Abstract: In a preliminary measurement, spectrums obtained by detecting characteristic X-rays emitted from preliminary measurement points are transmitted to a spectrum processing unit via a noise filter unit. In a main measurement, a spectrum obtained by detecting characteristic X-rays emitted from a main measurement point is transmitted to the spectrum processing unit by bypassing the noise filter unit. The noise filter unit includes a machine learning type filter constituted of a CNN or the like. In a learning process, teacher data are generated using artificially-generated noise.

Abstract: A mask member is provided at an entrance opening of a mirror unit. Of a first diffraction grating and a second diffraction grating, when the second diffraction grating is used, the mask member masks preceding mirrors. With this process, aberration caused by reflective X-ray is suppressed. When the first diffraction grating is used, the mask member does not function. Alternatively, the mask member and another mask member may be selectively used.

Abstract: Spectrums are measured by irradiating an electron beam on a sample while varying an accelerating potential and by detecting X-rays emitted from the sample. A normalizer unit normalizes the spectrums and thereby calculates normalized spectrums. A difference calculator unit calculates difference spectrums based on the normalized spectrums. A search unit performs a search in a database for each comparison difference spectrum, and identifies compounds contained in the sample.

Abstract: Characteristic X-rays (soft X-rays) from a sample are detected using a spectroscope to thereby generate a plurality of intensity spectrums arranged in order of time sequence. A contour map creation unit creates a contour map by converting, in accordance with a color conversion condition, the plurality of intensity spectrums into a plurality of one-dimensional maps, and arranging the plurality of one-dimensional maps in order of time sequence. When displaying the contour map, a waveform array and a difference contour map may also be displayed. Based on the contour map, a timepoint at which a state change occurs in the sample is determined.

Abstract: There is provided an analytical method capable of generating a high resolution spectrum of X-rays with an intended energy. The analytical method is for use in an analytical apparatus having a diffraction grating for spectrally dispersing X-rays emanating from a sample, an image sensor for detecting the spectrally dispersed X-rays, and an incident angle control mechanism for controlling the incident angle of X-rays impinging on the diffraction grating. The image sensor has a plurality of photosensitive elements arranged in the direction of energy dispersion. The analytical method starts with specifying an energy of X-rays to be acquired. The incident angle is adjusted based on the specified energy to bring the focal plane of the diffraction grating into positional coincidence with those one or ones of the photosensitive elements which detect X-rays having the specified energy.

Abstract: A plurality of records are registered in a database. Each record includes emission information and a peak energy sequence. A fitting unit fits, for each peak energy sequence, a calculated spectrum which is based on the peak energy sequence with respect to an actual spectrum which is acquired from a sample. An analyzer analyzes the sample based on the emission information correlated to the calculated spectrum satisfying a fitting condition.

Abstract: A soft X-ray measurement device detects a characteristic X-ray emitted from a sample including a primary element and a secondary element. An X-ray spectrum generated by a spectrum generator includes a waveform of interest which is an intrinsic waveform of the primary element, caused by transition of electrons from a valence band to an inner shell in the primary element. A secondary element analyzer calculates quantitative information of the secondary element through analysis of the waveform of interest.

Abstract: An analysis device includes a spectroscopic element that diffracts a signal generated by a specimen, a detector that detects the signal diffracted by the spectroscopic element, and a spectrum generation unit that generates a spectrum of the signal based on a detection result by the detector, the detector including detection regions arranged in a plurality of rows and a plurality of columns, a divergent direction of the signal incident on the detector being neither parallel nor perpendicular to a column direction of the detector, and the spectrum generation unit performing: processing for acquiring a plurality of row spectra by generating a row spectrum for each of the plurality of rows based on detection signals relating to the detection regions arranged in a row direction; and processing for generating a spectrum of the signal based on the plurality of row spectra.

Abstract: A mask member is provided at an entrance opening of a mirror unit. Of a first diffraction grating and a second diffraction grating, when the second diffraction grating is used, the mask member masks preceding mirrors. With this process, aberration caused by reflective X-ray is suppressed. When the first diffraction grating is used, the mask member does not function. Alternatively, the mask member and another mask member may be selectively used.

Abstract: In a preliminary measurement, spectrums obtained by detecting characteristic X-rays emitted from preliminary measurement points are transmitted to a spectrum processing unit via a noise filter unit. In a main measurement, a spectrum obtained by detecting characteristic X-rays emitted from a main measurement point is transmitted to the spectrum processing unit by bypassing the noise filter unit. The noise filter unit includes a machine learning type filter constituted of a CNN or the like. In a learning process, teacher data are generated using artificially-generated noise.

