Patents by Inventor Takaharu Shima

Takaharu Shima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4413187
    Abstract: Disclosed is a method for exposing an electron beam of a beam-shaping type, wherein the electron beam can be shaped into polygon having desired size by passing through a first and a second apertures. The position of the first or the second aperture tends to be deviated from its design position due to heat, resulting in a deviation of the electron beam. According to the invention, the offset value of the real image formed on the second aperture, with respect to the ideal image, is automatically determined by detecting a current passing through the second aperture. During an electron-beam exposure for patterning, the amount of deflection of the electron beam is corrected by taking the previously obtained offset value into consideration.
    Type: Grant
    Filed: August 24, 1981
    Date of Patent: November 1, 1983
    Assignee: Fujitsu Limited
    Inventors: Yuji Akazawa, Toshihiko Osada, Takaharu Shima, Yuji Tanaka, Masayuki Hattori