Abstract: A substrate processing apparatus that dries a liquid adhering to a substrate by using a processing fluid in a supercritical state, includes: a processing container in which the substrate is accommodated; a plurality of pipes configured to allow the processing fluid to flow to and from the processing container therethrough; a first fluid heating device configured to heat a first pipe that supplies the processing fluid to an interior of the processing container among the plurality of pipes; and a second fluid heating device configured to heat a second pipe that discharges the processing fluid from the interior of the processing container among the plurality of pipes.

Abstract: A coating system includes coating robots configured to coat a vehicle, and an operation robot. The operation robot includes a first arm configured to turn around a first axis; a second arm configured to turn around a second axis parallel to the first axis; a third arm configured to turn around a third axis parallel to the first axis; a fourth arm configured to turn around a fourth axis perpendicular to the first axis; a fifth arm configured to turn around a fifth axis parallel to the fourth axis; and a tip jig is supported at the fifth arm and is configured to turn around a sixth axis. The sixth axis is selectively parallel to the fifth axis or perpendicular to a plane which includes the fourth axis and the fifth axis.

Abstract: A coating system includes coating robots configured to coat a vehicle, and an operation robot. The operation robot includes a first arm configured to turn around a first axis; a second arm configured to turn around a second axis parallel to the first axis; a third arm configured to turn around a third axis parallel to the first axis; a fourth arm configured to turn around a fourth axis perpendicular to the first axis; a fifth arm configured to turn around a fifth axis parallel to the fourth axis; and a tip jig is supported at the fifth arm and is configured to turn around a sixth axis. The sixth axis is selectively parallel to the fifth axis or perpendicular to a plane which includes the fourth axis and the fifth axis.

Abstract: A coating system includes: a plurality of coating robots fixed in a coating booth, the plurality of coating robots being configured to coat a vehicle conveyed in a predetermined conveyance direction; and a fixed-type operation robot fixed in the coating booth on an upstream side or a downstream side of the plurality of coating robots in the conveyance direction, the fixed-type operation robot being configured to operate an open/close member provided at a front or a rear portion of the vehicle, the fixed-type operation robot including a first arm turning around a vertical axis.

Abstract: A microcomputer includes a bus, a CPU (Central Processing Unit) coupled to the bus, a RAM (Random-access Memory) coupled to the bus, and an AD (Analog-to-Digital) converter coupled to the bus. The AD converter includes a switching circuit for switching between an analog signal and a reference potential, a first DA (Digital-to-Analog) converter including a plurality of first capacitors each having one end that can be individually coupled to the switching circuit and the other end coupled to a common output line, one or a plurality of testing capacitors that are dedicated for testing, each having one end to which the reference potential or a potential obtained by dividing the reference potential can be individually inputted, and a control circuit. In a normal mode, the control circuit determines a digital value corresponding to the analog signal, based on the output line.

Abstract: To determine the accuracy of an AD converter more simply than in the related art, a semiconductor device includes a successive approximation AD converter. The AD converter includes one or a plurality of testing capacitors used in a test mode, separately from a C-DAC used for AD conversion in a normal mode. In the test mode, the accuracy of a capacitor under test among a plurality of capacitors configuring the C-DAC is determined by comparing a potential occurring in the capacitor under test and a potential occurring in the testing capacitors.

Abstract: To determine the accuracy of an AD converter more simply than in the related art, a semiconductor device includes a successive approximation AD converter. The AD converter includes one or a plurality of testing capacitors used in a test mode, separately from a C-DAC used for AD conversion in a normal mode. In the test mode, the accuracy of a capacitor under test among a plurality of capacitors configuring the C-DAC is determined by comparing a potential occurring in the capacitor under test and a potential occurring in the testing capacitors.

Abstract: A robot according to an aspect of an embodiment includes: an articulated arm; and a speed reducer that is provided in a joint of the articulated arm. The articulated arm performs a multi-axis operation. The speed reducer has rigidity for which an acquisition value obtained by acquiring a deflection amount of a predetermined representative position at the articulated arm for each dimension of a three-dimensional coordinate system is not more than a threshold corresponding to a target precision of the articulated arm.