Patents by Inventor Taisha Furukawa

Taisha Furukawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RUTHENIUM COMPOUND, METHOD OF PRODUCING THE SAME, METHOD OF PRODUCING RUTHENIUM-CONTAINING THIN FILM USING THE SAME, AND RUTHENIUM-CONTAINING THIN FILM
    Publication number: 20110224453
    Abstract: This invention aims at providing (2,4-dimethylpentadienyl)-(ethylcyclopentadienyl)ruthenium which may contain its related structure compound, from which a ruthenium-containing thin film can be produced; a method of producing the same; a method of producing the ruthenium-containing thin film using the same; the ruthenium-containing thin film; and the like. The invention relates to producing the thin film using, as a precursor, (2,4-dimethylpentadienyl)(ethylcyclopentadienyl)ruthenium containing the related structure compound in an amount not more than 5% by weight, which can be obtained by separating the related structure compound from (2,4-dimethylpentadienyl)(ethylcyclopentadienyl)ruthenium containing the related structure compound.
    Type: Application
    Filed: December 21, 2009
    Publication date: September 15, 2011
    Inventors: Taisha Furukawa, Noriaki Oshima, Kazuhisa Kawano, Hirokazu Chiba