Abstract: A cryopump includes an accommodation space for a condensed layer of gas, a first-stage cryopanel having an inner surface of the first-stage cryopanel disposed so as to surround the accommodation space, and a second-stage cryopanel disposed so as to be surrounded by the inner surface of the first-stage cryopanel together with the accommodation space. A first-stage heat load is incident on the inner surface of the first-stage cryopanel from outside the cryopump through an intake port, and the gas enters the accommodation space from outside the cryopump. The first-stage cryopanel is cooled to a temperature higher than a condensation temperature of the gas, the second-stage cryopanel is cooled to a temperature of the condensation temperature or less, and the condensed layer is deposited. The cryopump monitors the amount of condensed gas in the accommodation space based on a change in the first-stage heat load.

Abstract: A cryopump includes a cryopanel disposed in a cryopump housing and including a non-combustible adsorbent, a heater heating the non-combustible adsorbent and the cryopanel, a purge valve connecting the cryopump housing to a purge gas source, a rough valve connecting the cryopump housing to a rough pump, a sensor that generates a measurement signal indicating a temperature of the non-combustible adsorbent or an internal pressure of the cryopump housing, and a controller that controls at least one of the heater, the purge valve, and the rough valve based on the measurement signal so as to execute either a sublimation regeneration sequence for sublimating water from the non-combustible adsorbent by exposing the non-combustible adsorbent to a vacuum atmosphere or a dehydration sequence for dehydrating the non-combustible adsorbent by exposing the non-combustible adsorbent to a dry atmosphere at room temperature or a temperature higher than the room temperature.

Abstract: There is provided a cryopump including a cryocooler, a cryopanel that is cooled by the cryocooler, a cryopump container that includes a container body, which accommodates the cryopanel, and a cryocooler accommodating tube of which one end is coupled to the container body and the other end is fixed to the cryocooler and into which the cryocooler is inserted, a vent valve for exhausting a fluid from the cryopump container, a first exhaust passage that includes a first exhaust port provided in the container body, is disposed outside the cryopump container, and connects the first exhaust port to the vent valve, and a second exhaust passage that includes a second exhaust port provided in the cryocooler accommodating tube, connects the second exhaust port to the vent valve, and merges with the first exhaust passage between the first exhaust port and the vent valve.

Abstract: A cryopump includes a cryopanel disposed in a cryopump housing and including a non-combustible adsorbent, a heater heating the non-combustible adsorbent and the cryopanel, a purge valve connecting the cryopump housing to a purge gas source, a rough valve connecting the cryopump housing to a rough pump, a sensor that generates a measurement signal indicating a temperature of the non-combustible adsorbent or an internal pressure of the cryopump housing, and a controller that controls at least one of the heater, the purge valve, and the rough valve based on the measurement signal so as to execute either a sublimation regeneration sequence for sublimating water from the non-combustible adsorbent by exposing the non-combustible adsorbent to a vacuum atmosphere or a dehydration sequence for dehydrating the non-combustible adsorbent by exposing the non-combustible adsorbent to a dry atmosphere at room temperature or a temperature higher than the room temperature.

Abstract: There is provided a cryopump including a cryocooler, a cryopanel that is cooled by the cryocooler, a cryopump container that includes a container body, which accommodates the cryopanel, and a cryocooler accommodating tube of which one end is coupled to the container body and the other end is fixed to the cryocooler and into which the cryocooler is inserted, a vent valve for exhausting a fluid from the cryopump container, a first exhaust passage that includes a first exhaust port provided in the container body, is disposed outside the cryopump container, and connects the first exhaust port to the vent valve, and a second exhaust passage that includes a second exhaust port provided in the cryocooler accommodating tube, connects the second exhaust port to the vent valve, and merges with the first exhaust passage between the first exhaust port and the vent valve.

Abstract: A cryopump includes an accommodation space for a condensed layer of gas, a first-stage cryopanel having an inner surface of the first-stage cryopanel disposed so as to surround the accommodation space, and a second-stage cryopanel disposed so as to be surrounded by the inner surface of the first-stage cryopanel together with the accommodation space. A first-stage heat load is incident on the inner surface of the first-stage cryopanel from outside the cryopump through an intake port, and the gas enters the accommodation space from outside the cryopump. The first-stage cryopanel is cooled to a temperature higher than a condensation temperature of the gas, the second-stage cryopanel is cooled to a temperature of the condensation temperature or less, and the condensed layer is deposited. The cryopump monitors the amount of condensed gas in the accommodation space based on a change in the first-stage heat load.

Abstract: A cryopump includes a cryopump housing and a water absorbing layer mounted on an outer side of the cryopump housing.

