Abstract: An information processing apparatus includes: an information acquisition part, acquiring recipe information indicating processing content of polishing processing and finishing processing, and transfer time information indicating a transfer time required for each transfer processing; and a schedule creation part, based on the recipe information and the transfer time information, creating a substrate processing schedule by determining a start timing of each processing so that a final processing end time during which a final substrate after the finishing processing is carried out to a substrate carry-out position is shortest.

Abstract: A device includes: state information acquisition unit that acquires state information including position of substrate in the device and elapsed time in each unit; action selection unit having prediction model that predicts value, in a certain state, to performing action whether to take out new substrate from the cassette and to which processing unit substrate is transferred, the action selection unit selecting one action based on the prediction model taking, as input, the acquired state information; instruction signal transmission unit that transmits instruction signal so as to perform the selected action; operation result acquisition unit that acquires operation result including number of substrates processed and waiting time; and prediction model update unit that calculates reward based on acquired operation result such that reward increases as the number of substrates processed increases and waiting time is short and that updates the prediction model based on the reward.

Abstract: A polishing head system capable of precisely controlling a film-thickness profile of a workpiece, such as a wafer, substrate, or panel, is disclosed. The polishing head system includes a polishing head having a plurality of piezoelectric elements configured to apply pressing forces to a workpiece, and an operation controller configured to determine instruction values of voltages to be applied to the plurality of piezoelectric elements.

Abstract: A non-transitory computer-readable storage medium storing a program of screen control capable of improving the user-friendliness with respect to a semiconductor manufacturing apparatus is disclosed. The program of screen control causes a computer to perform operation of: judging whether or not a vertical screen resolution of a display screen is larger than a horizontal screen resolution of the display screen; and dividing a display area of the display screen into a main screen display area for displaying a monitoring image with respect to an operational status of a processing unit and a work area for displaying an operation image with respect to an operation of the processing unit when the vertical screen resolution is larger than the horizontal screen resolution.

Abstract: A non-transitory computer-readable storage medium storing a program of screen control capable of improving the user-friendliness with respect to a semiconductor manufacturing apparatus is disclosed. The program of screen control causes a computer to perform operation of: judging whether or not a vertical screen resolution of a display screen is larger than a horizontal screen resolution of the display screen; and dividing a display area of the display screen into a main screen display area for displaying a monitoring image with respect to an operational status of a processing unit and a work area for displaying an operation image with respect to an operation of the processing unit when the vertical screen resolution is larger than the horizontal screen resolution.

Abstract: There is disclosed a power conversion apparatus 3 for converting polyphase ac power directly to ac power. A conversion circuit includes first switching devices 311, 313, 315 and second switching devices 312, 314, 316 connected, respectively, with the phases R, S, T of the polyphase ac power, and configured to enable electrical switching operation in both directions. There are provided input lines R, S, T connected with input terminals of the switching devices and output lines P, N connected with output terminals of the switching devices. The output terminals of the first switching devices and the output terminals of the second switching devices are, respectively, arranged in a row. The first switching devices and second switching devices are arranged side by side with respect to a direction of the rows. The output lines are disposed below the input lines in an up and down direction.

Abstract: An adjustment apparatus capable of adjusting various types of processing units of a substrate processing apparatus within a shorter period of time is disclosed. The adjustment apparatus includes a main operation device configured to manipulate the processing units and adjust the designated operations, terminal operation devices configured to manipulate the processing units and adjust the designated operations, a network that connects the processing units and the main operation device to each other; and connecting devices configured to connect the terminal operation devices to the network and disconnect the terminal operation devices from the network. Each of the terminal operation devices is configured to be able to manipulate at least one of the processing units.

Abstract: A power conversion apparatus is for converting polyphase ac power directly to ac power. A conversion circuit includes a plurality of first switching devices 311, 313, 315 and a plurality of second switching devices 312, 314, 316 connected, respectively, with the phases R, S, T of the polyphase ac power, and configured to enable electrical switching operation in both directions. There are provided a plurality of condensers 821˜826 connected with the conversion circuit. At least one of the condensers is provided, for each of the first switching devices and the second switching devices, between two of the phases of the polyphase ac power. It is possible to reduce a wiring distance between the condenser and the switching devices.

Abstract: Provided is a power converter 3 that directly converts polyphase AC power to AC power. A converter circuit has a plurality of first switching elements 311, 313 and 315 that are connected to each phase R, S or T of the polyphase AC power to enable switching for turning on current-carrying bidirectionally, and a plurality of second switching elements 312, 314 and 316 that are connected to each phase to enable switching for turning on current-carrying bidirectionally. The converter circuit comprises input lines R, S and T connected to each input terminal, and output lines P and N connected to each output terminal. Parts of wiring 347 and 348 of protection circuits 32 are located between output lines P and N. The wiring distance between each protection circuit 32 and the corresponding switching element can be shortened.

