Patents by Inventor Takahashi Toru

Takahashi Toru has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ultraviolet-absorbing polymer material and photoetching process
    Patent number: 5157091
    Abstract: An ultraviolet-absorbing polymer material comprising a copolymer of a (meth)acrylic ester monomer with a monomer possessing at least one substituting fluorine atom. A photoetching process, characterized by forming a resist film of the ultraviolet-absorbing polymer material on a substrate, exposing this resist film through a light mask to a light beam of a first wavelength, optionally subjecting the resist film in an atmosphere of a photodessociating gas to a light beam of a second wavelength, and effecting an etching treatment by virtue of a reactive radical formed by dissociation.
    Type: Grant
    Filed: May 23, 1990
    Date of Patent: October 20, 1992
    Inventors: Murahara Masataka, Shimomura Takeshi, Takahashi Toru