Abstract: A substrate for biochips is manufactured so that the substrate has a substrate surface having a reaction region capable of reacting with biological substances and a non-reaction region not reacting with the biological substances, sunken bottomed wells formed in the substrate surface, and a layer of a material capable of reacting with the biological substances having a surface exposed only at the bottoms of the bottomed wells, the exposed surface forming the reaction region.

Abstract: A base plate having a surface on which a plurality of hydroxyl groups can be introduced, a metallic membrane disposed on the base plate and having a plurality of wells reaching the base plate, and a crosslinkable polymer membrane disposed on the metallic membrane are included.

Abstract: A base plate having a surface on which a plurality of hydroxyl groups can be introduced, a metallic membrane disposed on the base plate and having a plurality of wells reaching the base plate, and a crosslinkable polymer membrane disposed on the metallic membrane are included.

Abstract: A substrate for biochips is manufactured so that the substrate has a substrate surface having a reaction region capable of reacting with biological substances and a non-reaction region not reacting with the biological substances, sunken bottomed wells formed in the substrate surface, and a layer of a material capable of reacting with the biological substances having a surface exposed only at the bottoms of the bottomed wells, the exposed surface forming the reaction region.

Abstract: A substrate for biochips has a substrate surface having a reaction region capable of reacting with biological substances and a non-reaction region not reacting with the biological substances, sunken bottomed wells formed in the substrate surface, and a layer of a material capable of reacting with the biological substances having a surface exposed only at the bottoms of the bottomed wells, the exposed surface forming the reaction region.

Abstract: A base plate having a surface on which a plurality of hydroxyl groups can be introduced, a metallic membrane disposed on the base plate and having a plurality of wells reaching the base plate, and a crosslinkable polymer membrane disposed on the metallic membrane are included.

Abstract: A substrate for biochips has a substrate surface having a reaction region capable of reacting with biological substances and a non-reaction region not reacting with the biological substances, sunken bottomed wells formed in the substrate surface, and a layer of a material capable of reacting with the biological substances having a surface exposed only at the bottoms of the bottomed wells, the exposed surface forming the reaction region.

Abstract: Light emitted by a light source is inputted to a sensor to generate an optical path difference on input light according to a physical parameter to be measured, light outputted with an optical path difference generated in response to the input is inputted to another sensor to generate an optical path difference on input light according to a physical parameter to be measured, and light outputted with an optical path difference generated in response to the input is split into two to generate an interference fringe.

Abstract: Light emitted by a light source is inputted to a sensor to generate an optical path difference on input light according to a physical parameter to be measured, light outputted with an optical path difference generated in response to the input is inputted to another sensor to generate an optical path difference on input light according to a physical parameter to be measured, and light outputted with an optical path difference generated in response to the input is split into two to generate an interference fringe.

Abstract: A microchip device for chemotaxis observation according to the present invention is provided with the first well in which chemotactic factors are to be filled, and the second well in which chemotactic cells are to be filled. There is provided a channel between the first well and the second well. The channel has a plurality of paths. A sidewall surfaces of the path is substantially perpendicular to a bottom surface, as formed by anisotropic dry etching.

Abstract: A microchip device for chemotaxis observation according to the present invention is provided with the first well in which chemotactic factors are to be filled, and the second well in which chemotactic cells are to be filled. There is provided a channel between the first well and the second well. The channel has a plurality of paths. A sidewall surfaces of the path is substantially perpendicular to a bottom surface, as formed by anisotropic dry etching.

Abstract: A capacitive pressure sensor includes first and second substrates, a groove, and first and second electrodes. The first substrate consists of an electrical insulating material. The second substrate consists of the same material as that for the first substrate and has a peripheral portion directly bonded to the first substrate. The groove is formed in a central portion of the surface of one of the first and second substrates. The first and second substrates oppose each other through the groove. The first electrode is coupled to a surface, of the first substrate, which opposes the second substrate so as to be movable together with the first substrate. The second electrode is arranged on a surface, of the second substrate, which opposes the first substrate so as to be parallel to the first electrode. The first and second substrate may consist of quartz glass or sapphire.

Abstract: A carbon dioxide gas detection element includes a solid electrolyte of a sodium ion conductor made of a ceramic/glass composite material.

Abstract: A moisture sensitive device includes a polymer capacitive moisture sensitive element and a heater. The polymer capacitive moisture sensitive element is formed by sequentially stacking a lower electrode, a moisture sensitive film made of an organic polymer resin material, and an upper electrode on an insulating substrate. The heater serves to heat the moisture sensitive film to restore the original characteristics thereof.

Abstract: A moisture sensitive element includes a moisture sensitive film consisting of a polymer obtained by polymerizing and crosslinking a fluorine-containing polyimide oligomer or a polyisoimide oligomer having acetylene as a terminal group and its isomer. The moisture sensitive element also includes electrodes formed on upper and lower surfaces of the moisture sensitive film.

Abstract: A moisture-sensitive element comprising a moisture-sensitive film which consists of a polymer (such as a polymer in which polyethersulfon is a principal component) whose water sorption amount is between 10 and 40 mg/g at a temperature of 30.degree. C. and a relative humidity of 90% RH. The temperature-sensitive element has a low temperature dependency, a small hysteresis and a quick response and accordingly can be employed in a wide range of temperature as well as in a severe condition such as high humidity, high temperature, cyclically fluctuating humidity, low humidity, moisture condensation, water dipping and so on.

Abstract: An integrated circuit cooling device and a dew point hygrometer employing such a cooling device having a substrate with a peripheral region surrounding a central aperture, the substrate being overlaid by an insulating layer with a Peltier cooling device formed thereon. The Peltier device includes a plurality of alternate metallic segments of dissimilar metals arranged and joined to form first and second groups of corresponding junctions of which the first group is located over the peripheral region of the substrate and the second group is located over the central aperture.