Abstract: A cathode having a groove extending about 10 to about 450 microns into a surface of the cathode. The cathode can also be roughened.

Abstract: Disclosed herein are a high-sensitivity method and apparatus for monitoring the concentration or inflow of impurities in circulating water of a circulating water system, which can remarkably improve the measurement sensitivity by converting carbonate ions of low conductivity into chlorine or sulfate ions of increased conductivity, and which can measure the inflow of air or organic substances and the amount of inflow in a simple and efficient manner in real-time. The method of the present invention comprises the steps of: increasing a content of strong acids in sample water and thus increasing equivalent conductivity of the impurities, by utilizing cation exchange resin together with anion exchange resin, in which cations of the sample water are adsorbed on the cation exchange resin to form strong acids while weakly acidic anions of low dissociation degree in the sample water are adsorbed on the anion exchange resin to form strong acids; and measuring the increased conductivity of the impurities.

Abstract: An electrostatic chuck to minimize an arc and a glow discharge during processing of a semiconductor substrate is provided, In one aspect, an electrostatic chuckin a processing chamber includes a body having a first hole for providing a cooling gas to a backside of a substrate to control a temperature of the substrate, an inner electrode for generating an electrostatic force and a dielectric layer. A ceramic block is tightly inserted into a first hole and has a second hole connected to the first hole. A third hole formed through the dielectric layer is connected to the first hole and the second hole. The cooling gas is provided to the backside of the substrate through the first hole or the second hole. Since the first hole is covered with the ceramic block, the generation of an arc or a glow discharge inside the first hole may be minimized, thereby preventing damage to the electrostatic chuck and improving production yields.

Abstract: A digital television receiver and antenna control method in the digital television receiver are disclosed. The digital television receiver includes and antenna having directivity according to a control signal for switching patterns of the antenna. A receiving section receives and processes channel signals for digital television broadcasting through the antenna. An antenna control section generates the control signal for switching the patterns of the antenna based on channel information according to the received channel signal. An antenna switching control section switches the patterns of the antenna during a sync signal period of the received channel signal when the control signal is generated.

Abstract: A metal gasket for a semiconductor fabrication chamber capable of preventing base plate metal contamination in the chamber, wherein the metal gasket includes a diffusion barrier layer interposed between a base plate and an anti-corrosive coating layer, and wherein the diffusion barrier layer prevents elements of the base plate from being diffused to the anti-corrosive coating layer. Accordingly, the diffusion barrier layer prevents attack on the anti-corrosive coating layer.

Abstract: Disclosed is a digital TV smart antenna system and controlling method of the same, the system converges a smart antenna into an optimal reception by detecting a maximum signal power in a signal acquisition process for a fast acquisition performance and selectively assembling information such as signal power, multi-channel, SNR, and SER, and particularly, calculates signal power according to the antenna direction by fixing AGC as a specific value for detecting the maximum signal power.

Abstract: An apparatus for heating a substrate of a semiconductor device includes a hot plate, on which a semiconductor substrate is placed, and a heater for heating the hot plate. The hot plate is preferably a composite plate including a plurality of plates having different thermal conductivities from each other. For example, a first plate adjacent to the heater can be made of aluminum, which has a relatively high thermal conductivity. A second plate, laminated on top of the first plate, can be made of titanium or stainless steel, which both have a thermal conductivity lower than aluminum. A composite hot plate as disclosed herein is better able to maintain a constant temperature and a uniform temperature distribution in order to more uniformly heat a substrate and to reduce an amount of energy required for the heating process. In addition, the reliability and productivity of the semiconductor device manufactured by the apparatus can be improved.

Abstract: Disclosed is a digital TV receiver, in which a symbol synchronization signal and a carrier signal are compensated by detecting multipath channel information. The present invention compensates a carrier and symbol synchronization signal attenuated due to multipath by detecting a degree of attenuation affected by a multipath signal from a pilot signal and symbol timing information, and uses a degree of attenuation affected by a multipath signal detected from a pilot signal and symbol timing information as multipath information to apply to a smart antenna control. Therefore, the present invention enables to enhance receiving performance of the digital TV receiver.

Abstract: A timing recovery apparatus and method for a digital TV is disclosed. The timing recovery apparatus includes: a symbol synchronization unit for determining the bandwidth of a timing recovery loop in a plurality of steps according to a convergence degree; and a timing lock detector for detecting a lock using a reference value calculated by the envelope of a timing error, whereby the envelope of the timing error calculated according to a channel state is used as a reference value for thereby preventing a lock error and assuring a rapid and accurate convergence characteristic.

Abstract: A metal gasket for a semiconductor fabrication chamber capable of preventing base plate metal contamination in the chamber, wherein the metal gasket includes a diffusion barrier layer interposed between a base plate and an anti-corrosive coating layer, and wherein the diffusion barrier layer prevents elements of the base plate from being diffused to the anti-corrosive coating layer. Accordingly, the diffusion barrier layer prevents attack on the anti-corrosive coating layer.

Abstract: A bipolar transistor is provided.