Abstract: Provided is a power converter 3 that directly converts polyphase AC power to AC power. A converter circuit has a plurality of switching elements 311, 313, 315, 312, 314 and 316 which are connected to each phase R, S or T of the polyphase AC power to enable switching for turning on current-carrying bidirectionally. At least three condensers 821 to 826 are provided between phases of the converter circuit. The three condensers are respectively placed at apexes of a triangle on a plane that is in parallel with a part-mounting surface on which the switching elements are actually mounted. The wiring distance between the condensers and the switching elements can be shortened.

Abstract: Provided is a power converter 3 that directly converts polyphase AC power to AC power. A converter circuit has a plurality of first switching elements 311, 313 and 315 and a plurality of second switching elements 312, 314 and 316, both of which are connected to each phase R, S or T of the polyphase AC power to enable switching for turning on current-carrying bidirectionally. Condensers 821 to 826 are provided between phases. Input terminals of the first switching elements and those of the second switching elements are arranged to form respective lines. Some of the plurality of condensers 821 and 822 are arranged to be angled relative to the arrangement direction of the terminals. The wiring distance between the condensers and the switching elements can be shortened.

Abstract: There is disclosed a power conversion apparatus 3 for converting polyphase ac power directly to ac power. A conversion circuit includes a plurality of first switching devices 311, 313, 315 and a plurality of second switching devices 312, 314, 316 connected, respectively, with the phases R, S, T of the polyphase ac power, and configured to enable electrical switching operation in both directions. Output lines 331, 332 formed by a pair of busbars are connected with the conversion circuit. The first switching devices and the second switching devices are so arranged that output terminals are arranged in a row. The output lines 331, 332 are connected with the output terminals and drawn out rectilinearly in one direction.

Abstract: A power converter is provided for direct conversion of multi-phase AC power to AC power. The power converter includes a conversion circuit and a plurality of output lines. The conversion circuit has first and second switching elements that are configured to be connected to phases of the multi-phase AC power for bidirectional switching of energizing current. The output lines are connected to the conversion circuit. The first and second switching elements have output terminals. The output terminals of the first and second switching elements are arranged in first and second rows. The output terminals of the first and second switching elements face each other. The first output lines include two first output lines including first and second widely shaped bus bars connected to the output terminals of the first and second switching elements, respectively. The first output lines extending out in one direction, and line up in an upright direction.

Abstract: A power converter is provided for direct conversion of multi-phase AC power to AC power. The power converter includes a conversion circuit, a plurality of input lines and a plurality of capacitors. The conversion circuit has first and second switching elements that are configured to be connected to the phases of the multi-phase AC power for bidirectional switching of energizing current. The input lines are connected to the conversion circuit. The capacitors are connected to the conversion circuit. The first and second switching elements are arranged such that paired input terminals line up in a row with the paired input terminals to an outside, and paired output terminals to an inside. The input lines extend in a direction in which the paired input terminals line up, and extend from one of the input terminals to another of the input terminals.

Abstract: An electric power conversion device comprises a conversion circuit having bi-directionally switchable plural pairs of switching elements connected to respective phases and converting an inputted AC power into an AC electric power. A first switching time is calculated using detected voltages detected by voltage sensors and an output command value. A second switching time is calculated using a carrier and the first switching time. A control signal generating section generates control signals to switch on and off of the switching elements using the first switching time and second switching time. In a case where a state is transited from the first switching time to the second switching time, a controller turns off one of on a state switching elements of either one of an upper arm circuit or a lower arm circuit and maintains on state of the other of the on state switching elements of the other arm circuit.

Abstract: An electric power conversion device comprises a conversion circuit having bi-directionally switchable plural pairs of switching elements connected to respective phases and converting an inputted AC power into an AC electric power. A first switching time is calculated using detected voltages detected by voltage sensors and an output command value. A second switching time is calculated using a carrier and the calculated first switching time. The second switching time is such that, in one period of the alternating current electric power outputted from the conversion circuit, the second switching time included in a first half period of the one period is equal to the second switching time included in a second half period of the one period.

Abstract: An electric power conversion device comprises a conversion circuit having bi-directionally switchable plural pairs of switching elements connected to respective phases and converting an inputted AC power into an AC electric power. A first switching time is calculated using detected voltages detected by voltage sensors and an output command value. A second switching time is calculated in a form of a time which is a subtraction of the first switching time from a half period of a carrier and, using this time, control signals to switch on and off of the switching elements are generated.