Abstract: A technique is provided herein whereby the size of piezoelectric filters can be reduced. A piezoelectric filter according to one aspect of the present disclosure has: a first substrate having a first main surface; a second substrate having a second main surface facing the first main surface; and a ladder circuit of Nth order, including N piezoelectric resonators, N being an integer of 3 or greater. In this piezoelectric filter, the first-order to Mth-order piezoelectric resonators included in the ladder circuit are formed on the first main surface, M being an integer from 1 to N?1, inclusive, and the (M+1)th-order to Nth-order piezoelectric resonators included in the ladder circuit are formed on the second main surface.

Abstract: The present invention is to provide an optical scanner module. An optical scanner apparatus scans laser light by oscillating a mirror with a piezoelectric element. A package that mounts the optical scanner apparatus and electrically is connected to a substrate via a connector. A package cover that is fixed to the package and seals the optical scanner apparatus so that the optical scanner apparatus is not visually recognized from an outside. The package and the package cover are bonded by a heat curing adhesive agent. A vent for releasing gas in a space where the optical scanner apparatus is sealed is formed in the package cover, and the vent is blocked by ultraviolet curing resin.

Abstract: An optical scanning device includes: a pair of twist beams arranged on both sides of a mirror along a predetermined axis and configured to swing the mirror around the axis; a pair of connection beams connected to the respective twist beams; a piezoelectric sensor formed on the connection beams and configured to detect a displacement of the connection beams caused by a swing of the mirror around the axis; wherein the piezoelectric sensor includes a lower electrode; a piezoelectric thin film stacked on the lower electrode; and an upper electrode stacked on or above the piezoelectric thin film, wherein a bottom surface and a side surface of the piezoelectric thin film form a tilt angle ?, and wherein the tilt angle is greater than 0° and less than or equal to 50°.

Abstract: An actuator includes a torsion beam configured to support a target object, a first drive beam having a first drive source, and a connection beam configured to connect the torsion beam with the first drive beam, and a frame body configured to fix the first drive beam, wherein the actuator applies force of rotating the torsion beam in a direction around a first axis by a resonant drive of the first drive beam so as to cause the target object to swing, and when a structural non-linear constant of the actuator is ? [Nm/rad3] and a spring constant of the actuator is k [Nm/rad], [Equation 1] is satisfied: [Equation 1] ?=0.05×k?A×106??(1), where 3.5?A?15.5.

Abstract: The present invention is to provide an optical scanner module. An optical scanner apparatus scans laser light by oscillating a mirror with a piezoelectric element. A package that mounts the optical scanner apparatus and electrically is connected to a substrate via a connector. A package cover that is fixed to the package and seals the optical scanner apparatus so that the optical scanner apparatus is not visually recognized from an outside. The package and the package cover are bonded by a heat curing adhesive agent. A vent for releasing gas in a space where the optical scanner apparatus is sealed is formed in the package cover, and the vent is blocked by ultraviolet curing resin.

Abstract: The present invention is to provide an optical scanner module capable of reducing cross-talk generated between a sensor interconnect and a drive interconnect.

Abstract: An actuator includes a torsion beam configured to support a target object, a first drive beam having a first drive source, and a connection beam configured to connect the torsion beam with the first drive beam, and a frame body configured to fix the first drive beam, wherein the actuator applies force of rotating the torsion beam in a direction around a first axis by a resonant drive of the first drive beam so as to cause the target object to swing, and when a structural non-linear constant of the actuator is ? [Nm/rad3] and a spring constant of the actuator is k [Nm/rad], [Equation 1] is satisfied: [Equation 1] ?=0.05×k?A×106??(1), where 3.5?A?15.5.

Abstract: An optical scanning device includes: a pair of twist beams arranged on both sides of a mirror along a predetermined axis and configured to swing the mirror around the axis; a pair of connection beams connected to the respective twist beams; a piezoelectric sensor formed on the connection beams and configured to detect a displacement of the connection beams caused by a swing of the mirror around the axis; wherein the piezoelectric sensor includes a lower electrode; a piezoelectric thin film stacked on the lower electrode; and an upper electrode stacked on or above the piezoelectric thin film, wherein a bottom surface and a side surface of the piezoelectric thin film form a tilt angle ?, and wherein the tilt angle is greater than 0° and less than or equal to 50°.

Abstract: The present invention is to provide an optical scanner module capable of reducing cross-talk generated between a sensor interconnect and a drive interconnect.