Patents by Inventor Takaaki NISHIMORI

Takaaki NISHIMORI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conductive interface system between vacuum chambers in a charged particle beam device
    Patent number: 10290522
    Abstract: An object of the present invention is to provide a charged particle beam device that suppresses the influence of an external electromagnetic wave, even when a shielding member, such as a vacuum valve, is in the open state. To achieve the above object, a charged particle beam device including a vacuum chamber (111) having an opening (104) that surrounds a sample delivery path is proposed. The charged particle beam device includes a conductive material (118) surrounding the opening (104) for conduction between the vacuum chamber (111) and a conductive member (106) disposed on the atmosphere side. According to an embodiment of the present invention, it is possible to restrict an electromagnetic wave (117) from reaching the sample chamber via the delivery path.
    Type: Grant
    Filed: March 19, 2014
    Date of Patent: May 14, 2019
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Masashi Fujita, Masahiro Tsunoda, Katsunori Onuki, Katsuya Aibara, Seiichi Shindo, Takaaki Nishimori
  • Charged Particle Beam Device
    Publication number: 20160133433
    Abstract: An object of the present invention is to provide a charged particle beam device that suppresses the influence of an external electromagnetic wave, even when a shielding member, such as a vacuum valve, is in the open state. To achieve the above object, a charged particle beam device including a vacuum chamber (111) having an opening (104) that surrounds a sample delivery path is proposed. The charged particle beam device includes a conductive material (118) surrounding the opening (104) for conduction between the vacuum chamber (111) and a conductive member (106) disposed on the atmosphere side. According to an embodiment of the present invention, it is possible to restrict an electromagnetic wave (117) from reaching the sample chamber via the delivery path.
    Type: Application
    Filed: March 19, 2014
    Publication date: May 12, 2016
    Inventors: Masashi FUJITA, Masahiro TSUNODA, Katsunori ONUKI, Katsuya AIBARA, Seiichi SHINDO, Takaaki NISHIMORI