Patents by Inventor Takafumi Tatsukawa

Takafumi Tatsukawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polycrystalline silicon rod manufacturing method, and reactor
    Patent number: 11293094
    Abstract: A method of manufacturing polycrystalline silicon rod, wherein a reactor for manufacturing a polycrystalline silicon rod includes gas supply nozzles, and at least one nozzle is a flow rate amplification nozzle having a function that the amount of a silicon deposition raw material gas supplied to the nozzle can be increased.
    Type: Grant
    Filed: March 27, 2019
    Date of Patent: April 5, 2022
    Assignee: Tokuyama Corporation
    Inventors: Takafumi Tatsukawa, Yasumasa Aimoto
  • Polycrystalline Silicon Rod Manufacturing Method, and Reactor
    Publication number: 20210054499
    Abstract: A method of manufacturing polycrystalline silicon rod, wherein a reactor for manufacturing a polycrystalline silicon rod includes gas supply nozzles, and at least one nozzle is a flow rate amplification nozzle having a function that the amount of a silicon deposition raw material gas supplied to the nozzle can be increased.
    Type: Application
    Filed: March 27, 2019
    Publication date: February 25, 2021
    Applicant: Tokuyama Corporation
    Inventors: Takafumi Tatsukawa, Yasumasa Aimoto