Abstract: A force sensor module includes: a force sensor configured to detect an external force according to the amount of deflection of a strain element that deflects in response to the external force; a housing that accommodates the force sensor; and a force transferring section configured to transfer the external force to the strain element, the force transferring section being accommodated in the housing so as to be in contact with the strain element and having a part that includes an end of the force transferring section and that protrudes outside the housing through a surface of the housing, the amount of protrusion of the part of the force transferring section measured from the surface of the housing being set such that the force sensor is not damaged even in a case where the end lies in the same plane as the surface of the housing.

Abstract: In order to reduce the chance that a metasurface pattern is damaged by electrostatic discharge, a force sensor module includes a first substrate having light transparency; a metasurface pattern provided on a first principal surface; a second substrate provided so as to face the first substrate and including a second principal surface facing the first principal surface; a reflective layer provided on the second principal surface; a spacer layer provided on the first principal surface and made of an electrically-conductive material; a joining layer for joining the second principal surface and the spacer layer together; and a grounding wire connected to the spacer layer.

Abstract: Provided is a method for manufacturing a force sensor including: preparing a first substrate which is made of a material that transmits electromagnetic waves and includes on its surface a metal array arranged in a periodic pattern and a second substrate which includes on its surface a metal layer that reflects electromagnetic waves; forming a spacer member on the surface of the first substrate; forming a first metal layer around the spacer member on the surface of the first substrate; forming a second metal layer in a region corresponding to the first metal layer on the second substrate; and fusing the first metal layer and the second metal layer together to fix the first substrate and the second substrate in a state in which the spacer member formed on the surface of the first substrate abuts the surface of the second substrate.

Abstract: A force sensor is provided, the force sensor including: a first substrate; a metasurface pattern provided on a principal surface; a protective layer covering the metasurface pattern; a second substrate provided so as to face the first substrate; a reflective layer provided on a second principal surface; and a spacer defining a spacing between the first substrate and the second substrate, so that the force sensor is capable of offering desired response characteristics specified at the time of design.

Abstract: Provided is a force sensor including: a first substrate that is made of a material that transmits electromagnetic waves and includes a metal array arranged in a periodic pattern on its surface; a second substrate that is disposed to face the first substrate with a gap therebetween and includes a metal layer that reflects the electromagnetic waves transmitted through the first substrate on its surface; a connecting member configured to connect the first substrate to the second substrate and define an internal space that houses the metal array and the metal layer; and an inert substance that fills the internal space.