Abstract: A rail guided vehicle provided with a lateral pair of adjustable rollers in height is allowed to travel along travelling rails provided with a lateral pair of guide parts having long and short two vertically protruding lengths. Positions of the adjustable rollers in height may be changed such that both rollers are in an intermediate position or one is in an advanced position and the other is in a retracted position. One travelling rail branches into a first branching side and a branching/merging side, and the branching/merging side merges with a straight-travelling side of another travelling rail. When the rail guided vehicle travels on the one travelling rail toward the first branching side and travels straight on the other travelling rail, the height adjustable roller on the side opposite the branching/merging side takes the advanced position, and when travels on the branching/merging side, the rollers take the intermediate position.

Abstract: An overhead conveying vehicle is arranged to contain and convey a suspended FOUP including a lid that is removably provided on a side surface thereof. The overhead conveying vehicle includes a conveying vehicle body, a hoist mechanism, a lid drop preventing member, and a power transmitting mechanism. The hoist mechanism is provided at the conveying vehicle body and is arranged to raise and lower the FOUP. The lid drop preventing member is arranged in close proximity to a front surface of the lid. The power transmitting mechanism retracts the lid drop preventing member away from the front surface of the lid when the FOUP is being raised or lowered.

Abstract: A rail guided vehicle provided with a lateral pair of adjustable rollers in height is allowed to travel along travelling rails provided with a lateral pair of guide parts having long and short two vertically protruding lengths. Positions of the adjustable rollers in height may be changed such that both rollers are in an intermediate position or one is in an advanced position and the other is in a retracted position. One travelling rail branches into a first branching side and a branching/merging side, and the branching/merging side merges with a straight-travelling side of another travelling rail. When the rail guided vehicle travels on the one travelling rail toward the first branching side and travels straight on the other travelling rail, the height adjustable roller on the side opposite the branching/merging side takes the advanced position, and when travels on the branching/merging side, the rollers take the intermediate position.

Abstract: A pod opener is an apparatus for purging the inside of a reticle pod having a pod cover and an openable bottom lid by supplying and discharging a clean gas to and from the inside of the reticle pod. The pod opener includes a stage, an elevator driving mechanism, a latch mechanism, and a supplying-discharging section. The stage can attach and remove the bottom lid to and from the pod cover. The elevator driving mechanism can move the stage. The latch mechanism serves to move a latch member that locks the bottom lid to the pod cover such that it cannot be detached and to release the locked state of the bottom lid. The supplying-discharging section starts purging before the latch member has completed an operation of locking the bottom lid to the pod cover.

Abstract: An inner wall surrounding an inner space for vertically circulating a rack, and an outer wall surrounding the inner wall are provided. Then, a rack is disposed in the inner space. A pair of extensions are provided at diagonal positions of the rack. The extensions are attached to an endless drive member in a manner that the extensions protrude toward an outer space between the inner wall and the outer wall through slits of the inner wall, and, a drive mechanism for a drive member is provided in the outer space. Further, a tunnel passing through the outer space to connect the inner space and an area outside of the vertical carousel is provided for transportation of an article into, and out of the tunnel.

Abstract: A moving unit, an elevation device, or the like is prevented from laterally projecting from an overhead travelling vehicle and interfering with a stationary device or an overhead travelling vehicle in the neighborhood thereof. Projection from an overhead travelling vehicle is prevented, the vehicle including a travelling unit, an elevation device lifting and lowering articles, and a lateral movement mechanism including a base member supported by the travelling unit and a moving unit laterally moving while supporting the elevation device. The moving unit is moved between a state in which it laterally protrudes from the travelling unit and a state in which it is retracted to a position under the travelling unit. The moving unit or the elevation device is engaged with the base member or the travelling unit in the state in which the moving unit is retracted to the position under the travelling unit.

