Patents by Inventor Taiji MATSU

Taiji MATSU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate treating method
    Patent number: 10423070
    Abstract: A substrate treating method includes a determining step for determining a treating condition for hydrophobizing a surface of a substrate, based on a target regarding a dissolved area size in a resist pattern, and a treating step for hydrophobizing the surface of the substrate with the treating condition determined in the determining step before forming resist film on the surface of the substrate.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: September 24, 2019
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Masashi Kanaoka, Masanori Imamura, Taiji Matsu, Hidetoshi Sagawa, Atsushi Tanaka, Kazuhiro Tadokoro, Kazuya Ono, Shinichi Takada, Tsuyoshi Mitsuhashi
  • SUBSTRATE TREATING METHOD
    Publication number: 20170277038
    Abstract: A substrate treating method includes a determining step for determining a treating condition for hydrophobizing a surface of a substrate, based on a target regarding a dissolved area size in a resist pattern, and a treating step for hydrophobizing the surface of the substrate with the treating condition determined in the determining step before forming resist film on the surface of the substrate.
    Type: Application
    Filed: February 28, 2017
    Publication date: September 28, 2017
    Inventors: Masashi KANAOKA, Masanori IMAMURA, Taiji MATSU, Hidetoshi SAGAWA, Atsushi TANAKA, Kazuhiro TADOKORO, Kazuya ONO, Shinichi TAKADA, Tsuyoshi MITSUHASHI