Abstract: To provide a novel polishing composition capable of improving the polishing speed of metal (particularly, tungsten) and maintaining stability as a composition. A polishing composition contains abrasive grains; quaternary amine having at least one alkyl group having 2 or more carbon atoms or a salt thereof; and a liquid carrier, wherein a pH of the polishing composition is from 2 to 5, and a zeta potential of the abrasive grains in the polishing composition is adjusted to 15 mV or more and less than 40 mV over the entire range of pH 2 to pH 4.

Abstract: To provide a novel polishing composition capable of improving the polishing speed of metal (particularly, tungsten) and maintaining stability as a composition. A polishing composition contains abrasive grains; quaternary amine having at least one alkyl group having 2 or more carbon atoms or a salt thereof; and a liquid carrier, wherein a pH of the polishing composition is from 2 to 5, and a zeta potential of the abrasive grains in the polishing composition is adjusted to 15 mV or more and less than 40 mV over the entire range of pH 2 to pH 4.

Abstract: The present invention provides a means for further improving a polishing speed in a polishing composition. The polishing composition includes: an abrasive grain; hydrogen peroxide; and water, wherein the abrasive grain has an average secondary particle size of 20 nm or more to 150 nm or less, a molar concentration M (mmol/Kg) of the hydrogen peroxide and a total surface area of the abrasive grain satisfy a relationship of Formula 1 below and Formula 2 below, and a pH is 10 or more to 14 or less. M<Log(S)×100?750??(Formula 1) M>0??(Formula 2) (wherein S represents a total surface area (m2) of abrasive grains present in 1 Kg of the polishing composition, and Log(S) represents a natural logarithm of S).

Abstract: The present invention provides a polishing composition which can achieve a high polishing speed for the layer containing copper and at the same time, can suppress dissolution of the layer containing cobalt, in polishing an object to be polished having a layer containing copper and a layer containing cobalt. Disclosed is a polishing composition used for polishing an object to be polished having a layer containing copper and a layer containing cobalt, which comprises an oxidizing agent, and at least one cobalt dissolution inhibitor selected from the group consisting of a compound having a nitrogen-containing 5-membered ring structure, and an aminocarboxylic acid having two or more carboxyl groups.

Abstract: [Problem] Provided is a polishing composition that can sufficiently maintain a high polishing rate for a barrier layer and an insulating film and suppress the occurrence of a surface defect such as erosion or fang. [Solution] Provided is a polishing composition which is used in the application to polish a polishing object having a barrier layer, a metal wiring layer and an insulating film, the polishing composition including abrasive grains, an oxidant, a metal corrosion inhibitor, a pH adjusting agent and water, in which an aspect ratio of abrasive grains is 1.22 or less and a ratio D90/D10 of a diameter D90 of particles when a cumulative particle weight from the fine particle side reaches 90% of the total particle weight to a diameter D10 of particles when the cumulative particle weight from the fine particle side reaches 10% of the total particle weight of the entire particles is 1.5 or more in a particle size distribution of the abrasive grains determined by a laser diffraction scattering method.

Abstract: A polishing composition contains a polishing accelerator, a water-soluble polymer including a constitutional unit originating from a polymerizable compound having a guanidine structure such as dicyandiamide, and an oxidant. The water-soluble polymer may be a water-soluble polymer including a constitutional unit originating from dicyandiamide and a constitutional unit originating from formaldehyde, a diamine or a polyamine.

Abstract: [Problem] Provided is a polishing composition that can sufficiently maintain a high polishing rate for a barrier layer and an insulating film and suppress the occurrence of a surface defect such as erosion or fang. [Solution] Provided is a polishing composition which is used in the application to polish a polishing object having a barrier layer, a metal wiring layer and an insulating film, the polishing composition including abrasive grains, an oxidant, a metal corrosion inhibitor, a pH adjusting agent and water, in which an aspect ratio of abrasive grains is 1.22 or less and a ratio D90/D10 of a diameter D90 of particles when a cumulative particle weight from the fine particle side reaches 90% of the total particle weight to a diameter D10 of particles when the cumulative particle weight from the fine particle side reaches 10% of the total particle weight of the entire particles is 1.5 or more in a particle size distribution of the abrasive grains determined by a laser diffraction scattering method.