Abstract: A pod opener is an apparatus for purging the inside of a reticle pod having a pod cover and an openable bottom lid by supplying and discharging a clean gas to and from the inside of the reticle pod. The pod opener includes a stage, an elevator driving mechanism, a latch mechanism, and a supplying-discharging section. The stage can attach and remove the bottom lid to and from the pod cover. The elevator driving mechanism can move the stage. The latch mechanism serves to move a latch member that locks the bottom lid to the pod cover such that it cannot be detached and to release the locked state of the bottom lid. The supplying-discharging section starts purging before the latch member has completed an operation of locking the bottom lid to the pod cover.

Abstract: Support columns are mounted at both front and rear ends of a stacker crane 4 to form a mast having a gate shape. An elevation frame having the size which is twice as large as a front space of a rack is provided at the mast, and a base of a slide fork is moved back and forth in a travel direction relative to the elevation frame. An elevation motor for the elevation frame and front and rear travel motors are provided under the mast.

Abstract: An overhead conveying vehicle is arranged to contain and convey a suspended FOUP including a lid that is removably provided on a side surface thereof. The overhead conveying vehicle includes a conveying vehicle body, a hoist mechanism, a lid drop preventing member, and a power transmitting mechanism. The hoist mechanism is provided at the conveying vehicle body and is arranged to raise and lower the FOUP. The lid drop preventing member is arranged in close proximity to a front surface of the lid. The power transmitting mechanism retracts the lid drop preventing member away from the front surface of the lid when the FOUP is being raised or lowered.

Abstract: A pair of carousels is provided in an automated storage and retrieval system. A mast, a pair of elevation frames, and a pair of scara arms are provided between the carousels. One of the scara arms includes a plurality of arms stacked from lower to upper arms such that a hand of the scara arm takes a high position. The other of the scara arms includes a plurality of arms stacked from upper to lower arms such that a hand of the scara arm takes a low position.

Abstract: A safety frame is provided to face a lid at a position where an article is held by an overhead traveling vehicle. A lower frame of the safety frame is movable upwardly relative to an upper frame of the safety frame. Further, an optical axis of a photoelectric sensor is provided between the lower frame and the upper frame.

Abstract: An inner wall surrounding an inner space for vertically circulating a rack, and an outer wall surrounding the inner wall are provided. Then, a rack is disposed in the inner space. A pair of extensions are provided at diagonal positions of the rack. The extensions are attached to an endless drive member in a manner that the extensions protrude toward an outer space between the inner wall and the outer wall through slits of the inner wall, and, a drive mechanism for a drive member is provided in the outer space. Further, a tunnel passing through the outer space to connect the inner space and an area outside of the vertical carousel is provided for transportation of an article into, and out of the tunnel.

Abstract: A pair of carousels are provided in an automated storage and retrieval system. A mast, a pair of elevation frame, and a pair of scara arms are provided between the carousels. One of the scara arms includes a plurality of arms stacked from lower to upper arms such that a hand of the scara arm takes a high position. The other of the scara arms includes a plurality of arms stacked from upper to lower arms such that a hand of the scara arm takes a low position.

Abstract: A safety frame is provided to face a lid at a position where an article is held by an overhead traveling vehicle. A lower frame of the safety frame is movable upwardly relative to an upper frame of the safety frame. Further, an optical axis of a photoelectric sensor is provided between the lower frame and the upper frame.

Abstract: Support columns are mounted at both front and rear ends of a stacker crane 4 to form a mast having a gate shape. An elevation frame having the size which is twice as large as a front space of a rack is provided at the mast, and a base of a slide fork is moved back and forth in a travel direction relative to the elevation frame. An elevation motor for the elevation frame and front and rear travel motors are provided under the mast.

Abstract: Travel rails are provided in upper and lower layers. Buffers accessible by an overhead traveling vehicle from the travel rail in the upper layer and a buffer accessible by the overhead traveling vehicle from the travel rail in the lower layer are provided. Further, an elevation path connecting the travel rails is provided.