Patents by Inventor Taiki ICHITSUBO

Taiki ICHITSUBO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230174821
    Abstract: Provided is a polishing composition that contains a cellulose derivative and can improve the polishing removability and enhance the wettability of a polished surface of a silicon wafer. The polishing composition contains an abrasive, a cellulose derivative, a basic compound, and water. Here, the polishing composition has a zeta potential of -24.0 mV or more.
    Type: Application
    Filed: March 4, 2021
    Publication date: June 8, 2023
    Applicant: FUJIMI INCORPORATED
    Inventors: Kohsuke TSUCHIYA, Taiki ICHITSUBO
  • Publication number: 20230073290
    Abstract: Provided is a polishing composition which contains a water-soluble polymer and is suitable for reducing LPDs. The polishing composition provided in this application includes an abrasive, a water-soluble polymer, and a basic compound. In the polishing composition, the content of a reaction product of a polymerization initiator and a polymerization inhibitor is 0.1 ppb or less of the polishing composition on a weight basis.
    Type: Application
    Filed: July 21, 2022
    Publication date: March 9, 2023
    Applicant: FUJIMI INCORPORATED
    Inventors: Kohsuke TSUCHIYA, Hisanori TANSHO, Yusuke SUGA, Taiki ICHITSUBO, Takayuki TAKEMOTO, Naohiko SAITO, Michihiro KAAI
  • Patent number: 11421131
    Abstract: Provided is a polishing composition which contains a water-soluble polymer and is suitable for reducing LPDs. The polishing composition provided in this application includes an abrasive, a water-soluble polymer, and a basic compound. In the polishing composition, the content of a reaction product of a polymerization initiator and a polymerization inhibitor is 0.1 ppb or less of the polishing composition on a weight basis.
    Type: Grant
    Filed: October 19, 2018
    Date of Patent: August 23, 2022
    Assignees: FUJIMI INCORPORATED, TOAGOSEI CO., LTD.
    Inventors: Kohsuke Tsuchiya, Hisanori Tansho, Yusuke Suga, Taiki Ichitsubo, Takayuki Takemoto, Naohiko Saito, Michihiro Kaai
  • Publication number: 20220186078
    Abstract: Provided is a polishing composition having excellent capability of reducing haze on the surface of an object to be polished. The polishing composition provided by the present invention includes an abrasive, a basic compound, a water-soluble polymer, and water. The water-soluble polymer includes at least a water-soluble polymer P1 and a water-soluble polymer P2. Here, the water-soluble polymer P1 is an acetalized polyvinyl alcohol-based polymer, and the water-soluble polymer P2 is a water-soluble polymer other than the acetalized polyvinyl alcohol-based polymer.
    Type: Application
    Filed: March 25, 2020
    Publication date: June 16, 2022
    Applicant: FUJIMI INCORPORATED
    Inventors: Kohsuke TSUCHIYA, Maki ASADA, Taiki ICHITSUBO
  • Publication number: 20220162477
    Abstract: The polishing composition provided by the present invention contains an abrasive, a polyvinyl alcohol polymer as a water-soluble polymer, a basic compound, and water, and further contains a trivalent or higher polyvalent organic acid (salt).
    Type: Application
    Filed: March 23, 2020
    Publication date: May 26, 2022
    Applicant: FUJIMI INCORPORATED
    Inventors: Yoshiko YAMAGUCHI, Osamu GOTO, Kohsuke TSUCHIYA, Taiki ICHITSUBO
  • Patent number: 11332640
    Abstract: The present invention relates to a polishing composition containing an abrasive, a water-soluble polymer, an anionic surfactant, a basic compound, and water, in which the anionic surfactant has an oxyalkylene unit, and an average addition mole number of the oxyalkylene unit of the anionic surfactant is more than 3 and 25 or less. According to the present invention, it is possible to provide a polishing composition which can reduce the haze of a polished object and is also excellent in a polishing removal rate.
