Abstract: A vacuum pump apparatus has a casing and a base connected to the casing. The base has an opening communicating with an interior space of the casing. A heater is mounted on the base for heating the base to maintain a gas discharge path at a temperature high enough to prevent solidification of processed gas in the vacuum pump. A cover member covers the opening of the base. The cover member has a first surface communicating with the interior space of the casing and a second surface exposed to the exterior of the vacuum pump. A substrate is connected to the first surface of the cover member and has at least one circuit for controlling operation of the vacuum pump.

Abstract: Provided is a connecting structure for a vacuum pump, which can block propagation of electrical noise, generated by a main body of the vacuum pump. Between both ends of a connection piping for connecting the vacuum pump to a vacuum chamber of an apparatus to be connected with and evacuated by the vacuum pump, there is interposedly provided an electrical insulating portion formed of an insulating material so as to provide electrical insulation therebetween. The electrical insulation portion may be provided to a connection piping member such as a damper (or a valve depending on the connection arrangement) for absorbing mechanical vibrations.

Abstract: Vibrations generated by a vacuum pump are prevented from propagating to external equipment such as an electron microscope. A casing (a separate casing portion and a casing main body) that houses a stator, stator blades, a rotor portion, and rotor blades as an exhaust function portion is connected to an inlet port portion in which an inlet port for sucking in a gas from the outside is formed, through an elastic member. An suction space between the casing and the inlet port portion is sealed by a bellows cylinder sealing means, and motion regulating members and motion regulating members and which regulate the amount of separation between the inlet port portion and the casing, and change shape due to relative motion between the two, are formed between the inlet port portion and the casing.

Abstract: A heater 29 is mounted on the outer peripheral surface of a base 6 to heat the base 6. A heat shutoff wall 24b is provided on a motor housing 24 to prevent the radiation heat of the base 6 heated by the heater 29 from transferring to a pump inside substrate 25. A gap portion 27 is formed by providing a gap between the motor housing 24 and the base 6 to prevent the heat of the base 6 heated by the heater 29 from transferring to the motor housing 24. Also, a water cooled tube 28 is installed under the motor housing fixing portion 24c and cooling water is circulated in the tube to efficiently cool the pump inside substrate 25. By constructing a vacuum pump in this manner, the accumulation of solid product of process gas in the vacuum pump is restrained, and thus the pump inside substrate can be cooled efficiently.

Abstract: A heater 29 is mounted on the outer peripheral surface of a base 6 to heat the base 6. By heating the base 6, the interior of a gas discharge path for process gas is kept at a high temperature, and hence the precipitation of solid product in the pump is restrained. Also, a pump inside substrate 25 in which various types of information on a vacuum pump are stored is arranged on the inside of a back cover 26. A water cooled tube 30 is installed on the back cover 26 on which the pump inside substrate 25 is arranged, whereby the back cover 26 is cooled forcedly. Further, a heat insulating material 27 with low heat conductivity is arranged in a connecting portion 27a and a contacting portion 27b between the back cover 26 and the base 6. By constructing the vacuum pump in this manner, the pump inside substrate 25 can be cooled efficiently while the gas discharge path for process gas in the vacuum pump is kept at a higher temperature than before.

Abstract: When a vacuum pump is installed over a vacuum system in a turned-over posture via a damper, a tension is applied upward to the vacuum pump by an elastic body one end of which is fixed to a fixed portion such as a ceiling, by which contraction caused by the weight of the vacuum pump and the atmospheric pressure applied when the interior of the damper becomes a vacuum is relaxed. Thereby, the decrease in vibration damping capacity of the damper caused by the compression of a rubber of the damper can be reduced. Also, when the vacuum pump is installed at the side of the vacuum system in a horizontal posture via the damper, a tension is applied upward to the vacuum pump by the elastic body one end of which is fixed to the fixed portion such as a ceiling to keep the horizontal posture of the vacuum pump. Thereby, the damper is prevented from being deflected by the weight of the vacuum pump, and thus high vibration absorbing capacity of the damper can be maintained.

Abstract: Provided is a connecting structure for a vacuum pump, which can block propagation of electrical noise, generated by a main body of the vacuum pump. Between both ends of a connection piping for connecting the vacuum pump to a vacuum chamber of an apparatus to be connected with and evacuated by the vacuum pump, there is interposedly provided an electrical insulating portion formed of an insulating material so as to provide electrical insulation therebetween. The electrical insulation portion may be provided to a connection piping member such as a damper (or a valve depending on the connection arrangement) for absorbing mechanical vibrations.

Abstract: Vibrations generated by a vacuum pump are prevented from propagating to external equipment such as an electron microscope. A casing (a separate casing portion and a casing main body) that houses a stator, stator blades, a rotor portion, and rotor blades as an exhaust function portion is connected to an inlet port portion in which an inlet port for sucking in a gas from the outside is formed, through an elastic member. An suction space between the casing and the inlet port portion is sealed by a bellows cylinder sealing means, and motion regulating members and motion regulating members and which regulate the amount of separation between the inlet port portion and the casing, and change shape due to relative motion between the two, are formed between the inlet port portion and the casing.