Abstract: An apparatus for fracturing polycrystalline silicon having: a pair of rolls rotated in a counter direction each other around parallel axes; and a plurality of fracturing teeth units provided on outer peripheral surfaces of the rolls, arranged along a circumferential direction of the rolls, and have a plurality of fracturing teeth and fixing covers fixing the fracturing teeth on the outer peripheral surfaces of the rolls, in which: the fracturing teeth has flanges; and the fixing covers are formed as strips along a longitudinal direction of the rolls, and in which the fixing covers are fixed on the rolls in a state in which top ends of the fracturing teeth are protruded outward radially of the rolls from the fixing hole outward so as to hold the flanges between the fixing covers and the rolls.

Abstract: A fluid feed pump is configured, such that a fluid is fed from an outlet channel of the fluid feed pump through an outlet buffer chamber to a fluid channel. The outlet buffer chamber is designed to have a higher compliance than a compliance of a pump chamber. The driving period of the fluid feed pump is set to a shorter period than a time constant defined by the compliance of the pump chamber and a flow resistance between an inlet of the outlet channel and an outlet of the fluid channel. This enables the fluid to be fed with high efficiency by taking advantage of the pressure oscillation occurring between the pump chamber and the outlet buffer chamber.

Abstract: A pump chamber is connected to an outlet-side buffer chamber via an outlet channel, and pumps a liquid from the outlet-side buffer chamber. A pressure vibration generated within the pump chamber when the volume of the pump chamber is decreased includes various kinds of information relating to the operating states of the liquid feed pump, such as mixing of bubbles, pumping pressure, dissolved gas amount, and liquid feed amount. Thus, it is possible to detect the pressure vibration, thereby simply and easily detecting the various kinds of information relating to the operating states of the liquid feed pump.

Abstract: A fluid feeding pump which varies a volume of a pump chamber and thus feeds a fluid out of the pump chamber, includes: a piezoelectric element which accumulates electric charges inside when a voltage is applied, and which deforms according to an amount of accumulated electric charges and thus increases or decreases the volume of the pump chamber; a drive unit which applies a drive signal with a waveform increasing to a predetermined maximum voltage and then decreasing, and thus drives the piezoelectric element; and an air bubble determining unit which detects a current flowing through the piezoelectric element within a predetermined period after the drive signal is applied to the piezoelectric element, and thus determines whether there are air bubbles in the pump chamber or not.

Abstract: An apparatus for fracturing polycrystalline silicon having a pair of rolls which are rotated in a counter direction each other around parallel axes; and a plurality of fracturing teeth which are provided on outer peripheral surfaces of the rolls and are protruded radially-outwardly, in which top surfaces thereof are formed spherically and side surfaces thereof are formed conically or cylindrically, and fracturing fragments of polycrystalline silicon between the rolls.

Abstract: An apparatus for fracturing polycrystalline silicon having: a pair of rolls rotated in a counter direction each other around parallel axes; and a plurality of fracturing teeth units provided on outer peripheral surfaces of the rolls, arranged along a circumferential direction of the rolls, and have a plurality of fracturing teeth and fixing covers fixing the fracturing teeth on the outer peripheral surfaces of the rolls, in which: the fracturing teeth has flanges; and the fixing covers are formed as strips along a longitudinal direction of the rolls, and in which the fixing covers are fixed on the rolls in a state in which top ends of the fracturing teeth are protruded outward radially of the rolls from the fixing hole outward so as to hold the flanges between the fixing covers and the rolls.

Abstract: An apparatus for fracturing polycrystalline silicon has: a pair of rolls which are rotated in a counter direction each other around parallel axes; and a plurality of fracturing teeth protruding outward radially from outer peripheral surfaces of the rolls and having variant heights. In the apparatus for fracturing, the fracturing teeth are arranged so that higher teeth among the fracturing teeth and lower teeth among the fracturing teeth are alternately rowed at least along a circumferential direction or a width direction of the rolls; and the fracturing teeth are arranged so that a tip of the higher tooth of the one roll and a tip of the lower tooth of the other roll are opposed to each other at a position in which the fracturing teeth of each rolls are closest to each other, so that the apparatus fractures fragments of polycrystalline silicon between the rolls.

Abstract: A liquid injection device includes: a chamber which supply of the liquid and connects with the injection nozzle; a chamber volume varying unit to which driving voltage is applied to reduce the volume of the chamber to a volume smaller than the volume of the chamber before the driving voltage is applied; a driving voltage applying unit which applies the driving voltage to the chamber volume varying unit with the liquid supplied to the chamber; a pseudo noise data memory unit which stores sound data of pseudo noise having audible frequency components contained in driving noise generated when the driving voltage is applied to the chamber volume varying unit; and a pseudo noise outputting unit which outputs the pseudo noise by using the sound data of the pseudo noise such that the sound pressure of the driving noise decreases within the audible frequency range when the driving voltage is applied.

Abstract: An excision device configured to excise living tissue by ejecting liquid includes: a supplying unit configured to supply liquid to be ejected; a chamber configured to be filled with the supplied liquid; an ejection nozzle connected to the chamber; a drive member configured to be deformed in the direction to reduce the volume of the chamber when a drive voltage is applied more than a case where the drive voltage is not applied; a liquid ejecting unit configured to eject the liquid in the chamber in a pulsed manner from the ejection nozzle by applying the drive voltage to the drive member in a state in which the chamber is filled with the supplied liquid; and an air-bubble detecting unit configured to detect air bubbles in the chamber by detecting an electric current flowing in the drive member when the drive voltage is applied to the drive member.

Abstract: A fluid ejection apparatus ejecting fluid from an ejection port, includes: a suction port provided at a position apart from the ejection port and applied with a negative pressure; and a fluid channel provided between the vicinity of the ejection port and the suction port, and configured to suck the fluid in the vicinity of the ejection port by the surface tension of the fluid and move the same toward the suction port.

Abstract: A fluid ejection device includes a pulsating flow generation section adapted to eject a fluid in a pulsed manner; a fluid supply section adapted to supply the pulsating flow generation section with the fluid; a fluid supply tube having flexibility adapted to communicate the pulsating flow generation section and the fluid supply section with each other; and a drive control section adapted to perform drive control of the pulsating flow generation section and the fluid supply section, wherein the drive control section starts up the pulsating flow generation section, makes the fluid supply section supply the fluid at a first flow rate for a predetermined time period, and then makes the fluid supply section supply the fluid at a second flow rate lower than the first flow rate after the predetermined time period elapses.