Abstract: The purpose of the present disclosure is to provide a vacuum processing device that switches the rate of pressure variation depending on, e.g., the type of an object to be inspected, thereby making it possible to ensure operation reliability during inspection of a fragile object to be inspected, while preventing a decrease in throughput. The vacuum processing device according to the present disclosure comprises a preliminary exhaust chamber for the transfer of a sample between a sample chamber and the external air. The conductance of a pipe for ventilating the preliminary exhaust chamber is varied in accordance with a parameter corresponding to the fragility of a shape pattern formed on the sample (see FIG. 5).

Abstract: A vehicle control method is provided for controlling a vehicle having a friction clutch configured to switch between engagement and disengagement between a motor/generator and a drive wheel. The vehicle control method includes maintaining a friction clutch disengaged with slack eliminated in a stroke while the vehicle is stopped, reducing a motor rotational speed using a predetermined rotational speed as a target motor rotational speed in response a request to stop a motor/generator upon determining the motor rotational speed of the motor/generator is greater than the predetermined rotational speed, and when the motor rotational speed has reached the predetermined rotational speed, reducing the motor rotational speed toward zero while limiting the torque of the motor/generator.

Abstract: A vehicle control device is provided with a friction clutch for engaging and disengaging a motor/generator and a drive wheel, a mechanical oil pump driven by the motor/generator to supply hydraulic oil pressure to the friction clutch, an electric oil pump driven by an electric motor to supply hydraulic oil pressure to the friction clutch, and a control unit. The control unit stops a motor/generator when a vehicle stops; maintains a release of a friction clutch when slack in the stroke is eliminated by the hydraulic oil pressure from the electric oil pump; raises a rotational speed of the motor/generator toward a target rotational speed upon a request to cancel stoppage of the motor/generator; and restricts the torque to be less than the motor generator torque at which the target rotational rate can be maintained when the rotational rate of the motor/generator is raised toward the target rotational rate.

Abstract: A vehicle control device is provided with a friction clutch for engaging and disengaging a motor/generator and a drive wheel, a mechanical oil pump driven by the motor/generator to supply hydraulic oil pressure to the friction clutch, an electric oil pump driven by an electric motor to supply hydraulic oil pressure to the friction clutch, and a control unit. The control unit stops a motor/generator when a vehicle stops; maintains a release of a friction clutch when slack in the stroke is eliminated by the hydraulic oil pressure from the electric oil pump; raises a rotational speed of the motor/generator toward a target rotational speed upon a request to cancel stoppage of the motor/generator; and restricts the torque to be less than the motor generator torque at which the target rotational rate can be maintained when the rotational rate of the motor/generator is raised toward the target rotational rate.

Abstract: A vehicle control method is provided for controlling a vehicle having a friction clutch configured to switch between engagement and disengagement between a motor/generator and a drive wheel. The vehicle control method includes maintaining a friction clutch disengaged with slack eliminated in a stroke while the vehicle is stopped, reducing a motor rotational speed using a predetermined rotational speed as a target motor rotational speed in response a request to stop a motor/generator upon determining the motor rotational speed of the motor/generator is greater than the predetermined rotational speed, and when the motor rotational speed has reached the predetermined rotational speed, reducing the motor rotational speed toward zero while limiting the torque of the motor/generator.

Abstract: A plurality of exactly alike vane members are press stamped from a sheet of metal. Each vane member has a blade portion, a core ring portion, a supporting shell portion, a cooling fin portion, and a shrouded ring portion. The vane members are fitted together to form a vaned element with a core ring, a supporting shell and a shrouded cooling fan.