Abstract: Provided is a flow rate control device capable of suppressing variation of supply pressure caused by variation of set flow rate and suppressing influence of pressure loss and cavitation on a secondary side. The flow rate control device includes: a flow rate regulating valve that regulates a flow rate of fluid flowing in a flow path; a flow meter that measures the flow rate of the fluid flowing in the flow path; and a control portion that controls an opening degree of the flow rate regulating valve based on a measurement result of the flow meter, the flow rate regulating valve is a three-way valve for dividing to regulate fluid flowing in from an inflow port to a first outflow port and a second outflow port, the flow meter is connected to the second outflow port side, and a multistage throttle orifice for decompressing the pressure of the fluid in stages is provided on the first outflow port side.

Abstract: Provided is a flow rate control device capable of suppressing variation of supply pressure caused by variation of set flow rate and suppressing influence of pressure loss and cavitation on a secondary side. The flow rate control device (18) includes: a flow rate regulating valve (19) that regulates a flow rate of fluid flowing in a flow path; a flow meter (20) that measures the flow rate of the fluid flowing in the flow path; and a control portion (21) that controls an opening degree of the flow rate regulating valve (19) based on a measurement result of the flow meter (20), the flow rate regulating valve (19) is a three-way valve for dividing to regulate fluid flowing in from an inflow port (24) to a first outflow port (25) and a second outflow port (26), the flow meter (20) is connected to the second outflow port (26) side, and a multistage throttle orifice (22) for decompressing the pressure of the fluid in stages is provided on the first outflow port (25) side.