Patents by Inventor Takanori KYOGOKU

Takanori KYOGOKU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING SYSTEM, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
    Publication number: 20230099451
    Abstract: There is provided a technique that includes: processing a substrate according to a processing condition of the substrate; collecting atmospheric pressure data in parallel with the processing of the substrate; adjusting the processing condition of the substrate using the collected atmospheric pressure data; and performing control of the substrate processing according to the processing condition.
    Type: Application
    Filed: September 23, 2022
    Publication date: March 30, 2023
    Applicant: Kokusai Electric Corporation
    Inventors: Norihito SHINOZAWA, Osamu UEDA, Takanori KYOGOKU, Kazuhide ASAI