Abstract: A liquid discharge head includes a nozzle layer having a nozzle through which a liquid is discharged from a second side toward a first side, a liquid chamber substrate, and a drive circuit. The nozzle layer includes a vibration layer, a piezoelectric actuator adjacent to the nozzle and over the first side, a circuit connection over the first side, a first protective layer around the circuit connection, a second protective layer over the piezoelectric actuator, a first water-resistant film over the first protective layer, and a second water-resistant film over the second protective layer. The second protective layer is separated from the first protective layer. The first protective layer defines an opening above the circuit connection. The liquid chamber substrate has a liquid chamber communicating with the nozzle. The drive circuit is disposed over the second side and connected to the circuit connection to drive the piezoelectric actuator.

Abstract: A liquid discharge head includes: a support member including a first recess and a second recess; and a damper member bonded to the support member, the damper member including a damper membrane, wherein the first recess faces the damper membrane, and the second recess is closer to an end of the support member than the first recess in a longitudinal direction of the support member, and the second recess does not face the damper membrane.

Abstract: An actuator includes: a frame having a recess; an actuator substrate including a common chamber; a damper between the frame and the actuator substrate, the damper defining a part of a wall of the common chamber of the actuator substrate. The damper includes multiple layers laminated in a lamination direction, and the multiple layers is symmetrical in the lamination direction with respect to a center of the damper in the lamination direction.

Abstract: A liquid discharge head includes a nozzle member. The nozzle member includes a nozzle, a deformable laminar member, and an electromechanical transducer. The nozzle discharges liquid. The deformable laminar member has an opening forming the nozzle. The electromechanical transducer is disposed around the opening. The nozzle member is warped with respect to a discharge-side plane of the nozzle member in a surrounding area of the nozzle when no voltage is applied to the electromechanical transducer.

Abstract: An actuator includes a deformable thin-film member having an opening, an electromechanical conversion element disposed at a periphery of the opening of the deformable thin-film member, an insulating film covering the electromechanical conversion element, a protective film over a surface of the insulating film, the protective film covering the surface of the insulating film and a surface of an electrode wiring connected to the electromechanical conversion element, and an adhesion improving film disposed between the electrode wiring and the protective film.

Abstract: A liquid discharge head includes a nozzle configured to discharge a liquid, a pressure chamber communicating with the nozzle, a pressure generator configured to apply pressure on the pressure chamber, a first substrate including a terminal electrode connected to the pressure generator, and a second substrate including a bonding surface bonded to the first substrate, the second substrate including a terminal opening exposing the terminal electrode of the first substrate. The first substrate includes a through hole penetrating through the first substrate, and the second substrate includes a communication hole communicating with the through hole of the first substrate and an air communication channel on a surface opposite to the bonding surface, the air communication channel communicating with the terminal opening and the communicating hole.

Abstract: A piezoelectric thin-film element includes a diaphragm plate on a substrate; a lower electrode on the diaphragm plate; a piezoelectric film on the lower electrode, the piezoelectric film containing Pb; and an upper electrode on the piezoelectric film. The diaphragm plate is a laminate in which a silicon oxide layer, a silicon nitride layer, and an amorphous layer containing a metal oxide to trap Pb of the piezoelectric film are laminated in turn on the substrate. The amorphous layer has a thickness of preventing Pb of the piezoelectric film from reaching the silicon nitride layer.

Abstract: A liquid discharge head includes a nozzle configured to discharge a liquid, a pressure chamber communicating with the nozzle, a pressure generator configured to apply pressure on the pressure chamber, a first substrate including a terminal electrode connected to the pressure generator, and a second substrate including a bonding surface bonded to the first substrate, the second substrate including a terminal opening exposing the terminal electrode of the first substrate. The first substrate includes a through hole penetrating through the first substrate, and the second substrate includes a communication hole communicating with the through hole of the first substrate and an air communication channel on a surface opposite to the bonding surface, the air communication channel communicating with the terminal opening and the communicating hole.

Abstract: A liquid discharge head includes a channel forming member made of silicon, the channel forming member including a plurality of liquid channels, a natural oxide film having a film thickness of 2 nm or more on an outermost surface of the plurality of liquid channels of the channel forming member, and a surface treatment film on the natural oxide film to contact the natural oxide film. Each of a carbon content and a fluorine content in an interface between the natural oxide film and the surface treatment film is 5 atomic % or less.

Abstract: An actuator includes an actuator substrate and a diaphragm forming an inner wall defining a space in the actuator substrate. The diaphragm includes a first layer made of material that does not transmit light of a specific wavelength; a second layer made of material that transmits the light of a specific wavelength; an active region covering a central area of the diaphragm, the active region including the first layer and the second layer; and at least two transmissive regions formed at a circumference of the diaphragm, each of the at least two transmissive regions including the second layer without the first layer.

