Abstract: A robot that transfers a substrate includes an arm, a hand, a substrate detector, and a substrate shape abnormality examiner. The hand is installed to the arm and holds and transfers the substrate. The substrate detector detects absence or presence of the substrate in a non-contact manner. The substrate shape abnormality examiner examines the substrate for a shape abnormality based on a height detected by the substrate detector at which the substrate is located when it is not held by the hand.

Abstract: A robot includes a guide, a mover, a hand, a deformation acquirer, a orientation adjuster, and a controller. The mover is installed to the guide and movable in a direction that the guide guides along. The hand is installed to the mover and holds a substrate. The deformation acquirer acquires information on a deformation of the guide. The orientation adjuster adjusts an orientation of the hand according to the deformation of the guide acquired by the deformation acquirer. The controller controls operation of the orientation adjuster. The controller adjusts the orientation of the hand performing a holding operation on the substrate to be transferred by using the orientation adjuster based on the information on the deformation of the guide.

Abstract: A robot that transfers a substrate includes an arm, a hand, a substrate orientation acquirer, a hand orientation adjuster, and a control unit. The hand is installed to the arm and holds and transfers the substrate. The substrate orientation acquirer acquires information about an orientation of a to-be-transferred substrate, which is the substrate to be transferred. The hand orientation adjuster adjusts an orientation of the hand with respect to the to-be-transferred substrate. The control unit controls operations of the arm, the hand, and the hand orientation adjuster. The control unit adjusts the orientation of the hand performing a taking-out operation on the to-be-transferred substrate by using the hand orientation adjuster based on the information about the orientation of the to-be-transferred substrate.

Abstract: A hydroelectric power generation system includes a water turbine, a generator connected to the water turbine, and a controller. The water turbine is arranged in a flow path through which a fluid flows. The controller performs a pressure control by controlling the generator to regulate a pressure of the fluid downstream of the water turbine. The pressure control includes a first control regulating the pressure in parallel with a regenerative operation of the generator, and a second control regulating the pressure in parallel with a power running operation of the generator.

Abstract: Provided is a substrate holding apparatus capable of appropriately holding a substrate. The substrate holding apparatus is suggested to hold a substrate including a portion to be plated that is exposed to a plating solution and an edge portion that is an area outside the portion to be plated. The substrate holding apparatus comprises a grasp module to come in contact with the edge portion of the substrate and thereby grasp the substrate, a suction module to attract the portion to be plated of the substrate by suction to hold the portion to be plated, and a protrusion provided at a position corresponding to the portion to be plated in the substrate, and protruding toward the substrate to be held by the substrate holding apparatus more than the suction module.

Abstract: An electronic apparatus includes: a chassis formed of a conductive member and including an opening; a radiation source arranged in the chassis and radiating noise electric waves; and a conductor formed of a conductive member and arranged on a same side of the radiation source as the opening with at least a part of the conductor overlapping the opening in a plan view of the opening. The conductor has one end electrically connected to the chassis and the other end as an electrically open end.

Abstract: An etching processing method includes: a step of placing a wafer formed with a titanium nitride film on a wafer stage in a processing chamber inside a vacuum vessel and supplying chlorine radicals to the wafer, thereby forming a modified layer on a surface of the titanium nitride film; and a step of heating the wafer, thereby desorbing and removing the modified layer. The titanium nitride film is etched by repeating the step of forming the modified layer and the step of desorbing and removing the modified layer.

Abstract: A quartz glass crucible 1 includes: a quartz glass crucible body 10 having a cylindrical side wall portion 10a, a curved bottom portion 10b, and a corner portion 10c which has a larger curvature than that of the bottom portion 10b and connects the side wall portion 10a and the bottom portion 10b to each other; and an inner-surface coating film 13A which contains a crystallization accelerator and is formed on an inner surface 10i of the quartz glass crucible body 10, in which the inner surface 10i of the quartz glass crucible body 10 is under compressive stress. The quartz glass crucible has high durability even at a high temperature during a single crystal pull-up step and is capable of reducing a generation ratio of pinholes in a silicon single crystal.

Abstract: A fluid apparatus includes a hydraulic machine, a rotary electric machine connected to the hydraulic machine, and a power conversion controller that converts power from the rotary electric machine. A non-normal operation is performed in a warning state that differs from a normal state in which a normal operation is continued and an anomalous state in which operation is stopped to continue a stopped condition.

Abstract: In an exemplary embodiment, a quartz glass crucible 1 includes: a cylindrical crucible body 10 which has a bottom and is made of quartz glass; and crystallization-accelerator-containing coating films 13A and 13B which are formed on surfaces of the crucible body 10 so as to cause crystallization-accelerator-enriched layers to be formed in the vicinity of the surfaces of the crucible body 10 by heating during a step of pulling up a silicon single crystal by a Czochralski method. The quartz glass crucible is capable of withstanding a single crystal pull-up step undertaken for a very long period of time, such as multi-pulling, and a manufacturing method thereof.

