Patents by Inventor Takamichi NAKAYAMA

Takamichi NAKAYAMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thin Film Deposited Substrate and Deposition System for Such Thin Film
    Publication number: 20080197016
    Abstract: The present invention aims to provide a ZnO thin film deposited substrate and a thin film deposition system exhibiting a specific resistance sufficiently reduced to be useful for transparent electrodes of a liquid crystal display, characterized in that Zn material evaporated and oxidized by microwave oxygen plasma to the compound ZnO which is, in turn, deposited on the substrate and thereby the thin film is formed, and the ZnO thin film deposited on the substrate is exposed to microwave hydrogen plasma so as to reduce a specific resistance of the ZnO thin film and thereby to modify this ZnO thin film to electrically conductive thin film.
    Type: Application
    Filed: February 20, 2007
    Publication date: August 21, 2008
    Applicant: MIKURO DENSHI CORPORATION LIMITED
    Inventors: Tsutomu TAKIZAWA, Takamichi NAKAYAMA, Kunihiro KASHIWAGI, Yuichi SAKAMOTO