Patents by Inventor Tae-Ug Kang

Tae-Ug Kang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUPPLY CONTROL SYSTEM FOR A PLURALITY OF TANKS
    Publication number: 20230408034
    Abstract: A supply control system for a tank utilized in a semiconductor manufacturing process is disclosed.
    Type: Application
    Filed: September 16, 2021
    Publication date: December 21, 2023
    Inventors: WILLIAM THOMAS PILTZ, CYNTHIA LEE HUGHES, JOHN PAUL PREGO, SHAWN S. CABLE, SANG-JAE YIM, ANTHONY JOHN SMITH, JIHOON KIM, SANG-KEUN LEE, YONG-TAE KIM, TAE-UG KANG, HO-SAN KWON, SUNG-UP JANG, YOUNG-SOO CHOI, HYO-JONG HWANG, BANG-YEON YU
  • Gas supply system
    Patent number: 11755437
    Abstract: The gas supply system of this invention is furnished with a cylinder apparatus having a pneumatic valve that supplies process gas to a process chamber, and a solenoid valve that opens or closes said pneumatic valve by supplying or stopping the flow of valve actuating gas to said pneumatic valve; and a gas supply control apparatus that controls the actuation of the solenoid valve. In addition, said gas supply control apparatus comprises a main controller that controls the actuation of said solenoid valve during normal operation, and a sub-controller that senses an abnormal state of said main controller and if an abnormality is sensed, controls the actuation of said solenoid valve instead of said main controller.
    Type: Grant
    Filed: June 15, 2018
    Date of Patent: September 12, 2023
    Assignee: Versum Materials US, LLC
    Inventors: Tae-Jun Lim, Jihoon Kim, Tae-Ug Kang