Abstract: A polishing composition contains a water-soluble polymer, a polishing accelerator, and an oxidizing agent. The water-soluble polymer is a polyamide-polyamine polymer having an amine value of 150 mg KOH/1 g·solid or greater.

Abstract: To provide a polishing composition, in which a high polishing rate for a barrier layer and an insulation film can sufficiently be maintained, a polishing rate of a low dielectric material can sufficiently be suppressed, and aggregation of abrasive grains can be prevented. The invention is a polishing composition to be used for an application of polishing a polishing object having a barrier layer, a metal wiring layer, and an insulation film, comprising an oxidizing agent, and a nonionic compound having a weight average molecular weight of 1,000 or less.

Abstract: Provided is a polishing composition to be used for polishing an object including a conductor layer and an electrically conductive material layer that is in contact with the conductor layer. In a state in which the positive electrode and the negative electrode of an electrometer are connected to the electrically conductive material layer and the conductor layer, respectively, in the polishing composition at ordinary temperature, the current flowing from the positive electrode to the negative electrode has a positive value or is zero when the electrically conductive material layer and the conductor layer are polished. The polishing composition preferably contains a nitrogen atom-containing compound, a sulfur atom-containing compound, or a phosphorus atom-containing compound as an additive to control the value of the current to positive or zero.

Abstract: A fuel cell cogeneration system of the present invention includes: a cell (10); a fuel gas discharging manifold (122) which is formed to extend in a thickness direction of the cell (10) and through which an anode off gas unconsumed in an anode (2A) flows; an oxidizing gas discharging manifold (124) which is formed to extend in the thickness direction of the cell (10) and through which a cathode off gas unconsumed in a cathode (2B) flows; and a cooling medium discharging manifold (126) which is formed to extend in the thickness direction of the cell (10) and through which an off cooling medium having recovered heat from the cell (10) flows, and the fuel gas discharging manifold (122) and/or the oxidizing gas discharging manifold (124) are formed between the cooling medium discharging manifold (126) and a separator end closest to the cooling medium discharging manifold (126).

Abstract: A fuel cell power generation system including a fuel cell, a fuel generator, an oxidizing gas supply device, an output controller, an open-close mechanism, and a controller. The controller is configured such that in a stop process, the controller controls the output controller to stop supplying the electric power to an external load; controls the oxidizing gas supply device to stop supplying an oxidizing gas and controls the open-close mechanism to close a passage upstream from an oxidizing gas channel; after the passage upstream from the oxidizing gas channel is closed, stops a raw material gas supply device and a water supply device when a predetermined period has elapsed, during which period a gas in the oxidizing gas channel is replaced by a fuel gas.

Abstract: A fuel cell system includes a fuel cell; a fuel gas supplying unit supplying the fuel gas into the fuel cell on the anode side thereof; an oxidizing agent gas supplying unit supplying the oxidizing agent gas into the fuel cell on the cathode side thereof; a raw material gas supplying unit supplying the raw material gas into the fuel cell; and a controlling unit controlling the supply of the fuel gas, the oxidizing agent gas and the raw material gas. After switching the output of electric power or the fuel cell off, the fuel gas supplying unit suspends the supply of the fuel gas, the oxidizing agent gas supplying unit suspends the supply of the oxidizing agent gas and the raw material gas supplying unit supplies the raw material gas into the fuel cell to purge the fuel cell on the cathode side.

