is disclosed. The apparatus for treating the substrate includes a housing having a treatment space inside the housing, a plate to support the substrate inside the housing, a heating member provided inside the plate to heat the substrate and including a plurality of heating zones, a temperature measuring member to measure a temperature of the substrate with respect to each of the plurality of heating zones of the heating member, and a control unit to control a temperature for the heating member in a dynamic section of a temperature change graph measured in the temperature measuring member. The control unit performs temperature control with respect to each of the plurality of heating zones of the heating member to uniformize the thickness of the thin film on the substrate.
    Type: Grant
    Filed: June 9, 2020
    Date of Patent: April 5, 2022
    Assignee: Semes Co., Ltd.
    Inventors: Tae Sub Lee, Gyu Hyun Kim, Sung Yong Lee, Donghyuk Seo, Seo Jung Park
  • Publication number: 20200388496
    Abstract: An apparatus for treating a substrate is disclosed. The apparatus for treating the substrate includes a housing having a treatment space inside the housing, a plate to support the substrate inside the housing, a heating member provided inside the plate to heat the substrate and including a plurality of heating zones, a temperature measuring member to measure a temperature of the substrate with respect to each of the plurality of heating zones of the heating member, and a control unit to control a temperature for the heating member in a dynamic section of a temperature change graph measured in the temperature measuring member. The control unit performs temperature control with respect to each of the plurality of heating zones of the heating member to uniformize the thickness of the thin film on the substrate.
    Type: Application
    Filed: June 9, 2020
    Publication date: December 10, 2020
    Applicant: SEMES CO., LTD.
    Inventors: Tae Sub LEE, Gyu Hyun KIM, Sung Yong LEE, Donghyuk SEO, Seo Jung PARK
  • Publication number: 20200211874
    Abstract: Disclosed is a substrate treating apparatus that includes a housing having a process space therein, a plate that supports a substrate in the housing, a heating member that is provided in the plate and that heats the substrate, a plurality of controllers that control the heating member and that have different gains, a temperature measurement member that measures temperature in the housing, and a control member that switches the plurality of controllers to cause one of the plurality of controllers to control the heating member depending on a temperature drop section, a temperature rise section, and an anneal section in the housing.
    Type: Application
    Filed: December 24, 2019
    Publication date: July 2, 2020
    Applicant: SEMES CO., LTD.
    Inventors: Sung Yong LEE, Donghyuk SEO, Sangbok HAN, Tae Sub LEE