Abstract: A controlling method according to an aspect of the present disclosure includes a first chamber provided with a fan, a second chamber to which a replacement gas is sent from the first chamber by the fan and which includes a transporter configured to transport a substrate, a circulation line configured to communicate the first chamber and the second chamber with each other and circulate the replacement gas, and a valve provided in the circulation line. The method includes replacing an inside of the first chamber and an inside of the second chamber with the replacement gas by turning off the fan and closing the valve, and circulating the replacement gas through the circulation line by turning on the fan and opening the valve. The replacing includes controlling the fan to be turned on and the valve to be opened for a predetermined period of time.

Abstract: It is possible to suppress overcorrection. A physical quantity detecting device includes: a physical quantity detecting sensor that detects a physical quantity of a measurement target fluid and outputs a detection signal; a compensation amount calculation unit that calculates, by using the detection signal, a lead compensation amount used in lead compensation for the detection signal; and a gain control unit that adjusts the lead compensation amount based on a deviation that is an amount of change in lead compensation amount over time.

Abstract: An object is to improve measurement accuracy of a flow rate measurement device. A flow rate measurement device including: a first void which is formed of one surface of the support body and one surface of the circuit board; a second void which is formed of a surface opposite to the one surface of the circuit board and the housing; and a third void which is formed of a surface opposite to the one surface of the support body and a cover.

Abstract: To obtain a low-pressure-loss physical quantity detection device that can detect a plurality of physical quantities of intake air. A physical quantity detection device of the present invention that detects a plurality of physical quantities of a measured gas flowing in a main passage, the physical quantity detection device includes: a circuit board on which a sensor that detects the plurality of physical quantities and an electronic component that controls the physical quantities are mountable; a circuit board accommodating unit that accommodates the circuit board; and a sub-passage in which a flow sensor is disposed. The circuit board is accommodated in the circuit board accommodating unit on an upstream side of the sub-passage, and disposed in parallel with the measured gas flowing through the main passage.

Abstract: Provided is a physical quantity detection device capable of achieving both rigidity improvement and sealability improvement. A physical quantity detection device (20) of the invention includes a housing (100), a cover (200), a chip package (310), and a flow rate sensor (311) supported by the chip package and arranged in a sub-passage. The housing includes: a first adhesive groove 160A which is an adhesive groove to which an adhesive for bonding the cover is applied, extends along a proximal end of the housing, extends in the protruding direction of the housing from the proximal end of the housing to a position on a more distal end side of the housing than the chip package, and is applied with the first adhesive 401; and a second adhesive groove 160B which extends along the sub-passage 134 and is applied with the second adhesive 402. The first adhesive has a higher Young's modulus, and the second adhesive has a higher thixotropy.

Abstract: Provided is a physical quantity detection device capable of improving noise performance of a flow rate detection unit as compared with the related art. The physical quantity detection device 20 includes a plate-like chip package 208 that is arranged to protrude from the flow path of the measurement target gas and has a width W along the flow direction of the measurement target gas. The chip package 208 includes a flow rate detection unit 205, an accelerating flow path 208c, a measurement surface 208a, a non-measurement surface 208b, and a separation flow portion 208d. The cross sectional area of the accelerating flow path 208c is reduced, and the flow rate detection unit 205 is arranged. The separation flow portion 208d partitions the second sub-passage 234b into a measurement flow path facing the measurement surface 208a and a non-measurement flow path facing the non-measurement surface 208b.

Abstract: A compact physical quantity detecting device is provided since it is possible to lower the mounting height of a chip package by accommodating the chip package in a notched board. In the physical quantity detecting device of the present invention, a part in a thickness direction of a support body on which a flow rate detection unit and a processing unit are mounted is accommodated in a notch provided in a printed board.

Abstract: Provided is a physical quantity detection device capable of electrically connecting with a neutralization region arranged at a place through which a measurement target gas passes in a simple process. A physical quantity detection device 300 of the invention includes a housing 301 having a terminal 303 and a passage portion 100 through which a measurement target gas passes, and a support body 600 that supports a flow rate detection element 601. A neutralization region 500 is formed on the bottom surface of the passage portion of the housing, and the support body is supported by the housing such that the detection unit of the flow rate detection element faces the neutralization region.

Abstract: A commodity purchase system for assisting a customer not at a store in making purchase, includes a first terminal configured to capture an image of commodities in the store, a server configured to acquire commodity information about one of the commodities, and a second terminal configured to display the information and issue a request for purchase of said one of the commodities, and issue a settlement request for settling purchase of commodities purchased by the customer. The server is further configured to, upon issuance of the settlement request, cause the first terminal to output a screen through which a delivery method of the purchased commodities can be selected, calculate the payment amount and a reward for a user of the first terminal based on the selected delivery method, and perform settlement processing based on the payment amount and output reward information indicating the reward.

Abstract: A commodity purchase system for assisting a customer not in a store in making a purchase includes a relay server, a first terminal, and second terminal. The first terminal captures an image of commodities in the store, and the second terminal displays the image and detects a user selection operation at a position in the image, and then issues a scan request with information indicating a position in the image at which the selection operation was been made. Upon receipt of the scan request, the first terminal, display the image on which the selection operation was made with the position of the selection operation being marked in the image. The first terminal can then be used to scan one of the commodities and transmit, to the relay server, scanned commodity information. The relay server then registers the scanned commodities for purchase.

