Abstract: A semiconductor substrate measuring apparatus includes a light source unit generating irradiation light including light in a first wavelength band and light in a second wavelength band. An optical unit irradiates the irradiation light on a measurement object and condenses reflected light. A light splitting unit splits the reflected light, condensed in the optical unit, into a first optical path and a second optical path. A first detecting unit is disposed on the first optical path and detects first interference light in the first wavelength band in the reflected light. A second detecting unit is disposed on the second optical path and detects second interference light in the second wavelength band in the reflected light. A controlling unit calculates at least one of a surface shape or a thickness of the measurement object. The controlling unit calculates a temperature of the measurement object.

Abstract: A semiconductor substrate measuring apparatus includes a light source unit generating irradiation light including light in a first wavelength band and light in a second wavelength band. An optical unit irradiates the irradiation light on a measurement object and condenses reflected light. A light splitting unit splits the reflected light, condensed in the optical unit, into a first optical path and a second optical path. A first detecting unit is disposed on the first optical path and detects first interference light in the first wavelength band in the reflected light. A second detecting unit is disposed on the second optical path and detects second interference light in the second wavelength band in the reflected light. A controlling unit calculates at least one of a surface shape or a thickness of the measurement object. The controlling unit calculates a temperature of the measurement object.

Abstract: A method of forming a coating layer, including preparing hollow inorganic particles, each hollow inorganic particle including a shell surrounding a hollow core; preparing inorganic coating particles of a solid structure; forming a mixture of the hollow inorganic particles and the inorganic coating particles; and spraying the mixture on a surface of a base by a plasma spray coating process.

Abstract: A method of forming a coating layer, including preparing hollow inorganic particles, each hollow inorganic particle including a shell surrounding a hollow core; preparing inorganic coating particles of a solid structure; forming a mixture of the hollow inorganic particles and the inorganic coating particles; and spraying the mixture on a surface of a base by a plasma spray coating process.

Abstract: A multiplexer circuit of a late-write type semiconductor memory device for selectively outputting data to be bypassed to a data output buffer is constructed with at least one or more data channels. Each data channel includes a first switch for transmitting the data in response to a first state of a bypass control signal, a latch part for latching the data output through a first switch, and a second switch for transmitting the data output from the latch part in response to a second state of the bypass control signal. Thus the circuit prevents data errors and improves time interval of cycles in bypass operation at high speed.

Abstract: A redundancy decoding circuit reduces standby power consumption in a memory device by automatically deactivating a deselect signal after a burst read/write operation, thereby eliminating a current path through the redundancy decoding circuit. The redundancy decoding circuit includes a pulse generator which generates a pulse signal having a predetermined pulse width that is just long enough to accommodate a read/write operation. The pulse signal is applied as the deselect signal to a drive circuit which provides drive current to a comparator for decoding a redundant address. A pulse begins when the chip select signal is activated and ends after a predetermined time. The pulse generator is implemented as plurality of series-connected flip-flops and a logic circuit for combining the outputs from the flip-flops which are clocked by a common clock signal.