Patents by Inventor Takahiro Miike

Takahiro Miike has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pair of substrate holders, substrate holder, substrate bonding apparatus and method for manufacturing device
    Patent number: 8863808
    Abstract: A substrate holder pair comprising a first substrate holder and a second substrate holder that holds a first substrate and a second substrate bonded to each other, between itself and the first substrate holder. The first substrate holder includes a pressure receiving portion that, when the first substrate holder is separated from the second substrate holder, is pressed by a pressing member, and the second substrate holder includes a passing portion through which passes the pressing member, to enable pressing of the pressure receiving portion by the pressing member.
    Type: Grant
    Filed: June 15, 2012
    Date of Patent: October 21, 2014
    Assignee: Nikon Corporation
    Inventors: Daisuke Yuki, Takahiro Miike, Hiroshi Mori
  • PAIR OF SUBSTRATE HOLDERS, SUBSTRATE HOLDER, SUBSTRATE BONDING APPARATUS AND METHOD FOR MANUFACTURING DEVICE
    Publication number: 20130008581
    Abstract: A substrate holder pair comprising a first substrate holder and a second substrate holder that holds a first substrate and a second substrate bonded to each other, between itself and the first substrate holder. The first substrate holder includes a pressure receiving portion that, when the first substrate holder is separated from the second substrate holder, is pressed by a pressing member, and the second substrate holder includes a passing portion through which passes the pressing member, to enable pressing of the pressure receiving portion by the pressing member.
    Type: Application
    Filed: June 15, 2012
    Publication date: January 10, 2013
    Inventors: Daisuke YUKI, Takahiro Miike, Hiroshi Mori