Abstract: An optical device includes a light receiving unit that receives reflected light reflected from an object by emitted light emitted from a light emitting unit, an optical element that guides incident light including the reflected light and ambient light from a region including the object to a position on the light receiving unit according to a component included in the incident light, and a detection device that detects the reflected light based on a distribution of received light intensity on the light receiving unit. A light receiving element of the light receiving unit is arranged in a second direction intersecting a first direction in which the incident light is dispersed by the optical element.

Abstract: Provided is an optical device capable of suppressing variations in the range for scanning light. This optical device comprises: a light source that emits a laser beam; a MEMS mirror that scans the laser beam toward a predetermined range; and a diffraction grating that guides the laser beam to the MEMS mirror by guiding the laser beam in a direction corresponding to the wavelength thereof. The optical device also comprises an MEMS control unit that performs control such that, by employing a change in the optical path of the laser beam caused through the diffraction grating by a change in the wavelength of the laser beam, variations in the scanning range of the laser beam by the MEMS mirror are suppressed.

Abstract: An optical device comprises: a line sensor having a plurality of light reception elements that receive incident light including reflection light resulting from laser light having been emitted from a light source and reflected by an object, and including ambient light; a diffraction grating that guides the incident light to the plurality of light reception elements by diffracting the incident light to a direction depending on the wavelength; and a control unit that detects the reflection light on the basis of the light reception amounts of the light reception elements. The diffraction grating is configured to guide, to one of the plurality of light reception elements, a wavelength within a predetermined range that includes the wavelength of the laser light emitted from the light source.

Abstract: An inspection apparatus is provided with: an irradiating device configured to irradiate a sample in which a plurality of layers are laminated with a terahertz wave; a detecting device configured to detect the terahertz wave from the sample to obtain a detected waveform; and an estimating device configured to estimate a position of a boundary surface of the plurality of layers on the basis of the detected waveform and a library indicating an estimated waveform, the library is generated on the basis of a sample waveform that is the detected waveform obtained by irradiating the sample or a sample member with the terahertz wave, the sample member has specifications that are same as those of the sample.

Abstract: An inspecting device is provided with: a radiating unit which radiates terahertz waves onto a sample laminated into a plurality of layers; a detecting unit which acquires a detected waveform by detecting terahertz waves from the sample; a selecting unit which selects a portion of a library representing an estimated waveform, on the basis of the detected waveform; and an estimating unit which estimates a position of an interface between the plurality of layers, on the basis of the detected waveform and the selected partial library.

Abstract: An optical device comprises: a line sensor having a plurality of light reception elements that receive incident light including reflection light resulting from laser light having been emitted from a light source and reflected by an object, and including ambient light; a diffraction grating that guides the incident light to the plurality of light reception elements by diffracting the incident light to a direction depending on the wavelength; and a control unit that detects the reflection light on the basis of the light reception amounts of the light reception elements. The diffraction grating is configured to guide, to one of the plurality of light reception elements, a wavelength within a predetermined range that includes the wavelength of the laser light emitted from the light source.

Abstract: An optical device comprises a diffraction grating that guides a laser light emitted from a light source to a direction having an angle depending on the wavelength, and guides a reflection light resulting from the guided laser light having been reflected by an object and ambient light to respective directions in angles depending on the wavelengths of these lights. The optical device further comprises a light reception element that receives the light guided by the diffraction grating. The reflection light of the laser light is incident on the diffraction grating at the same angle as the angle at which the laser light has been guided by the diffraction grating, and is guided by the diffraction grating at the same angle as the angle at which the laser light has been incident on the diffraction grating.

Abstract: A horn antenna array is provided with a plurality of horn antennas arranged in one direction. Each of the plurality of horn antennas includes two pairs of inclined planes, which define a frustum-shape horn, and on an electromagnetic wave incident side of the horn, ends of a pair of inclined planes arranged in the one direction out of the two pairs of inclined planes project from ends of the other pair of inclined planes out of the two pairs of inclined planes.

Abstract: An inspection apparatus is provided with: an irradiating device configured to irradiate a sample in which a plurality of layers are laminated with a terahertz wave; a detecting device configured to detect the terahertz wave from the sample to obtain a detected waveform; and an estimating device configured to estimate a position of a first boundary surface on the basis of a second boundary surface pulse wave and a library, the second boundary surface pulse wave appearing in the detected waveform to correspond to a second boundary surface that is farther from an outer surface than the first boundary surface, the library representing an estimated waveform of the terahertz wave from the sample.

Abstract: A ranging device comprising a light source unit that emits a pulsed light; an optical scanning unit that scans a predetermined region with the pulsed light and has an intersection point where a path of the pulsed light intersects when viewing a virtual surface inside the predetermined region; a ranging unit that receives a reflected light from an object irradiated with the pulsed light to measure a distance to the object; and a control unit that controls an emission of the pulsed light to the intersection point based on a predetermined condition on the reflected light.

Abstract: Provided is an optical device capable of suppressing variations in the range for scanning light. This optical device comprises: a light source that emits a laser beam; a MEMS mirror that scans the laser beam toward a predetermined range; and a diffraction grating that guides the laser beam to the MEMS mirror by guiding the laser beam in a direction corresponding to the wavelength thereof. The optical device also comprises an MEMS control unit that performs control such that, by employing a change in the optical path of the laser beam caused through the diffraction grating by a change in the wavelength of the laser beam, variations in the scanning range of the laser beam by the MEMS mirror are suppressed.

Abstract: An inspection apparatus is provided with: an irradiating device configured to irradiate a sample in which a plurality of layers are laminated with a terahertz wave; a detecting device configured to detect the terahertz wave from the sample to obtain a detected waveform; and an estimating device configured to estimate a position of a boundary surface of the plurality of layers on the basis of the detected waveform and a library indicating an estimated waveform, the library is generated on the basis of a sample waveform that is the detected waveform obtained by irradiating the sample or a sample member with the terahertz wave, the sample member has specifications that are same as those of the sample.

Abstract: An inspecting device is provided with: a radiating unit which radiates terahertz waves onto a sample laminated into a plurality of layers; a detecting unit which acquires a detected waveform by detecting terahertz waves from the sample; a selecting unit which selects a portion of a library representing an estimated waveform, on the basis of the detected waveform; and an estimating unit which estimates a position of an interface between the plurality of layers, on the basis of the detected waveform and the selected partial library.

Abstract: An inspection apparatus is provided with: an irradiating device configured to irradiate a sample in which a plurality of layers are laminated with a terahertz wave; a detecting device configured to detect the terahertz wave from the sample to obtain a detected waveform; and an estimating device configured to estimate a position of a first boundary surface on the basis of a second boundary surface pulse wave and a library, the second boundary surface pulse wave appearing in the detected waveform to correspond to a second boundary surface that is farther from an outer surface than the first boundary surface, the library representing an estimated waveform of the terahertz wave from the sample.

Abstract: A horn antenna array is provided with a plurality of horn antennas arranged in one direction. Each of the plurality of horn antennas includes two pairs of inclined planes, which define a frustum-shape horn, and on an electromagnetic wave incident side of the horn, ends of a pair of inclined planes arranged in the one direction out of the two pairs of inclined planes project from ends of the other pair of inclined planes out of the two pairs of inclined planes.