Abstract: A fuel cell system of the present invention includes: a fuel cell (1) having an electrolyte membrane (2), an anode (3) and a cathode (4) sandwiching the electrolyte membrane (2), a cathode gas passage (98) through which an oxidizing gas is supplied to and discharged from the cathode (4), and an anode gas passage (97) through which a fuel gas is supplied to and discharged from the anode (3); a fuel gas channel having an anode gas passage (97) and through which the fuel gas is supplied to and discharged from the anode (3); and an oxidizing gas channel having the cathode gas passage (98) and through which the oxidizing gas is supplied to and discharged from the cathode (4).

Abstract: A polishing composition contains a water-soluble polymer, a polishing accelerator, and an oxidizing agent. The water-soluble polymer is a polyamide-polyamine polymer having an amine value of 150 mg KOH/1 g·solid or greater.

Abstract: A controller (15) performs a stop operation of stopping electric power generation by a fuel cell (3); then performs an activity recovery operation of stopping the supply of a fuel gas by a fuel gas supply unit (10) to an anode (2a), causing an anode inert gas supply unit (13) to supply an inert gas to the anode (2a), and causing an oxidizing gas supply unit (11) to supply an oxidizing gas to a cathode (2b); and performs control such that the fuel gas supply unit (10) resumes supplying the fuel gas to the anode (2a) to resume the electric power generation by the fuel cell (3) after the cell voltage of the fuel cell (3) which is detected by a voltage detector (14) has decreased to a first voltage or lower.

Abstract: A fuel cell includes: cells (11), each of which includes an electrolyte layer-electrode stack assembly (5) having a electrolyte layer (1) and a pair of gas diffusion electrodes (4a, 4b) sandwiching a portion of the electrolyte layer (1) which portion is located on an inner side of a peripheral portion of the electrolyte layer (1), an annular peripheral member disposed at the peripheral portion of the electrolyte layer (1), a pair of electrically conductive separators (6A, 6B) which sandwich the electrolyte layer-electrode stack assembly (5) and the peripheral member, and damage detecting wires (31); and a fuel cell stack (100) formed by stacking the cells (11), wherein: the damage detecting wires (31) are formed on components constituting the cell (11) other than the electrolyte layer-electrode stack assembly (5); and the damage detecting wires (31) are connected to one another to form an open circuit by stacking the cells (11).

Abstract: A fuel cell separator of the present invention is provided with a reactant gas flow region (8) including a plurality of straight portions (11) and one or more turn portions (12). At least one of one or more turn portions (12) includes a gas mixing portion (12b), a gas meeting portion (12a), and a gas separating portion (12c). Second rib portions (14) are formed in the gas meeting portion (12a) and the gas separating portion (12c). The second rib portions (14) are formed such that the length of an inner second rib portion (14) is shorter than the length of an outer second rib portion (14) in a direction in which the second rib portions (14) extend. An outermost second rib portion (141) located farthest from a center rib portion (13A) is formed so as to be bent inward toward the center line (131).

Abstract: A fuel cell power generation system including a fuel cell, a fuel generator, an oxidizing gas supply device, an output controller, an open-close mechanism, and a controller. The controller is configured such that in a stop process, the controller controls the output controller to stop supplying the electric power to an external load; controls the oxidizing gas supply device to stop supplying an oxidizing gas and controls the open-close mechanism to close a passage upstream from an oxidizing gas channel; after the passage upstream from the oxidizing gas channel is closed, stops a raw material gas supply device and a water supply device when a predetermined period has elapsed, during which period a gas in the oxidizing gas channel is replaced by a fuel gas.

Abstract: To provide a polishing composition which can satisfy both suppression of the surface topography and a high stock removal rate, in a polishing step in the production of a wiring structure. A polishing composition comprising abrasive grains, a processing accelerator, a dishing inhibitor and water. Here, the abrasive grains comprise at least first abrasive grains and second abrasive grains; the ratio of an average primary particle size DL1 of the second abrasive grains to an average primary particle size DS1 of the first abrasive grains, DL1/DS1, is 5>DL1/DS1>1; the degree of association of the first abrasive grains is from 1.8 to 5; and the degree of association of the second abrasive grains is at most 2.5.