Abstract: A cryopump system includes a cryopump, and a regeneration control unit that controls the cryopump according to a regeneration sequence including a discharge process of rough pumping the cryopump to discharge condensate from it. The regeneration control unit includes a pressure drop rate computation unit that computes a pressure drop rate for the cryopump during the rough pumping of the cryopump, and a pressure drop rate monitoring unit that detects diminishment in the pressure drop rate during the rough pumping.

Abstract: A cold trap includes a cold panel, a cryocooler which cools the cold panel, a stage temperature control unit which determines a control input to the cryocooler to cool a cooling stage of the cryocooler to a target temperature, an input heat estimation unit which estimates an increase of input heat into the cold panel based on the control input to the cryocooler determined by the stage temperature control unit, and a target temperature adjustment unit which adjusts a target temperature based on the increase of the input heat estimated by the input heat estimation unit.

Abstract: A cold trap is provided between a vacuum chamber and a vacuum pump. The cold trap includes a cold panel and a cold panel chamber that surrounds the cold panel in an exhaust passage. The cold panel includes an expansion panel outside the cold panel chamber. The expansion panel is located in the vacuum chamber.

Abstract: In a cold trap provided between a vacuum chamber and a vacuum pump for the vacuum chamber, a cold panel is located in an exhaust passage from an exhaust port of the vacuum chamber to an intake port of the vacuum pump. A cold panel chamber includes an entrance that connects the exhaust passage to the exhaust port of the vacuum chamber, and an exit that connects the exhaust passage to the intake port of the vacuum pump. The exit is provided so as to be eccentric with respect to the entrance.

Abstract: A cryopump includes: a radiation shield that includes a shield front end that defines a shield opening, a shield bottom portion, and a shield side portion that extends between the shield front end and the shield bottom portion; and a cryopanel assembly that is cooled to a lower temperature than that of the radiation shield. The cryopanel assembly includes a first panel arrangement including a plurality of first adsorption panels and a plurality of second panel arrangements each including a plurality of second adsorption panels. The first panel arrangement forms a multitude of adsorption sections arranged in a lattice-shaped pattern in cooperation with the plurality of second panel arrangements, each of the adsorption sections being exposed to the shield side portion.

Abstract: A cryopump includes a gas flow regulation member which deflects a flow of gas, which flows in from a shield main opening, from a cryocooler structural portion. The gas flow regulation member is disposed to be adjacent to the cryocooler structural portion such that the gas flow regulation member is in contact with neither a second cooling stage nor a second cryopanel unit of a cryocooler. The gas flow regulation member may be thermally connected to a first cooling stage of the cryocooler.

Abstract: A cryopump system includes a cryopump, and a regeneration control unit that controls the cryopump according to a regeneration sequence including a discharge process of rough pumping the cryopump to discharge condensate from it. The regeneration control unit includes a pressure drop rate computation unit that computes a pressure drop rate for the cryopump during the rough pumping of the cryopump, and a pressure drop rate monitoring unit that detects diminishment in the pressure drop rate during the rough pumping.

Abstract: A cold trap includes a cold panel, a cryocooler which cools the cold panel, a stage temperature control unit which determines a control input to the cryocooler to cool a cooling stage of the cryocooler to a target temperature, an input heat estimation unit which estimates an increase of input heat into the cold panel based on the control input to the cryocooler determined by the stage temperature control unit, and a target temperature adjustment unit which adjusts a target temperature based on the increase of the input heat estimated by the input heat estimation unit.

Abstract: In a cold trap provided between a vacuum chamber and a vacuum pump for the vacuum chamber, a cold panel is located in an exhaust passage from an exhaust port of the vacuum chamber to an intake port of the vacuum pump. A cold panel chamber includes an entrance that connects the exhaust passage to the exhaust port of the vacuum chamber, and an exit that connects the exhaust passage to the intake port of the vacuum pump. The exit is provided so as to be eccentric with respect to the entrance.

Abstract: A cold trap is provided between a vacuum chamber and a vacuum pump. The cold trap includes a cold panel and a cold panel chamber that surrounds the cold panel in an exhaust passage. The cold panel includes an expansion panel outside the cold panel chamber. The expansion panel is located in the vacuum chamber.

Abstract: A cryopump includes: a radiation shield that includes a shield front end that defines a shield opening, a shield bottom portion, and a shield side portion that extends between the shield front end and the shield bottom portion; and a cryopanel assembly that is cooled to a lower temperature than that of the radiation shield. The cryopanel assembly includes a first panel arrangement including a plurality of first adsorption panels and a plurality of second panel arrangements each including a plurality of second adsorption panels. The first panel arrangement forms a multitude of adsorption sections arranged in a lattice-shaped pattern in cooperation with the plurality of second panel arrangements, each of the adsorption sections being exposed to the shield side portion.