Abstract: A plasma processing method which can realize a reduction of process variation in the first one of lot processing includes a first step of supplying gas to a processing chamber and a second step of etching the sample by using plasma after the first step. The gas is a gas containing a carbon element and a hydrogen element, a gas containing a chlorine element, or a mixed gas containing all of the gases used in the second step.

Abstract: Provided is a biaxially stretched polypropylene film for capacitors which has high withstand voltage characteristics when used as a dielectric for capacitors and which has highly suitable processability into elements. The biaxially stretched polypropylene film for capacitors has projections on both surfaces and has a thickness (t1, ?m) of 4-20 ?m. When one of the surfaces is expressed by surface A and the other by surface B, all of the following relationships are satisfied. 800?SRzB?1,300 (nm) 0.1?SRzA/SRzB?0.8 PBmin?100 (nm) PBmax?1,500 (nm) 0.4?PB450-750/PB?0.7.

Abstract: A biaxially stretched polypropylene film for capacitors which has protrusions on both sides and has a thickness (t1[?m]) of 1 ?m to 3 ?m, wherein Formulae (1) to (4) are satisfied by an A-side as one film surface and a B-side as another film surface: |Pa?Pb|?200;??(1) 0.350?Pa/SRzA?0.700;??(2) 500 nm?SRzA?1,200 nm;??(3) 50 nm?SRzB?500 nm;??(4) wherein, in Formulae (1) to (4), Pa is a number per 0.1 mm2 of protrusions on the A-side, Pb is a number per 0.1 mm2 of protrusions on the B-side, SRzA is a ten-point average roughness of the A-side, and SRzB is a ten-point average roughness of the B-side.

Abstract: A biaxially stretched polypropylene film includes protrusions on both surfaces, in which the biaxially stretched polypropylene film has a thickness t1 of 1 ?m to 3 ?m, has a tensile strength in the machine direction of 120 MPa to 250 MPa, has a tensile strength in the transverse direction of 250 MPa to 400 MPa, has a minimum protrusion height Pmin of 100 nm or greater and a maximum protrusion height Pmax of 1,600 nm or smaller for either surface, and satisfies all of Formulae (1) to (3) when one of the surfaces is surface A and the other is surface B: 0.5?Pa250-450/Pa?1.0 (1), 0.5?Pb450-1600/Pb?1.0 (2), and 600?Pa+Pb?1,200 (3).

Abstract: A biaxially stretched polypropylene film for capacitors which has protrusions on both sides and has a thickness (t1 [?m]) of 1 ?m to 3 ?m, wherein Formulae (1) to (4) are satisfied by an A-side as one film surface and a B-side as another film surface: |Pa?Pb|?200;??(1) 0.350?Pa/SRzA?0.700;??(2) 500 nm?SRzA?1,200 nm;??(3) 50 nm?SRzB?500 nm;??(4) wherein, in Formulae (1) to (4), Pa is a number per 0.1 mm2 of protrusions on the A-side, Pb is a number per 0.1 mm2 of protrusions on the B-side, SRzA is a ten-point average roughness of the A-side, and SRzB is a ten-point average roughness of the B-side.

Abstract: Provided is a biaxially stretched polypropylene film for capacitors which has high withstand voltage characteristics when used as a dielectric for capacitors and which has highly suitable processability into elements. The biaxially stretched polypropylene film for capacitors has projections on both surfaces and has a thickness (t1, ?m) of 4-20 ?m. When one of the surfaces is expressed by surface A and the other by surface B, all of the following relationships are satisfied. 800?SRzB?1,300 (nm) 0.1?SRzA/SRzB?0.8 PBmin?100 (nm) PBmax?1,500 (nm) 0.4?PB450-750/PB?0.7.

Abstract: A biaxially stretched polypropylene film includes protrusions on both surfaces, in which the biaxially stretched polypropylene film has a thickness t1 of 1 ?m to 3 ?m, has a tensile strength in the machine direction of 120 MPa to 250 MPa, has a tensile strength in the transverse direction of 250 MPa to 400 MPa, has a minimum protrusion height Pmin of 100 nm or greater and a maximum protrusion height Pmax of 1,600 nm or smaller for either surface, and satisfies all of Formulae (1) to (3) when one of the surfaces is surface A and the other is surface B: 0.5 Pa250-450/Pa?1.0 (1), 0.5?Pb450-1600/Pb?1.0 (2), and 600?Pa+Pb?1,200 (3).

Abstract: The downtime of a vacuum processing apparatus due to wet cleaning is reduced. In a vacuum processing apparatus that requires aging for its chamber or process container after vacuum evacuation of the apparatus and before actual processing of a workpiece, when the chamber has been opened to atmosphere for the purpose of wet cleaning or component replacement, the apparatus comprises a high precision absolute pressure gauge for use in processing, a wide range gauge capable of measuring a wide range of pressures, and a controller, wherein the controller uses a pressure trend during vacuum evacuation to determine whether the vacuum evacuation is satisfactory, and starts aging upon determining that the vacuum evacuation is satisfactory even if the actual pressure is not below a prescribed value.

Abstract: The downtime of a vacuum processing apparatus due to wet cleaning is reduced. In a vacuum processing apparatus that requires aging for its chamber or process container after vacuum evacuation of the apparatus and before actual processing of a workpiece, when the chamber has been opened to atmosphere for the purpose of wet cleaning or component replacement, the apparatus comprises a high precision absolute pressure gauge for use in processing, a wide range gauge capable of measuring a wide range of pressures, and a controller, wherein the controller uses a pressure trend during vacuum evacuation to determine whether the vacuum evacuation is satisfactory, and starts aging upon determining that the vacuum evacuation is satisfactory even if the actual pressure is not below a prescribed value.