Abstract: There are provided a substrate holder that holds a plurality of substrates, a reaction tube that houses the substrate holder, a gas supplier that has a plurality of supply holes corresponding one-to-one to the plurality of substrates and supplies gas to the plurality of substrates, and a plurality of plates provided in substantially parallel to the plurality of substrates, in which at least part of each of the plurality of plates is disposed between the gas supplier and the substrate holder.

Abstract: In a process for producing an azine compound which comprises reacting ammonia with a hypochlorite in an aqueous medium in the presence of a carbonyl compound selected from the group consisting of acetone and methyl ethyl ketone at room temperature or a higher temperature and an atmospheric or higher pressure, the amounts of the carbonyl compound and ammonia being 2 to 5 moles and 5 to 35 moles, respectively, per mole of available chlorine of the hypochlorite; the improvement wherein(i) the reaction is carried out at a temperature of about 25.degree. C. to about 60.degree. C.,(ii) the reaction is carried out by using calcium hypochlorite as the hypochlorite and while feeding an aqueous solution of calcium hypochlorite having an available chlorine concentration of 5 to 20% by weight to the reaction system, and(iii) the reaction is carried out while controlling the rate of feeding the aqueous solution of calcium hypochlorite to the reaction system such that the amount of available chlorine is 0.001 to 0.