Abstract: An image measurement apparatus, which functions as a non-contact profile-measuring device, includes: an image sensor as an image pick-up device; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from a workpiece to the image sensor; and a controller (image-pickup lens controller and image measurement processor) configured to control the variable focal length lens and process a detected image by the image sensor. The image measurement apparatus, which also functions as a non-contact displacement-detecting device, includes: an image sensor; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from the workpiece to the image sensor; and a controller (displacement-detection lens controller and profile measurement processor) configured to control the variable focal length lens and a detected image by the image sensor.

Abstract: A variable focal length lens device includes: a lens system whose refractive index changes depending on an inputted drive signal; an objective lens disposed in an optical axis common to the lens system; an image detector for detecting an image of a target object through the lens system and the objective lens; a resonance-lock controller for locking the frequency of the drive signal to a resonance frequency of the lens system; and a resonance-lock operation unit for switching enabling and suspending the resonance-lock controller.

Abstract: An image measurement apparatus, which functions as a non-contact profile-measuring device, includes: an image sensor as an image pick-up device; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from a workpiece to the image sensor; and a controller (image-pickup lens controller and image measurement processor) configured to control the variable focal length lens and process a detected image by the image sensor. The image measurement apparatus, which also functions as a non-contact displacement-detecting device, includes: an image sensor; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from the workpiece to the image sensor; and a controller (displacement-detection lens controller and profile measurement processor) configured to control the variable focal length lens and a detected image by the image sensor.

Abstract: An imaging system includes: an image forming device that obtains image information of an object with the focal length to the object being changed by a variable focal length lens in an optical system, so as to form an all-focused image of the object; a sensor device that detects variations in the surface level of the object in a focus direction; and a position adjustment device that adjusts the position of the object in the focus direction in accordance with the surface level variations of the object detected by the sensor device. The position adjustment device adjusts the position of the object in the focus direction in such a manner that the surface level of the object becomes closer to the center of a variable focal length range of the variable focal length lens.

Abstract: A variable focal length lens device includes: a lens system whose refractive index changes depending on an inputted drive signal; an objective lens disposed in an optical axis common to the lens system; an image detector for detecting an image of a target object through the lens system and the objective lens; a resonance-lock controller for locking the frequency of the drive signal to a resonance frequency of the lens system; and a resonance-lock operation unit for switching enabling and suspending the resonance-lock controller.

Abstract: An imaging system includes: an image forming device that obtains image information of an object with the focal length to the object being changed by a variable focal length lens in an optical system, so as to form an all-focused image of the object; a sensor device that detects variations in the surface level of the object in a focus direction; and a position adjustment device that adjusts the position of the object in the focus direction in accordance with the surface level variations of the object detected by the sensor device. The position adjustment device adjusts the position of the object in the focus direction in such a manner that the surface level of the object becomes closer to the center of a variable focal length range of the variable focal length lens.