Abstract: An electrostatic chuck of an ion implanter includes a base, a platen mounted on the base, and a clamp mechanically fixing the platen on the base. The clamp has a fixing member latched to the platen and coupling bolts that fix the fixing member to the base.

Abstract: Disclosed herein are a high-sensitivity method and apparatus for monitoring the concentration or inflow of impurities in circulating water of a circulating water system, which can remarkably improve the measurement sensitivity by converting carbonate ions of low conductivity into chlorine or sulfate ions of increased conductivity, and which can measure the inflow of air or organic substances and the amount of inflow in a simple and efficient manner in real-time. The method of the present invention comprises the steps of: increasing a content of strong acids in sample water and thus increasing equivalent conductivity of the impurities, by utilizing cation exchange resin together with anion exchange resin, in which cations of the sample water are adsorbed on the cation exchange resin to form strong acids while weakly acidic anions of low dissociation degree in the sample water are adsorbed on the anion exchange resin to form strong acids; and measuring the increased conductivity of the impurities.

Abstract: An apparatus for heating a substrate of a semiconductor device includes a hot plate, on which a semiconductor substrate is placed, and a heater for heating the hot plate. The hot plate is preferably a composite plate including a plurality of plates having different thermal conductivities from each other. For example, a first plate adjacent to the heater can be made of aluminum, which has a relatively high thermal conductivity. A second plate, laminated on top of the first plate, can be made of titanium or stainless steel, which both have a thermal conductivity lower than aluminum. A composite hot plate as disclosed herein is better able to maintain a constant temperature and a uniform temperature distribution in order to more uniformly heat a substrate and to reduce an amount of energy required for the heating process. In addition, the reliability and productivity of the semiconductor device manufactured by the apparatus can be improved.

Abstract: An alkaline cell having an anode comprising zinc and a cathode comprising manganese dioxide wherein the cathode is located annularly along the inside surface of the cell housing and has a plurality of indentations on the inside of its surface facing the cell interior. Each indentation has a wall defining a channel with an opening thereto running preferably in the direction of the cell's length. The channel and opening facing the cell interior filled with anode material. The cell can have an anode current collector, typically of metal, with at least a portion of its surface extending into the cathode indentation channel. The anode current collector can have a portion of its surface extending from a point within the anode and into the cathode indentation channel through said opening. The cell can include a cathode current collector comprising a sheet of conductive material such as a sheet of metal or graphite placed within the cathode, particularly within thick regions of the cathode.

Abstract: An alkaline cell having an anode comprising zinc and a cathode comprising manganese dioxide wherein the cathode is located annularly along the inside surface of the cell housing and has a plurality of indentations on the inside of its surface facing the cell interior. Each indentation has a wall defining a channel with an opening thereto running preferably in the direction of the cell's length. The channel and opening facing the cell interior filled with anode material. The cell can have an anode current collector, typically of metal, with at least a portion of its surface extending into the cathode indentation channel. The anode current collector can have a portion of its surface extending from a point within the anode and into the cathode indentation channel through said opening. The cell can include a cathode current collector comprising a sheet of conductive material such as a sheet of metal or graphite placed within the cathode, particularly within thick regions of the cathode.

Abstract: Disclosed is an antenna controller of a digital television receiver and a controlling method thereof including an antenna receiving channel signals of digital television broadcasting and having a directionality dependent on a control signal, a signal processing part tuning a wanted channel signal from the channel signals and processing the tuned channel signal as a wanted form, a detection part detecting state signals of the channel signal outputted from the signal processing part, a memory, when every new state signal is detected, storing the detected new state signal sorted with previously-detected state signals, a control part producing the control signal corresponding to an optimal direction of the antenna by comparing the new state signal to the previous state signals, and an interface part providing the antenna with the control signal, thereby enabling to increase the integration of the receiver.

Abstract: A digital television receiver and antenna control method in the digital television receiver are disclosed. The digital television receiver includes and antenna having directivity according to a control signal for switching patterns of the antenna. A receiving section receives and processes channel signals for digital television broadcasting through the antenna. An antenna control section generates the control signal for switching the patterns of the antenna based on channel information according to the received channel signal. An antenna switching control section switches the patterns of the antenna during a sync signal period of the received channel signal when the control signal is generated.

Abstract: A timing recovery apparatus and method for a digital TV is disclosed. The timing recovery apparatus includes: a symbol synchronization unit for determining the bandwidth of a timing recovery loop in a plurality of steps according to a convergence degree; and a timing lock detector for detecting a lock using a reference value calculated by the envelope of a timing error, whereby the envelope of the timing error calculated according to a channel state is used as a reference value for thereby preventing a lock error and assuring a rapid and accurate convergence characteristic.

Abstract: The performance of alkaline cells comprising a zinc anode and manganese dioxide cathode can be improved, especially in high power application, by applying thermal insulating material to the cell casing. The thermal insulation material can be conveniently applied between the cell label and casing. The thermal insulating material significantly reduces the overall heat transfer coefficient, Uo, for the cell. The insulation increases the internal temperature of the cell during discharge, resulting in better performance.