Abstract: An inchworm actuator which can move a movable body relative to a stationary body while selectively giving priority to displacement speed or displacement resolution in accordance with the conditions of use is provided. An inchworm actuator 100 includes a movable body 110 supported between first and second guides 101 and 102 which are made of a magnetic material and which extend parallel to each other. In the movable body 110, a voice coil motor 115 is supported by first and second support legs 111 and 112 through toggle mechanisms 116a and 116b. The first and second support legs 111 and 112 are made of a magnetic material and have magnetic field-forming coils 113 and 114. The toggle mechanisms 116a and 116b convert the amount of displacement input from the voice coil motor 115 using a reducing conversion ratio corresponding to the amount of the displacement and transmit a resultant displacement to the first and second support legs 111 and 112.

Abstract: An inchworm actuator which can move a movable body relative to a stationary body while selectively giving priority to displacement speed or displacement resolution in accordance with the conditions of use is provided. An inchworm actuator 100 includes a movable body 110 supported between first and second guides 101 and 102 which are made of a magnetic material and which extend parallel to each other. In the movable body 110, a voice coil motor 115 is supported by first and second support legs 111 and 112 through toggle mechanisms 116a and 116b. The first and second support legs 111 and 112 are made of a magnetic material and have magnetic field-forming coils 113 and 114. The toggle mechanisms 116a and 116b convert the amount of displacement input from the voice coil motor 115 using a reducing conversion ratio corresponding to the amount of the displacement and transmit a resultant displacement to the first and second support legs 111 and 112.