Abstract: Provided is an electrophotographic photosensitive member that can suppress the generation of both an interference fringe and a streaky uneven part in a circumferential direction on an image. The generation of the interference fringe and the generation of the streaky uneven part in the circumferential direction on the image are suppressed by defining a length of a line-shaped groove of a support in a circumferential direction, and defining roughness parameters of a support in an axial direction.

Abstract: An average value of a hydrogen content ratio of a surface layer made of hydrogenated amorphous carbon is set to be 0.40 or less and a maximum value of an sp2 bonding ratio in an outermost surface region of the surface layer made of the hydrogenated amorphous carbon is set to be 0.50 or less.

Abstract: An average value of a hydrogen content ratio of a surface layer made of hydrogenated amorphous carbon is set to be 0.40 or less and a maximum value of an sp2 bonding ratio in an outermost surface region of the surface layer made of the hydrogenated amorphous carbon is set to be 0.50 or less.

Abstract: The present invention provides an electrophotographic photosensitive member which has a substrate, a photoconductive layer and a surface layer formed from hydrogenated amorphous silicon carbide in this order. The average value of the carbon content (C/(C+Si)) of the surface layer formed from the hydrogenated amorphous silicon carbide is set at 0.90 or more and less than 1.00, and the average value of the hydrogen content (H/(H+C+Si)) is set at 0.40 or less; and when the average value of the ratios of the sum of a Si—O bond and an O—Si—O bond in the outermost surface region that constitutes a range within a depth of 5 nm or less from the outermost surface of the surface layer is represented by a, and an average value of the silicon content (Si/(C+Si)) is represented by b, 0.015?a*b?0.090 holds.

Abstract: There is provided a technique that includes a process chamber in which a process is performed to a substrate, the process including forming a film containing a main element, a first nozzle configured to supply a precursor containing the main element to the substrate in the process chamber, and a second nozzle configured to supply a reactant to the substrate in the process chamber. The first nozzle includes a first ceiling hole provided at a ceiling portion of the first nozzle and opened in a vertical direction, and a plurality of first side holes provided at a side portion of the first nozzle and opened in a horizontal direction. An opening area of the first ceiling hole is larger than an opening area of each of the plurality of first side holes.

Abstract: Provided is an electrophotographic photosensitive member that improves the sensitivity characteristic and high-humidity deletion resistance, and achieves compatibility between a high image-resolving power and the suppression of an image memory. The electrophotographic photosensitive member comprises an electrophotographic photosensitive member, including: a photoconductive layer; and a surface layer comprising hydrogenated amorphous silicon carbide on the photoconductive layer, in which: a ratio (C/(Si+C)) of a number of carbon atoms (C) to a sum of a number of silicon atoms (Si) and the number of the carbon atoms (C) in the surface layer is 0.50 or more and 0.65 or less; a sum of an atom density of the silicon atoms and an atom density of the carbon atoms in the surface layer is 6.60×1022 atoms/cm3 or more; and a defect density of the surface layer determined by electron spin resonance measurement is 9.0×1018 spins/cm3 or more and 2.2×1019 spins/cm3 or less.

Abstract: An electrophotographic apparatus does not have a unit for maintaining a uniform surface temperature of an electrophotographic photosensitive member through its surface. The electrophotographic photosensitive member has temperature dependent characteristics and is equally divided into two regions in a cylindrical shaft direction such that absolute values of the temperature dependence of the photosensitive-member characteristics in the two regions are not the same. The electrophotographic photosensitive member is arranged so that when, among the two regions, a region which has a smaller absolute value of the temperature dependence of the photosensitive-member characteristics is defined as a first region, and a region which has a larger absolute value of the temperature dependence of the photosensitive-member characteristics is defined as a second region.

Abstract: An ozonized oxygen fed from an ozonizer is passed to a reaction tower to treat an object material. In recovering non-reacted oxygen from the reaction tower to reuse in the ozonizer, zeolite is used as an adsorbent to remove impurities contained in the recovered oxygen, such as water, volatile organic materials and CO.sub.2 gas so that a raw material oxygen without containing any impurity is fed to the ozonizer to increase the ozonizing efficiency.

Abstract: A silent discharge gas laser apparatus has three or more electrodes arranged in axial symmetry with the laser radiation axis and supplied with voltage from a multi-phase high frequency power source to establish a continuous discharge and a higher discharge density at reduced frequencies, particularly in the central region of the discharge zone.

Abstract: An ozonizer comprising a pair of electrodes including a grounding electrode and a high voltage electrode, a dielectric substrate disposed between the grounding electrode and the high voltage electrode, a perforated metal substrate disposed in a gap space between the grounding electrode and the dielectric substrate, wherein the perforated metal substrate comprises first spacing means interspaced between the perforated metal substrate and the dielectric substrate for maintaining a constant separation gap therebetween, second spacing means disposed between the perforated metal substrate and the grounding electrode to maintain the perforated metal substrate in position between the dielectric substrate and the grounding electrode, wherein a uniform separation distance promoting a uniform silent discharge is maintained between the perforated metal substrate and the dielectric substrate by the first and second spacing means.

Abstract: An ozone-generating apparatus comprises an ozonizer; one or more moisture exchangers in which synthetic zeolite having fine pore diameter for inhibiting adsorption of ozone but easily adsorbing moisture, is filled as a moisture adsorbent; and switching means which switches the moisture exchangers at the inlets and the outlets thereof to alternatively repeat a moisture-adsorbing operation for drying air by passing a wet air through one of the moisture exchanger before feeding it to the ozonizer and a moisture adsorbent-recovering operation for drying the synthetic zeolite by passing the dry ozone-containing air generated from the ozonizer through the other moisture exchanger.

Abstract: A moisture exchanger type ozone-generating apparatus comprises one or more pairs of adsorption towers which alternatively repeat a step of adsorption and a step of desorption by passing a dry ozone-containing air, and at least one additional adsorption tower for imparting a step of partial desorption between the step of adsorption and the step of desorption, whereby the decrease of ozone concentration at the switching from the step of adsorption to the step of desorption is reduced.

Abstract: An ozone generating apparatus is disclosed which is quite compact and has a high yield of ozone and which prevents an abnormal rise of temperature in a discharge gap by recycling a liquid coolant having low electric conductivity through an inner part of a high voltage electrode tube of a silent discharge ozonizer to cool the electrode tube.