Abstract: Provided are a resin composition for a coating film, containing a polymer which has at least one of a structural unit represented by Formula (I-A) or a structural unit represented by Formula (I-B), and a structural unit represented by Formula (II), in which, in the polymer, a total of respective contents of the structural unit represented by Formula (I-A) and the structural unit represented by Formula (I-B) is 10% by mass or more, and a content of the structural unit represented by Formula (II) is 10% by mass or more; the polymer; a method for producing a polymer, in which a total of respective contents of the structural unit represented by Formula (I-A) and the structural unit represented by Formula (I-B) is 10% by mass or more, and a content of a structural unit represented by Formula (II-2) is 10% by mass or more; a coating film containing the polymer; and a method for forming a coating film.

Abstract: A data generation apparatus of one embodiment includes a processing unit, an evaluation unit, and a conversion unit. The processing unit designs, through optical proximity correction based on a target pattern formed on a substrate using the photomask, a mask pattern corresponding to the target pattern and including a plurality of rectangular regions. The evaluation unit evaluates the mask pattern using a cost function having, as a parameter, a jog length indicating a length of each of the rectangular regions included in the mask pattern in a first direction. The conversion unit converts mask pattern data indicating the mask pattern with an evaluation that meets a predetermined condition to drawing data corresponding to a variable shaped beam drawing process.

Abstract: Provided are a resin composition for coating, containing a polymer having a structural unit represented by Formula (I), a structural unit represented by Formula (II), and a terminal structure represented by Formula (III-A) or (III-B), in which, in the polymer, the structural unit represented by Formula (I) is 10% by mass or more, and a content of the structural unit represented by Formula (II) is 10% by mass or more; the polymer; a method for producing a polymer having a structural unit represented by Formula (II); a coating film containing the polymer; and a method for forming a coating film.