Patents by Inventor Taehui Kwon

Taehui Kwon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • THINNER COMPOSITION AND METHOD OF TREATING SURFACE OF SEMICONDUCTOR SUBSTRATE BY USING THE SAME
    Publication number: 20240319593
    Abstract: Provided are a thinner composition, which may be generally used for an extreme ultraviolet (EUV) photoresist as well as KrF and ArF photoresists and exhibits improved performance in reduced resist coating (RRC) and edge bead removal (EBR), and which has an excellent pipe cleaning capability, and a method of treating a substrate surface by using the thinner composition. The thinner composition includes a C2-C4 alkylene glycol C1-C4 alkyl ether acetate, a C2-C3 alkylene glycol C1-C4 alkyl ether, and a cycloketone.
    Type: Application
    Filed: October 18, 2023
    Publication date: September 26, 2024
    Applicants: Samsung Electronics Co., Ltd., Dongjin Semichem Co., Ltd.
    Inventors: Yool Kang, Taehui Kwon, Dongjun Kim, Ahram Suh, Miyeon Jung, Samjong Choi, Ohhwan Kweon, Minki Kim, Jaehyun Kim, Sunggun Shin, Seungryul Yoo, Heekyung Lee