Abstract: A quartz glass crucible 1 includes: a quartz glass crucible body 10 having a cylindrical side wall portion 10a, a curved bottom portion 10b, and a corner portion 10c which has a larger curvature than that of the bottom portion 10b and connects the side wall portion 10a and the bottom portion 10b to each other; and an inner-surface coating film 13A which contains a crystallization accelerator and is formed on an inner surface 10i of the quartz glass crucible body 10, in which the inner surface 10i of the quartz glass crucible body 10 is under compressive stress. The quartz glass crucible has high durability even at a high temperature during a single crystal pull-up step and is capable of reducing a generation ratio of pinholes in a silicon single crystal.

Abstract: To provide a plating apparatus that prevents or reduces a diversion of an electric field. According to one embodiment, a plating apparatus for performing a plating process on a substrate held onto a substrate holder is provided. The plating apparatus includes a plating tank configured to receive the substrate holder holding the substrate, a block member that extends to an inside of the plating tank from a wall surface of the inside of the plating tank, and is movable inside the plating tank, and a moving mechanism configured to move the block member toward the substrate holder disposed inside the plating tank.

Abstract: A memory management method of a computer including a memory and a processor connected to the memory, the method includes, by the processor, executing an OS and executing a plurality of processes on the OS. The plurality of processes include a virtual storage device and an application. The processor provides the application with a physical area of the memory, which is managed by the OS, controls the virtual storage device to use a physical area of the memory, which is mounted on the computer, but is not managed by the OS, secures continuous physical areas from the physical area of the memory, which is managed by the OS, to be used by the virtual storage device, and performs DMA transfer between the virtual storage device and the application by using the secured continuous physical areas.

Abstract: A hydroelectric power generation system is included in a channel control system. The channel control system includes a command section that outputs a command value of a flow rate or pressure of a fluid, an opening degree control unit that calculates a target opening degree based on the command value, and a motor-operated valve installed in a channel through which the fluid flows. The valve opens and closes in accordance with the target opening degree. The hydroelectric power generation system includes a water turbine disposed in the channel, a generator driven by the water turbine, and a generator control unit that controls at least one of a torque and a number of rotations of the generator based on opening degree information that indicates a measured value of an actual opening degree of the valve or an opening degree estimated.

Abstract: A display apparatus includes a display device capable of changing at least one of a plurality of parameters including a luminescence intensity, a color gamut, and an electro optical transfer function (EOTF); and at least one processor or circuit configured to function as a display control unit configured to control the display device to display a plurality of images and a background image displayed around each of the plurality of images such that an appearance of the background image is visually identical between the plurality of images when the display device is caused to display the plurality of images.

Abstract: An attachment tape is configured such that a light emitter and a light detector are mounted on the attachment tape and such that the attachment tape is wrapped around a tissue so as to be attached to the tissue. The light emitter is configured to emit light. The light detector is configured to detect the light emitted from the light emitter. A width dimension of the attachment tape is gradually narrowed from one point along a longitudinal direction of the attachment tape toward another point at a distal end of the attachment tape.

Abstract: Provided is a method for pulling up and growing, by the Czochralski method, a silicon monocrystal from a melt obtained by fusing a silicon raw material for crystals within a quartz crucible. When the inner wall of the quartz crucible is made of a synthetic quartz layer, a gel-like liquid including a devitrification accelerator, a thickening agent, and a solvent is applied to the bottom surface of the quartz crucible inner wall or to both the bottom surface and the lateral surface thereof prior to filling the silicon raw material for crystals into the quartz crucible, whereas when the inner wall of the quartz crucible is made of a natural quartz layer, the gel-like liquid is applied to both the bottom surface and the lateral surface of the inner wall of the quartz crucible prior to filling the silicon raw material for crystals into the quartz crucible.

Abstract: A hydroelectric power generation system includes: a generator driven by the hydraulic turbine; a head adjuster adjusting an effective head of the hydraulic turbine; and a controller cooperatively executing: flow rate control for controlling the generator such that a flow rate in the hydraulic turbine is brought close to a target flow rate; and head adjusting control for adjusting the effective head of the hydraulic turbine using the head adjuster such that the effective head of the hydraulic turbine falls within a first range.

Abstract: A quartz glass crucible (1) includes: a cylindrical crucible body (10) which has a bottom and is made of quartz glass; and a first crystallization-accelerator-containing coating film (13A) which is formed on an inner surface (10a) so as to cause an inner crystal layer composed of an aggregate of dome-shaped or columnar crystal grains to be formed on a surface-layer portion of the inner surface (10a) of the crucible body (10) by heating during a step of pulling up the silicon single crystal by a Czochralski method. The quartz glass crucible is intended to withstand a single crystal pull-up step undertaken for a very long period of time.

Abstract: A hydroelectric power generation system includes a water turbine, a generator connected to the water turbine, and a controller. The water turbine is arranged in a flow path through which a fluid flows. The controller performs a pressure control by controlling the generator to regulate a pressure of the fluid downstream of the water turbine. The pressure control includes a first control regulating the pressure in parallel with a regenerative operation of the generator, and a second control regulating the pressure in parallel with a power running operation of the generator.