Patents by Inventor Takahisa FUJIMAKI

Takahisa FUJIMAKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Target supply device and extreme ultraviolet light generating device
    Patent number: 10225917
    Abstract: A target supply device may include a nozzle configured to output a liquid target substance contained in a tank, an excitation element, a droplet detection unit configured to detect a droplet output from the nozzle, a passage time interval measurement unit configured to measure a passage time interval of droplets, and a control unit. The control unit may be configured to set a proper range of the passage time interval, change the duty value of the electric signal to be input to the excitation element, store the passage time interval measurement values of the droplets generated with respect to a plurality of duty values and variation thereof in association with the duty values, and determine an operation duty value based on the variation from among the duty values with which the passage time interval measurement values are within the proper range, among the duty values.
    Type: Grant
    Filed: June 6, 2018
    Date of Patent: March 5, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Takahisa Fujimaki, Takayuki Yabu, Yuta Takashima, Fumio Iwamoto, Yutaka Shiraishi
  • TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
    Publication number: 20180288863
    Abstract: A target supply device may include a nozzle configured to output a liquid target substance contained in a tank, an excitation element, a droplet detection unit configured to detect a droplet output from the nozzle, a passage time interval measurement unit configured to measure a passage time interval of droplets, and a control unit. The control unit may be configured to set a proper range of the passage time interval, change the duty value of the electric signal to be input to the excitation element, store the passage time interval measurement values of the droplets generated with respect to a plurality of duty values and variation thereof in association with the duty values, and determine an operation duty value based on the variation from among the duty values with which the passage time interval measurement values are within the proper range, among the duty values.
    Type: Application
    Filed: June 6, 2018
    Publication date: October 4, 2018
    Applicant: GIGAPHOTON INC.
    Inventors: Takahisa FUJIMAKI, Takayuki YABU, Yuta TAKASHIMA, Fumio IWAMOTO, Yutaka SHIRAISHI
  • LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    Publication number: 20150351208
    Abstract: There may be included: a master oscillator configured to output pulsed laser light; a power amplifier disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and a wavelength filter disposed between the master oscillator and the power amplifier in the optical path of the pulsed laser light, and configured to allow the pulsed laser light to pass therethrough and suppress transmission of light with a wavelength other than a wavelength of the pulsed laser light.
    Type: Application
    Filed: June 11, 2015
    Publication date: December 3, 2015
    Applicant: c/o GIGAPHOTON INC.
    Inventors: Takashi SUGANUMA, Toru SUZUKI, Takahisa FUJIMAKI, Yoshiaki KUROSAWA