Patents by Inventor Takaaki Hoshino

Takaaki Hoshino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9519022
    Abstract: A wafer inspection apparatus includes a first and second wafer transfer mechanisms, an alignment chamber, a second wafer transfer mechanism and a plurality of inspection chambers. The first wafer transfer mechanism is installed at a first transfer area to transfer wafers individually from a housing. The alignment chamber has an alignment mechanism configured to align the wafer at an inspection position for an electrical characteristics inspection. The second wafer transfer mechanism is configured to transfer the wafer through a wafer retaining support in a second transfer area formed along the first transfer area and an alignment area. The plurality of inspection chambers is arranged at an inspection area formed along the second transfer area and is configured to inspect electrical characteristics of the wafer transferred by the second wafer transfer mechanism through the wafer retaining support.
    Type: Grant
    Filed: April 7, 2015
    Date of Patent: December 13, 2016
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Hiroshi Yamada, Takaaki Hoshino, Shinji Kojima, Takeshi Saigusa, Hiroshi Shimoyama
  • Patent number: 9201115
    Abstract: A wafer inspection apparatus includes a first and second wafer transfer mechanisms, an alignment chamber, a second wafer transfer mechanism and a plurality of inspection chambers. The first wafer transfer mechanism is installed at a first transfer area to transfer wafers individually from a housing. The alignment chamber has an alignment mechanism configured to align the wafer at an inspection position for an electrical characteristics inspection. The second wafer transfer mechanism is configured to transfer the wafer through a wafer retaining support in a second transfer area formed along the first transfer area and an alignment area. The plurality of inspection chambers is arranged at an inspection area formed along the second transfer area and is configured to inspect electrical characteristics of the wafer transferred by the second wafer transfer mechanism through the wafer retaining support.
    Type: Grant
    Filed: September 13, 2011
    Date of Patent: December 1, 2015
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Hiroshi Yamada, Takaaki Hoshino, Shinji Kojima, Takeshi Saigusa, Hiroshi Shimoyama
  • Publication number: 20150219716
    Abstract: A wafer inspection apparatus includes a first and second wafer transfer mechanisms, an alignment chamber, a second wafer transfer mechanism and a plurality of inspection chambers. The first wafer transfer mechanism is installed at a first transfer area to transfer wafers individually from a housing. The alignment chamber has an alignment mechanism configured to align the wafer at an inspection position for an electrical characteristics inspection. The second wafer transfer mechanism is configured to transfer the wafer through a wafer retaining support in a second transfer area formed along the first transfer area and an alignment area. The plurality of inspection chambers is arranged at an inspection area formed along the second transfer area and is configured to inspect electrical characteristics of the wafer transferred by the second wafer transfer mechanism through the wafer retaining support.
    Type: Application
    Filed: April 7, 2015
    Publication date: August 6, 2015
    Inventors: Hiroshi YAMADA, Takaaki HOSHINO, Shinji KOJIMA, Takeshi SAIGUSA, Hiroshi Shimoyama
  • Publication number: 20150145540
    Abstract: Provided are a semiconductor inspection system and a method for preventing condensation at an interface part. The inspection system is characterized by being equipped with: a probe apparatus configured to bring a probe into contact with a target object whose temperature is controlled so that the probe is electrically connected with the target object; a tester configured to inspect the target object by supplying an inspection signal to the target object and detect an output signal outputted from the target object; an interface part which electrically connects the probe with the tester; a vacuum seal mechanism configured to seal the interface part in an airtight state; a gas exhaust unit configured to evacuate the interior of the interface part to a depressurized atmosphere; and a dry gas supply unit configured to supply a dry gas into the evacuated interface part while controlling a flow rate of the dry gas.
    Type: Application
    Filed: June 18, 2013
    Publication date: May 28, 2015
    Inventors: Shigekazu Komatsu, Takaaki Hoshino
  • Publication number: 20120062259
    Abstract: A wafer inspection apparatus includes a first and second wafer transfer mechanisms, an alignment chamber, a second wafer transfer mechanism and a plurality of inspection chambers. The first wafer transfer mechanism is installed at a first transfer area to transfer wafers individually from a housing. The alignment chamber has an alignment mechanism configured to align the wafer at an inspection position for an electrical characteristics inspection. The second wafer transfer mechanism is configured to transfer the wafer through a wafer retaining support in a second transfer area formed along the first transfer area and an alignment area. The plurality of inspection chambers is arranged at an inspection area formed along the second transfer area and is configured to inspect electrical characteristics of the wafer transferred by the second wafer transfer mechanism through the wafer retaining support.
    Type: Application
    Filed: September 13, 2011
    Publication date: March 15, 2012
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Hiroshi YAMADA, Takaaki HOSHINO, Shinji KOJIMA, Takeshi SAIGUSA, Hiroshi Shimoyama
  • Patent number: 6871925
    Abstract: In an inkjet printing apparatus which holds a printhead for performing printing by using ink supplied from an ink tank via an ink supply channel, the ink tank has a tank-side terminal for detecting the presence state of ink in the ink tank. The printhead has a head-side terminal for detecting the presence state of ink in the printhead. The printing apparatus detects at least one of the presence state of ink in the ink tank, printhead, and ink supply channel by selecting a terminal used for detection between the tank-side terminal and the head-side terminal.
    Type: Grant
    Filed: April 14, 2003
    Date of Patent: March 29, 2005
    Assignee: Canon Kabushiki Kaisha
    Inventors: Tadashi Yamamoto, Takaaki Hoshino
  • Publication number: 20040021712
    Abstract: In an inkjet printing apparatus which holds a printhead for performing printing by using ink supplied from an ink tank via an ink supply channel, the ink tank has a tank-side terminal for detecting the presence state of ink in the ink tank. The printhead has a head-side terminal for detecting the presence state of ink in the printhead. The printing apparatus detects at least one of the presence state of ink in the ink tank, printhead, and ink supply channel by selecting a terminal used for detection between the tank-side terminal and the head-side terminal.
    Type: Application
    Filed: April 14, 2003
    Publication date: February 5, 2004
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Tadashi Yamamoto, Takaaki Hoshino
  • Patent number: 5482228
    Abstract: A nose landing gear assembly on an airplane with a front fuselage section having a wheel bay defined therein and a pair of laterally spaced side compartments defined therein on each side of the wheel bay by respective laterally spaced side walls. A nose landing gear is mounted on the fuselage section for pivotal lifting and lowering movement into and out of the wheel bay. The nose landing gear assembly includes an actuator disposed in one of the side compartments for lifting the nose landing gear into and lowering the nose landing gear out of the wheel bay, and a steering device disposed in the other of the side compartments for steering the nose landing gear while the airplane is taxiing. Since the actuator and the steering device are concealed in the respective side compartments, they are protected from foreign-object damage. The nose landing gear assembly allows the airplane cabin to have increased space because the actuator and the steering device are positioned laterally of the nose landing gear.
    Type: Grant
    Filed: October 5, 1993
    Date of Patent: January 9, 1996
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventor: Takaaki Hoshino