Patents by Inventor Takahide Sakata

Takahide Sakata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam apparatus and setting assisting method
    Patent number: 11682539
    Abstract: An average mass, an average density, and an average atomic number for a plurality of elements which form a specimen are calculated. A characteristic X-ray generation depth is calculated based on the average values and a minimum excitation energy of an element of interest. When an illumination condition is set, a reference image including a figure indicating a characteristic X-ray generation range, a numerical value indicating the characteristic X-ray generation depth, or the like, is displayed.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: June 20, 2023
    Assignee: JEOL Ltd.
    Inventors: Kazutaka Watakabe, Hirofumi Kuwahara, Takenori Miyahara, Takahide Sakata, Felix Timischl
  • Charged particle beam apparatus and setting assisting method
    Patent number: 11557458
    Abstract: A reference image is generated based on an illumination condition and element information of a specimen. The reference image includes a figure indicating a characteristic X-ray generation range, a numerical value indicating a characteristic X-ray generation depth, or the like. The reference image changes with a change of an accelerating voltage, a tilt angle, or an element forming the specimen. The reference image may include a figure indicating a landing electron scattering range, a figure indicating a back-scattered electron generation range, or the like.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: January 17, 2023
    Assignee: JEOL Ltd.
    Inventors: Kazutaka Watakabe, Hirofumi Kuwahara, Takenori Miyahara, Takahide Sakata, Felix Timischl
  • Charged Particle Beam Apparatus and Setting Assisting Method
    Publication number: 20220028653
    Abstract: A reference image is generated based on an illumination condition and element information of a specimen. The reference image includes a figure indicating a characteristic X-ray generation range, a numerical value indicating a characteristic X-ray generation depth, or the like. The reference image changes with a change of an accelerating voltage, a tilt angle, or an element forming the specimen. The reference image may include a figure indicating a landing electron scattering range, a figure indicating a back-scattered electron generation range, or the like.
    Type: Application
    Filed: July 20, 2021
    Publication date: January 27, 2022
    Inventors: Kazutaka Watakabe, Hirofumi Kuwahara, Takenori Miyahara, Takahide Sakata, Felix Timischl
  • Charged Particle Beam Apparatus and Setting Assisting Method
    Publication number: 20220028651
    Abstract: An average mass, an average density, and an average atomic number for a plurality of elements which form a specimen are calculated. A characteristic X-ray generation depth is calculated based on the average values and a minimum excitation energy of an element of interest. When an illumination condition is set, a reference image including a figure indicating a characteristic X-ray generation range, a numerical value indicating the characteristic X-ray generation depth, or the like, is displayed.
    Type: Application
    Filed: July 20, 2021
    Publication date: January 27, 2022
    Inventors: Kazutaka Watakabe, Hirofumi Kuwahara, Takenori Miyahara, Takahide Sakata, Felix Timischl