    Type: Grant
    Filed: February 8, 2017
    Date of Patent: May 17, 2022
    Assignee: FUJIMI INCORPORATED
    Inventors: Megumi Taniguchi, Kohsuke Tsuchiya, Maki Asada, Taiki Ichitsubo, Hisanori Tansho
  • Publication number: 20210189177
    Abstract: Provided is a polishing composition which contains a water-soluble polymer and is suitable for reducing LPDs. The polishing composition provided in this application includes an abrasive, a water-soluble polymer, and a basic compound. In the polishing composition, the content of a reaction product of a polymerization initiator and a polymerization inhibitor is 0.1 ppb or less of the polishing composition on a weight basis.
    Type: Application
    Filed: October 19, 2018
    Publication date: June 24, 2021
    Applicants: FUJIMI INCORPORATED, TOAGOSEI CO., LTD.
    Inventors: Kohsuke TSUCHIYA, Hisanori TANSHO, Yusuke SUGA, Taiki ICHITSUBO, Takayuki TAKEMOTO, Naohiko SAITO, Michihiro KAAI
  • Patent number: 10745588
    Abstract: This invention provides a silicon wafer polishing composition used in the presence of an abrasive. The composition comprises a silicon wafer polishing accelerator, an amide group-containing polymer, and water. The amide group-containing polymer has a building unit A in its main chain. The building unit A comprises a main chain carbon atom constituting the main chain of the amide group-containing polymer and a secondary amide group or a tertiary amide group. The carbonyl carbon atom constituting the secondary amide group or tertiary amide group is directly coupled to the main chain carbon atom.
    Type: Grant
    Filed: May 23, 2017
    Date of Patent: August 18, 2020
    Assignees: FUJIMI INCORPORATED, TOAGOSEI CO., LTD.
    Inventors: Kohsuke Tsuchiya, Hisanori Tansho, Taiki Ichitsubo, Yoshio Mori
  • Patent number: 10717899
    Abstract: Provided are polishing compositions comprising a water-soluble polymer and water. The water-soluble polymer of an embodiment has a repeat unit that does not have any hydroxyl groups, and the water-soluble polymer has a hydroxyl group content in a range of 4 mmol/g or higher and 21 mmol/g or lower. The water-soluble polymer of another embodiment has a repeat unit A that has a hydroxyl group and a repeat unit B, and the number of moles of the repeat unit B in the total number of moles of all the repeat units of the water-soluble polymer is 5% or greater.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: July 21, 2020
    Assignee: FUJIMI INCORPORATED
    Inventors: Kohsuke Tsuchiya, Hisanori Tansho, Taiki Ichitsubo
  • Patent number: 10351732
    Abstract: Provided are a polishing composition comprising a water-soluble polymer that has a molecular structure comprising a plurality of repeat unit species having different SP values and a polishing composition exhibiting an etching rate and an abrasive adsorption in prescribed ranges when determined by prescribed methods. Also provided is a method for producing a polishing composition, using an abrasive, a basic compound, a water-soluble polymer having an alkaline-hydrolytic functional group, and water. The method comprises a step of obtaining an agent A comprising at least the basic compound and a step of obtaining an agent B comprising at least the water-soluble polymer H.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: July 16, 2019
    Assignee: FUJIMI INCORPORATED
    Inventors: Kohsuke Tsuchiya, Hisanori Tansho, Taiki Ichitsubo
  • Publication number: 20190077992
    Abstract: Provided are polishing compositions comprising a water-soluble polymer and water. The water-soluble polymer of an embodiment has a repeat unit that does not have any hydroxyl groups, and the water-soluble polymer has a hydroxyl group content in a range of 4 mmol/g or higher and 21 mmol/g or lower. The water-soluble polymer of another embodiment has a repeat unit A that has a hydroxyl group and a repeat unit B, and the number of moles of the repeat unit B in the total number of moles of all the repeat units of the water-soluble polymer is 5% or greater.
    Type: Application
    Filed: November 9, 2018
    Publication date: March 14, 2019
    Inventors: Kohsuke TSUCHIYA, Hisanori TANSHO, Taiki ICHITSUBO
  • Publication number: 20190062595
    Abstract: The present invention relates to a polishing composition containing an abrasive, a water-soluble polymer, an anionic surfactant, a basic compound, and water, in which the anionic surfactant has an oxyalkylene unit, and an average addition mole number of the oxyalkylene unit of the anionic surfactant is more than 3 and 25 or less. According to the present invention, it is possible to provide a polishing composition which can reduce the haze of a polished object and is also excellent in a polishing removal rate.