Abstract: Spectrums are measured by irradiating an electron beam on a sample while varying an accelerating potential and by detecting X-rays emitted from the sample. A normalizer unit normalizes the spectrums and thereby calculates normalized spectrums. A difference calculator unit calculates difference spectrums based on the normalized spectrums. A search unit performs a search in a database for each comparison difference spectrum, and identifies compounds contained in the sample.

Abstract: Characteristic X-rays (soft X-rays) from a sample are detected using a spectroscope to thereby generate a plurality of intensity spectrums arranged in order of time sequence. A contour map creation unit creates a contour map by converting, in accordance with a color conversion condition, the plurality of intensity spectrums into a plurality of one-dimensional maps, and arranging the plurality of one-dimensional maps in order of time sequence. When displaying the contour map, a waveform array and a difference contour map may also be displayed. Based on the contour map, a timepoint at which a state change occurs in the sample is determined.

Abstract: There is provided an analytical method capable of generating a high resolution spectrum of X-rays with an intended energy. The analytical method is for use in an analytical apparatus having a diffraction grating for spectrally dispersing X-rays emanating from a sample, an image sensor for detecting the spectrally dispersed X-rays, and an incident angle control mechanism for controlling the incident angle of X-rays impinging on the diffraction grating. The image sensor has a plurality of photosensitive elements arranged in the direction of energy dispersion. The analytical method starts with specifying an energy of X-rays to be acquired. The incident angle is adjusted based on the specified energy to bring the focal plane of the diffraction grating into positional coincidence with those one or ones of the photosensitive elements which detect X-rays having the specified energy.

Abstract: A calibration method is executed in an analysis device including a spectroscopic element for diffracting a signal generated from a specimen by irradiating the specimen with a primary beam, and a detector that detects the signal diffracted by the spectroscopic element, the detector having a plurality of detection regions arranged in an energy dispersion direction, and the detector detecting the signal to acquire a spectrum of the signal. The calibration method includes determining energy of the signal detected in each of the plurality of detection regions based on a positional relationship between the specimen and the spectroscopic element and a positional relationship between the spectroscopic element and each of the plurality of detection regions.

Abstract: An analysis device includes a spectroscopic element that diffracts a signal generated by a specimen, a detector that detects the signal diffracted by the spectroscopic element, and a spectrum generation unit that generates a spectrum of the signal based on a detection result by the detector, the detector including detection regions arranged in a plurality of rows and a plurality of columns, a divergent direction of the signal incident on the detector being neither parallel nor perpendicular to a column direction of the detector, and the spectrum generation unit performing: processing for acquiring a plurality of row spectra by generating a row spectrum for each of the plurality of rows based on detection signals relating to the detection regions arranged in a row direction; and processing for generating a spectrum of the signal based on the plurality of row spectra.

Abstract: An X-ray analyzer includes: a detector which detects X-rays generated from a specimen; a cooling element which cools the detector; and a spectrum generating unit which generates a spectrum based on a detection signal of the detector. The spectrum generating unit corrects an attenuation of intensity of a spectrum attributable to contamination of the detector, based on an elapsed time from a reference time until the X-rays are detected.

Abstract: A calibration method is executed in an analysis device including a spectroscopic element for diffracting a signal generated from a specimen by irradiating the specimen with a primary beam, and a detector that detects the signal diffracted by the spectroscopic element, the detector having a plurality of detection regions arranged in an energy dispersion direction, and the detector detecting the signal to acquire a spectrum of the signal. The calibration method includes determining energy of the signal detected in each of the plurality of detection regions based on a positional relationship between the specimen and the spectroscopic element and a positional relationship between the spectroscopic element and each of the plurality of detection regions.

Abstract: An X-ray analyzer includes: a detector which detects X-rays generated from a specimen; a cooling element which cools the detector; and a spectrum generating unit which generates a spectrum based on a detection signal of the detector. The spectrum generating unit corrects an attenuation of intensity of a spectrum attributable to contamination of the detector, based on an elapsed time from a reference time until the X-rays are detected.

Abstract: An X-ray detection system has an electron beam irradiation portion, a diffraction grating, a splitter for distributing the direction of propagation of the diffracted X-rays such that an imaging plane for the diffracted X-rays is assigned to plural positions spaced apart in a direction perpendicular to the direction of energy dispersion of the diffracted X-rays, and image sensors different in energy sensitivity disposed respectively at the positions to which the imaging plane is assigned.

Abstract: An X-ray detection system has an electron beam irradiation portion, a diffraction grating, a splitter for distributing the direction of propagation of the diffracted X-rays such that an imaging plane for the diffracted X-rays is assigned to plural positions spaced apart in a direction perpendicular to the direction of energy dispersion of the diffracted X-rays, and image sensors different in energy sensitivity disposed respectively at the positions to which the imaging plane is assigned.