Patents by Inventor Takahiro KIJIMA

Takahiro KIJIMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HEATING/COOLING DEVICE AND HEATING/COOLING METHOD
    Publication number: 20220336238
    Abstract: A heating/cooling device includes: a chamber; a plurality of substrate holders provided inside the chamber to support substrates; a plurality of LED light sources provided outside the chamber to irradiate the substrates held on the substrate holders with LED light having a wavelength that heats the substrates; a plurality of transmission windows provided between the plurality of substrate holders and the plurality of LED light sources to transmit the LED light radiated from the LED light sources; and a plurality of gas distribution parts provided inside the chamber to distribute and supply a cooling gas to the substrates held on the substrate holders.
    Type: Application
    Filed: August 6, 2020
    Publication date: October 20, 2022
    Inventors: Shosuke ENDO, Yohei MIDORIKAWA, Yohei NAKAGOMI, Yoshihiro KOBAYASHI, Yasuo NAKATANI, Susumu SAITO, Chanseong AHN, Yuta TAKAHASHI, Takahiro KIJIMA