Patents by Inventor Takamasa Yoshikawa

Takamasa Yoshikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Facing targets sputtering device
    Patent number: 5000834
    Abstract: A Facing Targets Sputtering device for making a thin film comprises: a pair of targets with magnets placed at opposite positions within a container so as to face each other so as to maintain a space for a plasma region; and first and second power sources respectively connected to the both targets and being controllable independently from each other, so that electric energies supplied to the targets can be independently controlled. Therefore, the composition of the thin film can be readily selected and controlled even during operation.
    Type: Grant
    Filed: September 8, 1989
    Date of Patent: March 19, 1991
    Assignee: Pioneer Electronic Corporation
    Inventor: Takamasa Yoshikawa