    Type: Application
    Filed: February 8, 2017
    Publication date: February 28, 2019
    Applicant: FUJIMI INCORPORATED
    Inventors: Megumi TANIGUCHI, Kohsuke TSUCHIYA, Maki ASADA, Taiki ICHITSUBO, Hisanori TANSHO
  • Publication number: 20190015947
    Abstract: To provide a polishing composition capable of realizing a polished surface having smoothness and few defects. A polishing composition contains a water-soluble polymer satisfying the following two conditions (A) and (B): Condition (A): in a first standard solution which contains silica having an average primary particle size of 35 nm, the water-soluble polymer, ammonia, and water and in which the concentration of the silica is 0.48% by mass, the concentration of the water-soluble polymer is 0.0125% by mass, and the pH is 10.0, the adsorption ratio which is a ratio of the amount of the water-soluble polymer adsorbed to the silica to the total amount of the water-soluble polymer contained in the first standard solution is 10% or more; and Condition (B): in a second standard solution which contains silica having an average primary particle size of 35 nm, the water-soluble polymer, ammonia, and water and in which the concentration of the silica is 0.48% by mass, the concentration of the water-soluble polymer is 0.
    Type: Application
    Filed: December 16, 2016
    Publication date: January 17, 2019
    Applicant: FUJIMI INCORPORATED
    Inventors: Kohsuke TSUCHIYA, Taiki ICHITSUBO, Hisanori TANSHO, Yusuke SUGA
  • Publication number: 20170253767
    Abstract: This invention provides a silicon wafer polishing composition used in the presence of an abrasive. The composition comprises a silicon wafer polishing accelerator, an amide group-containing polymer, and water. The amide group-containing polymer has a building unit A in its main chain. The building unit A comprises a main chain carbon atom constituting the main chain of the amide group-containing polymer and a secondary amide group or a tertiary amide group. The carbonyl carbon atom constituting the secondary amide group or tertiary amide group is directly coupled to the main chain carbon atom.
    Type: Application
    Filed: May 23, 2017
    Publication date: September 7, 2017
    Applicants: FUJIMI INCORPORATED, TOAGOSEI CO., LTD.
    Inventors: Kohsuke TSUCHIYA, Hisanori TANSHO, Taiki ICHITSUBO, Yoshio MORI
  • Publication number: 20160272846
    Abstract: Provided are a polishing composition comprising a water-soluble polymer that has a molecular structure comprising a plurality of repeat unit species having different SP values and a polishing composition exhibiting an etching rate and an abrasive adsorption in prescribed ranges when determined by prescribed methods. Also provided is a method for producing a polishing composition, using an abrasive, a basic compound, a water-soluble polymer having an alkaline-hydrolytic functional group, and water. The method comprises a step of obtaining an agent A comprising at least the basic compound and a step of obtaining an agent B comprising at least the water-soluble polymer H.
    Type: Application
    Filed: March 14, 2014
    Publication date: September 22, 2016
    Applicant: FUJIMI INCORPORATED
    Inventors: Kohsuke TSUCHIYA, Hisanori TANSHO, Taiki ICHITSUBO
  • Publication number: 20160122591
    Abstract: This invention provides a silicon wafer polishing composition used in the presence of an abrasive. The composition comprises a silicon wafer polishing accelerator, an amide group-containing polymer, and water. The amide group-containing polymer has a building unit A in its main chain. The building unit A comprises a main chain carbon atom constituting the main chain of the amide group-containing polymer and a secondary amide group or a tertiary amide group. The carbonyl carbon atom constituting the secondary amide group or tertiary amide group is directly coupled to the main chain carbon atom.
    Type: Application
    Filed: May 2, 2014
    Publication date: May 5, 2016
    Applicants: FUJIMI INCORPORATED, TOAGOSEI CO., LTD.
    Inventors: Kohsuke TSUCHIYA, Hisanori TANSHO, Taiki ICHITSUBO, Yoshio MORI