Patents by Inventor Takamasa Horie

Takamasa Horie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Film forming apparatus and film forming method using the same
    Patent number: 11414746
    Abstract: A film forming apparatus includes a base material support mechanism configured to rotate a base material supported by the base material support mechanism about a first axis, and a first cathode portion on which a target in a cylindrical shape containing a film forming material is mounted and configured to rotate the target about a second axis, in a chamber. The second axis is disposed at a position skewed with respect to the first axis.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: August 16, 2022
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Kazuya Demura, Takamasa Horie, Hiroyuki Kobayashi
  • FILM FORMING APPARATUS AND FILM FORMING METHOD USING THE SAME
    Publication number: 20200002806
    Abstract: A film forming apparatus includes a base material support mechanism configured to rotate a base material supported by the base material support mechanism about a first axis, and a first cathode portion on which a target in a cylindrical shape containing a film forming material is mounted and configured to rotate the target about a second axis, in a chamber. The second axis is disposed at a position skewed with respect to the first axis.
    Type: Application
    Filed: June 26, 2019
    Publication date: January 2, 2020
    Inventors: Kazuya Demura, Takamasa Horie, Hiroyuki Kobayashi