Abstract: A machine learning system includes a first determination model that determines whether an input image is a second domain image, and a second determination model that determines whether an extracted image obtained by extracting an area where an object is presented from the input image is from the second domain image. Either a pseudo second domain image or the second domain image is selected and input into the first determination model, and either a first extracted image in the pseudo second domain image or a second extracted image in the second domain image is selected and input into an image extracting unit. Learning of the first determination model is performed based on a first determination result, learning of the second determination model is performed based on a second determination result, and learning of a pseudo image generative model is performed based on the first and second determination results.

Abstract: An object is to improve measurement accuracy of a thermal air flow meter. A flow-rate measuring device comprising: a sensor assembly having a flow-rate detecting element; a circuit board on which the sensor assembly is mounted; and a housing on which the circuit board is mounted, wherein the sensor assembly is mounted on the circuit board such that a detection portion side of the flow-rate detecting element is closer to the housing, and the sensor assembly includes a contact portion in contact with the housing on the detection portion side.

Abstract: Provided is a physical quantity detection device capable of achieving both rigidity improvement and sealability improvement. A physical quantity detection device (20) of the invention includes a housing (100), a cover (200), a chip package (310), and a flow rate sensor (311) supported by the chip package and arranged in a sub-passage. The housing includes: a first adhesive groove 160A which is an adhesive groove to which an adhesive for bonding the cover is applied, extends along a proximal end of the housing, extends in the protruding direction of the housing from the proximal end of the housing to a position on a more distal end side of the housing than the chip package, and is applied with the first adhesive 401; and a second adhesive groove 160B which extends along the sub-passage 134 and is applied with the second adhesive 402. The first adhesive has a higher Young's modulus, and the second adhesive has a higher thixotropy.

Abstract: To obtain a physical quantity detection device capable of reducing an intake amount of air accompanied by foreign matter. A physical quantity detection device (20) of the invention includes a housing arranged in a main passage through which a measurement target gas (2) flows. The housing is provided with a second sub-passage (B) that takes in a part of the measurement target gas (2) flowing in the main passage, a circuit chamber (135) that accommodates a pressure sensor (320) that detects a pressure of the measurement target gas (2), and a pressure introduction passage (170) having one end opened in the middle of the second sub-passage (B) and the other end opened in the circuit chamber (135) and capable of introducing the pressure of the measurement target gas (2) from the second sub-passage (B) into the circuit chamber (135). In the pressure introduction passage (170), an introduction port (171) is arranged at a position offset outward from a side wall surface (152b) of the second sub-passage (B).

Abstract: To obtain a physical quantity detection device that can prevent a thermal influence on a sensor due to downsizing. A physical quantity detection device 20 of the present invention includes a measuring unit 213 protruding from an inner wall of a main passage 22 toward a passage center of the main passage. The physical quantity detection device 20 includes at least one of a flow sensor 205 that detects a flow rate of a measured gas 2, an intake air temperature sensor 203 that detects temperature, a pressure sensor 204 that detects pressure, and a humidity sensor 206 that detects humidity, and the sensors are disposed along a protruding direction of the measuring unit 213.

Abstract: To obtain a physical-quantity detection device that reduces a variation in mounting position in a main passage. A physical-quantity detection device 20 of the present invention is inserted into and disposed in a main passage 22, and includes a flange 211 fixed to a seat surface 103 of the main passage 22, and the flange 211 includes a press-fitting portion 281 for positioning with respect to a seat surface 103 side.

Abstract: Provided is a thermal-type flowmeter which can prevent a reduction of flow rate accuracy and reliability, and an increase of cost of the thermal-type flowmeter compared to the related art, and can add a function of an electrostatic scattering mechanism. The thermal-type flowmeter of the present invention includes a sub-passage into which part of a measurement target gas flowing in a main passage is taken, a flow rate detection element of a flow measurement unit which is disposed in the sub-passage, a circuit package which supports the flow rate detection element, and a substrate to which the circuit package is fixed. The flow rate detection element includes a detection surface to detect a flow rate of the measurement target gas. The detection surface is disposed to face the circuit substrate.

Abstract: A physical quantity detecting device includes a circuit board having a first support portion with a physical quantity detecting element, a second support portion with a temperature detecting element, and a housing molded by injection molding, the housing supporting the circuit board. The physical quantity detecting element is configured to detect a physical quantity of fluid and the temperature detecting element is configured to detect a temperature of the fluid. The second support portion protrudes from an edge of the circuit and has a third support portion supporting the second support portion in connection with the housing. The third support portion is located on a same side as the leading end portion, with respect to a base end portion, and located on a same side as the base end portion, with respect to an implementation portion on which the temperature detecting element is implemented.

Abstract: It is possible to suppress overcorrection. A physical quantity detecting device includes: a physical quantity detecting sensor that detects a physical quantity of a measurement target fluid and outputs a detection signal; a compensation amount calculation unit that calculates, by using the detection signal, a lead compensation amount used in lead compensation for the detection signal; and a gain control unit that adjusts the lead compensation amount based on a deviation that is an amount of change in lead compensation amount over time.

Abstract: To obtain a physical-quantity detection device that reduces a variation in mounting position in a main passage. A physical-quantity detection device 20 of the present invention is inserted into and disposed in a main passage 22, and includes a flange 211 fixed to a seat surface 103 of the main passage 22, and the flange 211 includes a press-fitting portion 281 for positioning with respect to a seat surface 103 side.