Patents by Inventor Takahiro Misumi

Takahiro Misumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum change neutralization method
    Patent number: 5492862
    Abstract: A vacuum processing method including the steps of generating plasma of a charge neutralizing medium by plasma generating means in a vacuum process chamber, and supplying the charge neutralizing medium in the plasma state to an object during transportion in the vacuum process chamber, thereby neutralizing a charge on the object. With this method, the object can be smoothly transported in a vacuum atmosphere after treatment and adhesion of particles to the object is prevented.
    Type: Grant
    Filed: January 10, 1994
    Date of Patent: February 20, 1996
    Assignee: Tokyo Electron Limited
    Inventor: Takahiro Misumi