Patents by Inventor Tak Hyun Yoon

Tak Hyun Yoon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6271113
    Abstract: Method for forming a wiring in a semiconductor device having a cell array region and a peripheral region, which allows to form a micron pattern below a critical resolution of an exposure, including the steps of (1) forming a conduction layer and a sacrificial wiring layer on a substrate in succession, (2) selectively removing the sacrificial wiring layer to form a virtual wiring line having a sloped end portion, (3) forming sidewall insulating films at sides of the virtual wiring line excluding the sloped end portion, (4) removing the virtual wiring line entirely, (5) forming a mask layer on regions of the pad and peri region pads and other wirings are to be formed thereon, and (6) using the mask layer and the sidewalls in removing the conduction layer selectively, to form a micron pattern.
    Type: Grant
    Filed: December 27, 1999
    Date of Patent: August 7, 2001
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Tak Hyun Yoon, Wouns Yang, Sang Jun Choi
  • Patent number: 6258696
    Abstract: A method for fabricating a semiconductor device and an isolation structure thereof is disclosed. The isolation structure of a semiconductor device includes a first isolation step for forming a line-shaped active region on a semiconductor substrate wherein the line-shaped active region is consecutive in a lengthy direction, and a second isolation step for electrically isolating the line-shaped active regions in a lengthy direction by a predetermined length for thereby overcoming the problems such as a rounded corner portion problem, a pattern length decrease, etc. and enhancing the integrity of the semiconductor device.
    Type: Grant
    Filed: September 15, 1999
    Date of Patent: July 10, 2001
    Assignee: Hyundai Electronics Industries Co., LTD
    Inventors: Myoung Goo Lee, Tak Hyun Yoon