Abstract: A piezoelectric thin-film element includes a diaphragm plate on a substrate; a lower electrode on the diaphragm plate; a piezoelectric film on the lower electrode, the piezoelectric film containing Pb; and an upper electrode on the piezoelectric film. The diaphragm plate is a laminate in which a silicon oxide layer, a silicon nitride layer, and an amorphous layer containing a metal oxide to trap Pb of the piezoelectric film are laminated in turn on the substrate. The amorphous layer has a thickness of preventing Pb of the piezoelectric film from reaching the silicon nitride layer.

Abstract: A liquid discharge head includes a plurality of nozzles to discharge a liquid, a plurality of pressure chambers communicating with the plurality of nozzles, respectively, a plurality of individual supply channels communicating with the plurality of pressure chambers, respectively, a plurality of common-supply branch channels each having a side face and a bottom face and communicating with two or more of the plurality of individual supply channels, respectively, and a common-supply main channel communicating with the plurality of common-supply branch channels. The plurality of common-supply branch channels includes a curved portion on a corner between the side face and the bottom face of each of the plurality of common-supply branch channels along a direction of liquid flow in the plurality of common-supply branch channels.

Abstract: A liquid discharge head includes a head substrate and a surface treatment film on a surface of the head substrate. The surface treatment film is an oxide film containing Si. The oxide film contains a transition metal to form a passive film. A content of Si in a vicinity of an interface of the surface treatment film with the head substrate is higher than a content of Si in an inside of the surface treatment film and is 20 at % or more.

Abstract: A liquid discharge head includes a channel forming member made of silicon, the channel forming member including a plurality of liquid channels, a natural oxide film having a film thickness of 2 nm or more on an outermost surface of the plurality of liquid channels of the channel forming member, and a surface treatment film on the natural oxide film to contact the natural oxide film. Each of a carbon content and a fluorine content in an interface between the natural oxide film and the surface treatment film is 5 atomic % or less.

Abstract: An actuator includes an actuator substrate and a diaphragm forming an inner wall defining a space in the actuator substrate. The diaphragm includes a first layer made of material that does not transmit light of a specific wavelength; a second layer made of material that transmits the light of a specific wavelength; an active region covering a central area of the diaphragm, the active region including the first layer and the second layer; and at least two transmissive regions formed at a circumference of the diaphragm, each of the at least two transmissive regions including the second layer without the first layer.

Abstract: A liquid discharge head includes a plurality of nozzles to discharge a liquid, a plurality of pressure chambers communicating with the plurality of nozzles, respectively, a plurality of individual supply channels communicating with the plurality of pressure chambers, respectively, a plurality of common-supply branch channels each having a side face and a bottom face and communicating with two or more of the plurality of individual supply channels, respectively, and a common-supply main channel communicating with the plurality of common-supply branch channels. The plurality of common-supply branch channels includes a curved portion on a corner between the side face and the bottom face of each of the plurality of common-supply branch channels along a direction of liquid flow in the plurality of common-supply branch channels.

Abstract: A liquid discharge head includes a head substrate and a surface treatment film on a surface of the head substrate. The surface treatment film is an oxide film containing Si. The oxide film contains a transition metal to form a passive film. A content of Si in a vicinity of an interface of the surface treatment film with the head substrate is higher than a content of Si in an inside of the surface treatment film and is 20 at % or more.

Abstract: An electromechanical conversion element includes a lower electrode formed directly or indirectly on a substrate or a base film; an electromechanical conversion film formed on the lower electrode and including a piezoelectric body having a perovskite crystal structure preferentially oriented with a {n00} plane where n is a positive integer; and an upper electrode formed on the electromechanical conversion film. A diffraction peak at a position 2? at which a diffraction intensity has a maximum value and which corresponds to a (X00) plane or a (00X) plane, X being 1 or 2, obtained by ?-2? measurement in X-ray diffraction measurement, shows a trapezoidal peak shape and has two or more bending points.

Abstract: A method of producing an electromechanical transducer element includes forming a first, common electrode on one of a substrate and an undercoat layer; forming an electromechanical transducer film on the first electrode; forming a second electrode on the electromechanical transducer film; forming a first protective film on an upper surface of the second electrode, the electromechanical transducer film, and a side wall of the second electrode, and selectively forming a second protective film on a portion of the first protective film protecting the electromechanical transducer film and the side wall of the second electrode.

Abstract: An electromechanical conversion element includes a lower electrode formed directly or indirectly on a substrate or a base film; an electromechanical conversion film formed on the lower electrode and including a piezoelectric body having a perovskite crystal structure preferentially oriented with a {n00} plane where n is a positive integer; and an upper electrode formed on the electromechanical conversion film. A diffraction peak at a position 2? at which a diffraction intensity has a maximum value and which corresponds to a (X00) plane or a (00X) plane, X being 1 or 2, obtained by ?-2? measurement in X-ray diffraction measurement, shows a trapezoidal peak shape and has two or more bending points.